7/18/2012	8:58:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/18/2012	8:58:54 AM	Recipe started at 8:58 AM
7/18/2012	8:58:54 AM	Helium valve closed
7/18/2012	8:58:54 AM	H2 valve closed
7/18/2012	8:58:54 AM	BCl3 valve closed
7/18/2012	8:58:54 AM	PH3 valve closed
7/18/2012	8:58:54 AM	SiCl4 pre valve closed
7/18/2012	8:58:54 AM	SiCl4 post valve closed
7/18/2012	8:58:54 AM	Main Vac valve closed
7/18/2012	8:58:54 AM	Bypass valve closed
7/18/2012	8:58:54 AM	Bubbler valve closed
7/18/2012	8:58:54 AM	Helium MFC set to  0.000000
7/18/2012	8:58:54 AM	H2 MFC set to  0.000000
7/18/2012	8:58:54 AM	BCl3 MFC set to  0.000000
7/18/2012	8:58:54 AM	PH3 MFC set to  0.000000
7/18/2012	8:58:54 AM	SiCl4 MFC set to  0.000000
7/18/2012	8:58:54 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	8:58:54 AM	Tube furnace set to 0
7/18/2012	8:58:57 AM	H2 valve closed
7/18/2012	8:58:57 AM	BCl3 valve closed
7/18/2012	8:58:57 AM	PH3 valve closed
7/18/2012	8:58:57 AM	SiCl4 pre valve closed
7/18/2012	8:58:57 AM	SiCl4 post valve closed
7/18/2012	8:58:57 AM	Main Vac valve closed
7/18/2012	8:58:57 AM	Bypass valve closed
7/18/2012	8:58:57 AM	Bubbler valve closed
7/18/2012	8:58:57 AM	Helium valve opened
7/18/2012	8:58:57 AM	Helium MFC set to  500.000000
7/18/2012	8:58:57 AM	H2 MFC set to  0.000000
7/18/2012	8:58:57 AM	BCl3 MFC set to  0.000000
7/18/2012	8:58:57 AM	PH3 MFC set to  0.000000
7/18/2012	8:58:57 AM	SiCl4 MFC set to  0.000000
7/18/2012	8:58:57 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	8:58:57 AM	Tube furnace set to 0
7/18/2012	9:00:10 AM	Helium valve closed
7/18/2012	9:00:10 AM	H2 valve closed
7/18/2012	9:00:10 AM	BCl3 valve closed
7/18/2012	9:00:10 AM	PH3 valve closed
7/18/2012	9:00:10 AM	SiCl4 pre valve closed
7/18/2012	9:00:10 AM	SiCl4 post valve closed
7/18/2012	9:00:10 AM	Main Vac valve closed
7/18/2012	9:00:10 AM	Bypass valve closed
7/18/2012	9:00:10 AM	Bubbler valve closed
7/18/2012	9:00:10 AM	Helium MFC set to  0.000000
7/18/2012	9:00:10 AM	H2 MFC set to  0.000000
7/18/2012	9:00:10 AM	BCl3 MFC set to  0.000000
7/18/2012	9:00:10 AM	PH3 MFC set to  0.000000
7/18/2012	9:00:10 AM	SiCl4 MFC set to  0.000000
7/18/2012	9:00:10 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	9:00:10 AM	Tube furnace set to 0
7/18/2012	9:00:11 AM	Run finished at 9:00 AM
7/18/2012	9:00:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/18/2012	9:11:33 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/18/2012	9:11:34 AM	Recipe started at 9:11 AM
7/18/2012	9:11:34 AM	Helium valve closed
7/18/2012	9:11:34 AM	H2 valve closed
7/18/2012	9:11:34 AM	BCl3 valve closed
7/18/2012	9:11:34 AM	PH3 valve closed
7/18/2012	9:11:34 AM	SiCl4 pre valve closed
7/18/2012	9:11:34 AM	SiCl4 post valve closed
7/18/2012	9:11:34 AM	Main Vac valve closed
7/18/2012	9:11:34 AM	Bubbler valve closed
7/18/2012	9:11:34 AM	Bypass valve opened
7/18/2012	9:11:34 AM	Helium MFC set to  0.000000
7/18/2012	9:11:34 AM	H2 MFC set to  0.000000
7/18/2012	9:11:34 AM	BCl3 MFC set to  0.000000
7/18/2012	9:11:34 AM	PH3 MFC set to  0.000000
7/18/2012	9:11:34 AM	SiCl4 MFC set to  0.000000
7/18/2012	9:11:34 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	9:11:34 AM	Tube furnace set to 0
7/18/2012	9:12:54 AM	Helium valve closed
7/18/2012	9:12:54 AM	H2 valve closed
7/18/2012	9:12:54 AM	BCl3 valve closed
7/18/2012	9:12:54 AM	PH3 valve closed
7/18/2012	9:12:54 AM	SiCl4 pre valve closed
7/18/2012	9:12:54 AM	SiCl4 post valve closed
7/18/2012	9:12:54 AM	Main Vac valve closed
7/18/2012	9:12:54 AM	Bubbler valve closed
7/18/2012	9:12:54 AM	Bypass valve opened
7/18/2012	9:12:54 AM	Helium MFC set to  0.000000
7/18/2012	9:12:54 AM	H2 MFC set to  0.000000
7/18/2012	9:12:54 AM	BCl3 MFC set to  0.000000
7/18/2012	9:12:54 AM	PH3 MFC set to  0.000000
7/18/2012	9:12:54 AM	SiCl4 MFC set to  0.000000
7/18/2012	9:12:54 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	9:12:54 AM	Tube furnace set to 0
7/18/2012	9:13:54 AM	Helium valve closed
7/18/2012	9:13:54 AM	H2 valve closed
7/18/2012	9:13:54 AM	BCl3 valve closed
7/18/2012	9:13:54 AM	PH3 valve closed
7/18/2012	9:13:54 AM	SiCl4 pre valve closed
7/18/2012	9:13:54 AM	SiCl4 post valve closed
7/18/2012	9:13:54 AM	Bypass valve closed
7/18/2012	9:13:54 AM	Bubbler valve closed
7/18/2012	9:13:54 AM	Main Vac valve opened
7/18/2012	9:13:54 AM	Helium MFC set to  0.000000
7/18/2012	9:13:54 AM	H2 MFC set to  0.000000
7/18/2012	9:13:54 AM	BCl3 MFC set to  0.000000
7/18/2012	9:13:54 AM	PH3 MFC set to  0.000000
7/18/2012	9:13:54 AM	SiCl4 MFC set to  0.000000
7/18/2012	9:13:54 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	9:13:54 AM	Tube furnace set to 0
7/18/2012	9:13:55 AM	Run finished at 9:13 AM
7/18/2012	9:13:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/18/2012	9:18:38 AM	Recipe started at 9:18 AM
7/18/2012	9:18:38 AM	Helium valve closed
7/18/2012	9:18:38 AM	H2 valve closed
7/18/2012	9:18:38 AM	BCl3 valve closed
7/18/2012	9:18:38 AM	PH3 valve closed
7/18/2012	9:18:38 AM	SiCl4 pre valve closed
7/18/2012	9:18:38 AM	SiCl4 post valve closed
7/18/2012	9:18:38 AM	Main Vac valve closed
7/18/2012	9:18:38 AM	Bypass valve closed
7/18/2012	9:18:38 AM	Bubbler valve closed
7/18/2012	9:18:38 AM	Helium MFC set to  0.000000
7/18/2012	9:18:38 AM	H2 MFC set to  0.000000
7/18/2012	9:18:38 AM	BCl3 MFC set to  0.000000
7/18/2012	9:18:38 AM	PH3 MFC set to  0.000000
7/18/2012	9:18:38 AM	SiCl4 MFC set to  0.000000
7/18/2012	9:18:38 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	9:18:39 AM	Tube furnace set to 0
7/18/2012	9:18:42 AM	Helium valve closed
7/18/2012	9:18:42 AM	H2 valve closed
7/18/2012	9:18:42 AM	BCl3 valve closed
7/18/2012	9:18:42 AM	PH3 valve closed
7/18/2012	9:18:42 AM	SiCl4 pre valve closed
7/18/2012	9:18:42 AM	SiCl4 post valve closed
7/18/2012	9:18:42 AM	Main Vac valve closed
7/18/2012	9:18:42 AM	Bubbler valve closed
7/18/2012	9:18:42 AM	Bypass valve opened
7/18/2012	9:18:42 AM	Helium MFC set to  0.000000
7/18/2012	9:18:42 AM	H2 MFC set to  0.000000
7/18/2012	9:18:42 AM	BCl3 MFC set to  0.000000
7/18/2012	9:18:42 AM	PH3 MFC set to  0.000000
7/18/2012	9:18:42 AM	SiCl4 MFC set to  0.000000
7/18/2012	9:18:42 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	9:18:42 AM	Tube furnace set to 0
7/18/2012	9:18:42 AM	Helium valve closed
7/18/2012	9:18:42 AM	H2 valve closed
7/18/2012	9:18:42 AM	BCl3 valve closed
7/18/2012	9:18:42 AM	PH3 valve closed
7/18/2012	9:18:42 AM	SiCl4 pre valve closed
7/18/2012	9:18:42 AM	SiCl4 post valve closed
7/18/2012	9:18:42 AM	Main Vac valve closed
7/18/2012	9:18:42 AM	Bubbler valve closed
7/18/2012	9:18:42 AM	Bypass valve opened
7/18/2012	9:18:42 AM	Helium MFC set to  0.000000
7/18/2012	9:18:42 AM	H2 MFC set to  0.000000
7/18/2012	9:18:42 AM	BCl3 MFC set to  0.000000
7/18/2012	9:18:42 AM	PH3 MFC set to  0.000000
7/18/2012	9:18:42 AM	SiCl4 MFC set to  0.000000
7/18/2012	9:18:42 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	9:18:42 AM	Tube furnace set to 0
7/18/2012	9:19:42 AM	Helium valve closed
7/18/2012	9:19:42 AM	H2 valve closed
7/18/2012	9:19:42 AM	BCl3 valve closed
7/18/2012	9:19:42 AM	PH3 valve closed
7/18/2012	9:19:42 AM	SiCl4 pre valve closed
7/18/2012	9:19:42 AM	SiCl4 post valve closed
7/18/2012	9:19:42 AM	Bypass valve closed
7/18/2012	9:19:42 AM	Bubbler valve closed
7/18/2012	9:19:42 AM	Main Vac valve opened
7/18/2012	9:19:42 AM	Helium MFC set to  0.000000
7/18/2012	9:19:42 AM	H2 MFC set to  0.000000
7/18/2012	9:19:42 AM	BCl3 MFC set to  0.000000
7/18/2012	9:19:42 AM	PH3 MFC set to  0.000000
7/18/2012	9:19:42 AM	SiCl4 MFC set to  0.000000
7/18/2012	9:19:42 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	9:19:42 AM	Tube furnace set to 150
7/18/2012	9:51:10 AM	Helium valve closed
7/18/2012	9:51:10 AM	H2 valve closed
7/18/2012	9:51:10 AM	BCl3 valve closed
7/18/2012	9:51:10 AM	PH3 valve closed
7/18/2012	9:51:10 AM	SiCl4 pre valve closed
7/18/2012	9:51:10 AM	SiCl4 post valve closed
7/18/2012	9:51:10 AM	Bypass valve closed
7/18/2012	9:51:10 AM	Bubbler valve closed
7/18/2012	9:51:10 AM	Main Vac valve opened
7/18/2012	9:51:10 AM	Helium MFC set to  0.000000
7/18/2012	9:51:10 AM	H2 MFC set to  0.000000
7/18/2012	9:51:10 AM	BCl3 MFC set to  0.000000
7/18/2012	9:51:10 AM	PH3 MFC set to  0.000000
7/18/2012	9:51:10 AM	SiCl4 MFC set to  0.000000
7/18/2012	9:51:10 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	9:51:10 AM	Tube furnace set to 0
7/18/2012	9:51:11 AM	Run finished at 9:51 AM
7/18/2012	9:51:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/18/2012	9:51:52 AM	Recipe started at 9:51 AM
7/18/2012	9:51:52 AM	Helium valve closed
7/18/2012	9:51:52 AM	H2 valve closed
7/18/2012	9:51:52 AM	BCl3 valve closed
7/18/2012	9:51:52 AM	PH3 valve closed
7/18/2012	9:51:52 AM	SiCl4 pre valve closed
7/18/2012	9:51:52 AM	SiCl4 post valve closed
7/18/2012	9:51:52 AM	Main Vac valve closed
7/18/2012	9:51:52 AM	Bubbler valve closed
7/18/2012	9:51:52 AM	Bypass valve opened
7/18/2012	9:51:52 AM	Helium MFC set to  0.000000
7/18/2012	9:51:52 AM	H2 MFC set to  0.000000
7/18/2012	9:51:52 AM	BCl3 MFC set to  0.000000
7/18/2012	9:51:52 AM	PH3 MFC set to  0.000000
7/18/2012	9:51:52 AM	SiCl4 MFC set to  0.000000
7/18/2012	9:51:52 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	9:51:52 AM	Tube furnace set to 0
7/18/2012	9:51:52 AM	Helium valve closed
7/18/2012	9:51:52 AM	H2 valve closed
7/18/2012	9:51:52 AM	BCl3 valve closed
7/18/2012	9:51:52 AM	PH3 valve closed
7/18/2012	9:51:52 AM	SiCl4 pre valve closed
7/18/2012	9:51:52 AM	SiCl4 post valve closed
7/18/2012	9:51:52 AM	Main Vac valve closed
7/18/2012	9:51:52 AM	Bubbler valve closed
7/18/2012	9:51:52 AM	Bypass valve opened
7/18/2012	9:51:52 AM	Helium MFC set to  0.000000
7/18/2012	9:51:52 AM	H2 MFC set to  0.000000
7/18/2012	9:51:52 AM	BCl3 MFC set to  0.000000
7/18/2012	9:51:52 AM	PH3 MFC set to  0.000000
7/18/2012	9:51:52 AM	SiCl4 MFC set to  0.000000
7/18/2012	9:51:53 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	9:51:53 AM	Tube furnace set to 0
7/18/2012	9:52:23 AM	Helium valve closed
7/18/2012	9:52:23 AM	H2 valve closed
7/18/2012	9:52:23 AM	BCl3 valve closed
7/18/2012	9:52:23 AM	PH3 valve closed
7/18/2012	9:52:23 AM	SiCl4 pre valve closed
7/18/2012	9:52:23 AM	SiCl4 post valve closed
7/18/2012	9:52:23 AM	Bypass valve closed
7/18/2012	9:52:23 AM	Bubbler valve closed
7/18/2012	9:52:23 AM	Main Vac valve opened
7/18/2012	9:52:23 AM	Helium MFC set to  0.000000
7/18/2012	9:52:23 AM	H2 MFC set to  0.000000
7/18/2012	9:52:23 AM	BCl3 MFC set to  0.000000
7/18/2012	9:52:23 AM	PH3 MFC set to  0.000000
7/18/2012	9:52:23 AM	SiCl4 MFC set to  0.000000
7/18/2012	9:52:23 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	9:52:23 AM	Tube furnace set to 0
7/18/2012	9:52:53 AM	H2 valve closed
7/18/2012	9:52:53 AM	BCl3 valve closed
7/18/2012	9:52:53 AM	PH3 valve closed
7/18/2012	9:52:53 AM	SiCl4 pre valve closed
7/18/2012	9:52:53 AM	SiCl4 post valve closed
7/18/2012	9:52:53 AM	Bypass valve closed
7/18/2012	9:52:53 AM	Bubbler valve closed
7/18/2012	9:52:53 AM	Helium valve opened
7/18/2012	9:52:53 AM	Main Vac valve opened
7/18/2012	9:52:53 AM	Helium MFC set to  20.000000
7/18/2012	9:52:53 AM	H2 MFC set to  0.000000
7/18/2012	9:52:53 AM	BCl3 MFC set to  0.000000
7/18/2012	9:52:53 AM	PH3 MFC set to  0.000000
7/18/2012	9:52:53 AM	SiCl4 MFC set to  0.000000
7/18/2012	9:52:53 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	9:52:53 AM	Tube furnace set to 0
7/18/2012	9:53:23 AM	Helium valve closed
7/18/2012	9:53:23 AM	H2 valve closed
7/18/2012	9:53:23 AM	BCl3 valve closed
7/18/2012	9:53:23 AM	PH3 valve closed
7/18/2012	9:53:23 AM	SiCl4 pre valve closed
7/18/2012	9:53:23 AM	SiCl4 post valve closed
7/18/2012	9:53:23 AM	Bypass valve closed
7/18/2012	9:53:23 AM	Bubbler valve closed
7/18/2012	9:53:23 AM	Main Vac valve opened
7/18/2012	9:53:23 AM	Helium MFC set to  0.000000
7/18/2012	9:53:23 AM	H2 MFC set to  0.000000
7/18/2012	9:53:23 AM	BCl3 MFC set to  0.000000
7/18/2012	9:53:23 AM	PH3 MFC set to  0.000000
7/18/2012	9:53:23 AM	SiCl4 MFC set to  0.000000
7/18/2012	9:53:23 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	9:53:23 AM	Tube furnace set to 0
7/18/2012	9:53:53 AM	H2 valve closed
7/18/2012	9:53:53 AM	BCl3 valve closed
7/18/2012	9:53:53 AM	PH3 valve closed
7/18/2012	9:53:53 AM	SiCl4 pre valve closed
7/18/2012	9:53:53 AM	SiCl4 post valve closed
7/18/2012	9:53:53 AM	Bypass valve closed
7/18/2012	9:53:53 AM	Bubbler valve closed
7/18/2012	9:53:53 AM	Helium valve opened
7/18/2012	9:53:53 AM	Main Vac valve opened
7/18/2012	9:53:53 AM	Helium MFC set to  20.000000
7/18/2012	9:53:53 AM	H2 MFC set to  0.000000
7/18/2012	9:53:53 AM	BCl3 MFC set to  0.000000
7/18/2012	9:53:53 AM	PH3 MFC set to  0.000000
7/18/2012	9:53:53 AM	SiCl4 MFC set to  0.000000
7/18/2012	9:53:53 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	9:53:54 AM	Tube furnace set to 0
7/18/2012	9:54:24 AM	Helium valve closed
7/18/2012	9:54:24 AM	H2 valve closed
7/18/2012	9:54:24 AM	BCl3 valve closed
7/18/2012	9:54:24 AM	PH3 valve closed
7/18/2012	9:54:24 AM	SiCl4 pre valve closed
7/18/2012	9:54:24 AM	SiCl4 post valve closed
7/18/2012	9:54:24 AM	Bypass valve closed
7/18/2012	9:54:24 AM	Bubbler valve closed
7/18/2012	9:54:24 AM	Main Vac valve opened
7/18/2012	9:54:24 AM	Helium MFC set to  0.000000
7/18/2012	9:54:24 AM	H2 MFC set to  0.000000
7/18/2012	9:54:24 AM	BCl3 MFC set to  0.000000
7/18/2012	9:54:24 AM	PH3 MFC set to  0.000000
7/18/2012	9:54:24 AM	SiCl4 MFC set to  0.000000
7/18/2012	9:54:24 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	9:54:24 AM	Tube furnace set to 0
7/18/2012	9:54:54 AM	H2 valve closed
7/18/2012	9:54:54 AM	BCl3 valve closed
7/18/2012	9:54:54 AM	PH3 valve closed
7/18/2012	9:54:54 AM	SiCl4 pre valve closed
7/18/2012	9:54:54 AM	SiCl4 post valve closed
7/18/2012	9:54:54 AM	Bypass valve closed
7/18/2012	9:54:54 AM	Bubbler valve closed
7/18/2012	9:54:54 AM	Helium valve opened
7/18/2012	9:54:54 AM	Main Vac valve opened
7/18/2012	9:54:54 AM	Helium MFC set to  20.000000
7/18/2012	9:54:54 AM	H2 MFC set to  0.000000
7/18/2012	9:54:54 AM	BCl3 MFC set to  0.000000
7/18/2012	9:54:54 AM	PH3 MFC set to  0.000000
7/18/2012	9:54:54 AM	SiCl4 MFC set to  0.000000
7/18/2012	9:54:54 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	9:54:54 AM	Tube furnace set to 0
7/18/2012	9:55:24 AM	Helium valve closed
7/18/2012	9:55:24 AM	H2 valve closed
7/18/2012	9:55:24 AM	BCl3 valve closed
7/18/2012	9:55:24 AM	PH3 valve closed
7/18/2012	9:55:24 AM	SiCl4 pre valve closed
7/18/2012	9:55:24 AM	SiCl4 post valve closed
7/18/2012	9:55:24 AM	Bypass valve closed
7/18/2012	9:55:24 AM	Bubbler valve closed
7/18/2012	9:55:24 AM	Main Vac valve opened
7/18/2012	9:55:24 AM	Helium MFC set to  0.000000
7/18/2012	9:55:24 AM	H2 MFC set to  0.000000
7/18/2012	9:55:24 AM	BCl3 MFC set to  0.000000
7/18/2012	9:55:24 AM	PH3 MFC set to  0.000000
7/18/2012	9:55:24 AM	SiCl4 MFC set to  0.000000
7/18/2012	9:55:24 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	9:55:24 AM	Tube furnace set to 0
7/18/2012	9:55:54 AM	H2 valve closed
7/18/2012	9:55:54 AM	BCl3 valve closed
7/18/2012	9:55:54 AM	PH3 valve closed
7/18/2012	9:55:54 AM	SiCl4 pre valve closed
7/18/2012	9:55:54 AM	SiCl4 post valve closed
7/18/2012	9:55:54 AM	Bypass valve closed
7/18/2012	9:55:54 AM	Bubbler valve closed
7/18/2012	9:55:54 AM	Helium valve opened
7/18/2012	9:55:54 AM	Main Vac valve opened
7/18/2012	9:55:54 AM	Helium MFC set to  20.000000
7/18/2012	9:55:54 AM	H2 MFC set to  0.000000
7/18/2012	9:55:54 AM	BCl3 MFC set to  0.000000
7/18/2012	9:55:54 AM	PH3 MFC set to  0.000000
7/18/2012	9:55:54 AM	SiCl4 MFC set to  0.000000
7/18/2012	9:55:54 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	9:55:55 AM	Tube furnace set to 0
7/18/2012	9:56:25 AM	Helium valve closed
7/18/2012	9:56:25 AM	H2 valve closed
7/18/2012	9:56:25 AM	BCl3 valve closed
7/18/2012	9:56:25 AM	PH3 valve closed
7/18/2012	9:56:25 AM	SiCl4 pre valve closed
7/18/2012	9:56:25 AM	SiCl4 post valve closed
7/18/2012	9:56:25 AM	Bypass valve closed
7/18/2012	9:56:25 AM	Bubbler valve closed
7/18/2012	9:56:25 AM	Main Vac valve opened
7/18/2012	9:56:25 AM	Helium MFC set to  0.000000
7/18/2012	9:56:25 AM	H2 MFC set to  0.000000
7/18/2012	9:56:25 AM	BCl3 MFC set to  0.000000
7/18/2012	9:56:25 AM	PH3 MFC set to  0.000000
7/18/2012	9:56:25 AM	SiCl4 MFC set to  0.000000
7/18/2012	9:56:25 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	9:56:25 AM	Tube furnace set to 0
7/18/2012	9:56:55 AM	H2 valve closed
7/18/2012	9:56:55 AM	BCl3 valve closed
7/18/2012	9:56:55 AM	PH3 valve closed
7/18/2012	9:56:55 AM	SiCl4 pre valve closed
7/18/2012	9:56:55 AM	SiCl4 post valve closed
7/18/2012	9:56:55 AM	Bypass valve closed
7/18/2012	9:56:55 AM	Bubbler valve closed
7/18/2012	9:56:55 AM	Helium valve opened
7/18/2012	9:56:55 AM	Main Vac valve opened
7/18/2012	9:56:55 AM	Helium MFC set to  20.000000
7/18/2012	9:56:55 AM	H2 MFC set to  0.000000
7/18/2012	9:56:55 AM	BCl3 MFC set to  0.000000
7/18/2012	9:56:55 AM	PH3 MFC set to  0.000000
7/18/2012	9:56:55 AM	SiCl4 MFC set to  0.000000
7/18/2012	9:56:55 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	9:56:55 AM	Tube furnace set to 0
7/18/2012	9:57:25 AM	Helium valve closed
7/18/2012	9:57:25 AM	H2 valve closed
7/18/2012	9:57:25 AM	BCl3 valve closed
7/18/2012	9:57:25 AM	PH3 valve closed
7/18/2012	9:57:25 AM	SiCl4 pre valve closed
7/18/2012	9:57:25 AM	SiCl4 post valve closed
7/18/2012	9:57:25 AM	Bypass valve closed
7/18/2012	9:57:25 AM	Bubbler valve closed
7/18/2012	9:57:25 AM	Main Vac valve opened
7/18/2012	9:57:25 AM	Helium MFC set to  0.000000
7/18/2012	9:57:25 AM	H2 MFC set to  0.000000
7/18/2012	9:57:25 AM	BCl3 MFC set to  0.000000
7/18/2012	9:57:25 AM	PH3 MFC set to  0.000000
7/18/2012	9:57:25 AM	SiCl4 MFC set to  0.000000
7/18/2012	9:57:25 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	9:57:25 AM	Tube furnace set to 0
7/18/2012	9:57:55 AM	H2 valve closed
7/18/2012	9:57:55 AM	BCl3 valve closed
7/18/2012	9:57:55 AM	PH3 valve closed
7/18/2012	9:57:55 AM	SiCl4 pre valve closed
7/18/2012	9:57:55 AM	SiCl4 post valve closed
7/18/2012	9:57:55 AM	Bypass valve closed
7/18/2012	9:57:55 AM	Bubbler valve closed
7/18/2012	9:57:55 AM	Helium valve opened
7/18/2012	9:57:55 AM	Main Vac valve opened
7/18/2012	9:57:55 AM	Helium MFC set to  20.000000
7/18/2012	9:57:55 AM	H2 MFC set to  0.000000
7/18/2012	9:57:55 AM	BCl3 MFC set to  0.000000
7/18/2012	9:57:55 AM	PH3 MFC set to  0.000000
7/18/2012	9:57:55 AM	SiCl4 MFC set to  0.000000
7/18/2012	9:57:55 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	9:57:55 AM	Tube furnace set to 0
7/18/2012	9:58:26 AM	Helium valve closed
7/18/2012	9:58:26 AM	H2 valve closed
7/18/2012	9:58:26 AM	BCl3 valve closed
7/18/2012	9:58:26 AM	PH3 valve closed
7/18/2012	9:58:26 AM	SiCl4 pre valve closed
7/18/2012	9:58:26 AM	SiCl4 post valve closed
7/18/2012	9:58:26 AM	Bypass valve closed
7/18/2012	9:58:26 AM	Bubbler valve closed
7/18/2012	9:58:26 AM	Main Vac valve opened
7/18/2012	9:58:26 AM	Helium MFC set to  0.000000
7/18/2012	9:58:26 AM	H2 MFC set to  0.000000
7/18/2012	9:58:26 AM	BCl3 MFC set to  0.000000
7/18/2012	9:58:26 AM	PH3 MFC set to  0.000000
7/18/2012	9:58:26 AM	SiCl4 MFC set to  0.000000
7/18/2012	9:58:26 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	9:58:26 AM	Tube furnace set to 0
7/18/2012	9:58:56 AM	H2 valve closed
7/18/2012	9:58:56 AM	BCl3 valve closed
7/18/2012	9:58:56 AM	PH3 valve closed
7/18/2012	9:58:56 AM	SiCl4 pre valve closed
7/18/2012	9:58:56 AM	SiCl4 post valve closed
7/18/2012	9:58:56 AM	Bypass valve closed
7/18/2012	9:58:56 AM	Bubbler valve closed
7/18/2012	9:58:56 AM	Helium valve opened
7/18/2012	9:58:56 AM	Main Vac valve opened
7/18/2012	9:58:56 AM	Helium MFC set to  20.000000
7/18/2012	9:58:56 AM	H2 MFC set to  0.000000
7/18/2012	9:58:56 AM	BCl3 MFC set to  0.000000
7/18/2012	9:58:56 AM	PH3 MFC set to  0.000000
7/18/2012	9:58:56 AM	SiCl4 MFC set to  0.000000
7/18/2012	9:58:56 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	9:58:56 AM	Tube furnace set to 0
7/18/2012	9:59:26 AM	Helium valve closed
7/18/2012	9:59:26 AM	H2 valve closed
7/18/2012	9:59:26 AM	BCl3 valve closed
7/18/2012	9:59:26 AM	PH3 valve closed
7/18/2012	9:59:26 AM	SiCl4 pre valve closed
7/18/2012	9:59:26 AM	SiCl4 post valve closed
7/18/2012	9:59:26 AM	Bypass valve closed
7/18/2012	9:59:26 AM	Bubbler valve closed
7/18/2012	9:59:26 AM	Main Vac valve opened
7/18/2012	9:59:26 AM	Helium MFC set to  0.000000
7/18/2012	9:59:26 AM	H2 MFC set to  0.000000
7/18/2012	9:59:26 AM	BCl3 MFC set to  0.000000
7/18/2012	9:59:26 AM	PH3 MFC set to  0.000000
7/18/2012	9:59:26 AM	SiCl4 MFC set to  0.000000
7/18/2012	9:59:26 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	9:59:26 AM	Tube furnace set to 0
7/18/2012	9:59:56 AM	H2 valve closed
7/18/2012	9:59:56 AM	BCl3 valve closed
7/18/2012	9:59:56 AM	PH3 valve closed
7/18/2012	9:59:56 AM	SiCl4 pre valve closed
7/18/2012	9:59:56 AM	SiCl4 post valve closed
7/18/2012	9:59:56 AM	Bypass valve closed
7/18/2012	9:59:56 AM	Bubbler valve closed
7/18/2012	9:59:56 AM	Helium valve opened
7/18/2012	9:59:56 AM	Main Vac valve opened
7/18/2012	9:59:56 AM	Helium MFC set to  20.000000
7/18/2012	9:59:56 AM	H2 MFC set to  0.000000
7/18/2012	9:59:56 AM	BCl3 MFC set to  0.000000
7/18/2012	9:59:56 AM	PH3 MFC set to  0.000000
7/18/2012	9:59:56 AM	SiCl4 MFC set to  0.000000
7/18/2012	9:59:56 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	9:59:56 AM	Tube furnace set to 0
7/18/2012	10:00:26 AM	Helium valve closed
7/18/2012	10:00:26 AM	H2 valve closed
7/18/2012	10:00:26 AM	BCl3 valve closed
7/18/2012	10:00:26 AM	PH3 valve closed
7/18/2012	10:00:26 AM	SiCl4 pre valve closed
7/18/2012	10:00:26 AM	SiCl4 post valve closed
7/18/2012	10:00:26 AM	Bypass valve closed
7/18/2012	10:00:26 AM	Bubbler valve closed
7/18/2012	10:00:26 AM	Main Vac valve opened
7/18/2012	10:00:26 AM	Helium MFC set to  0.000000
7/18/2012	10:00:26 AM	H2 MFC set to  0.000000
7/18/2012	10:00:26 AM	BCl3 MFC set to  0.000000
7/18/2012	10:00:27 AM	PH3 MFC set to  0.000000
7/18/2012	10:00:27 AM	SiCl4 MFC set to  0.000000
7/18/2012	10:00:27 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	10:00:27 AM	Tube furnace set to 0
7/18/2012	10:00:57 AM	H2 valve closed
7/18/2012	10:00:57 AM	BCl3 valve closed
7/18/2012	10:00:57 AM	PH3 valve closed
7/18/2012	10:00:57 AM	SiCl4 pre valve closed
7/18/2012	10:00:57 AM	SiCl4 post valve closed
7/18/2012	10:00:57 AM	Bypass valve closed
7/18/2012	10:00:57 AM	Bubbler valve closed
7/18/2012	10:00:57 AM	Helium valve opened
7/18/2012	10:00:57 AM	Main Vac valve opened
7/18/2012	10:00:57 AM	Helium MFC set to  20.000000
7/18/2012	10:00:57 AM	H2 MFC set to  0.000000
7/18/2012	10:00:57 AM	BCl3 MFC set to  0.000000
7/18/2012	10:00:57 AM	PH3 MFC set to  0.000000
7/18/2012	10:00:57 AM	SiCl4 MFC set to  0.000000
7/18/2012	10:00:57 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	10:00:57 AM	Tube furnace set to 0
7/18/2012	10:01:27 AM	Helium valve closed
7/18/2012	10:01:27 AM	H2 valve closed
7/18/2012	10:01:27 AM	BCl3 valve closed
7/18/2012	10:01:27 AM	PH3 valve closed
7/18/2012	10:01:27 AM	SiCl4 pre valve closed
7/18/2012	10:01:27 AM	SiCl4 post valve closed
7/18/2012	10:01:27 AM	Bypass valve closed
7/18/2012	10:01:27 AM	Bubbler valve closed
7/18/2012	10:01:27 AM	Main Vac valve opened
7/18/2012	10:01:27 AM	Helium MFC set to  0.000000
7/18/2012	10:01:27 AM	H2 MFC set to  0.000000
7/18/2012	10:01:27 AM	BCl3 MFC set to  0.000000
7/18/2012	10:01:27 AM	PH3 MFC set to  0.000000
7/18/2012	10:01:27 AM	SiCl4 MFC set to  0.000000
7/18/2012	10:01:27 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	10:01:27 AM	Tube furnace set to 0
7/18/2012	10:01:57 AM	H2 valve closed
7/18/2012	10:01:57 AM	BCl3 valve closed
7/18/2012	10:01:57 AM	PH3 valve closed
7/18/2012	10:01:57 AM	SiCl4 pre valve closed
7/18/2012	10:01:57 AM	SiCl4 post valve closed
7/18/2012	10:01:57 AM	Bypass valve closed
7/18/2012	10:01:57 AM	Bubbler valve closed
7/18/2012	10:01:57 AM	Helium valve opened
7/18/2012	10:01:57 AM	Main Vac valve opened
7/18/2012	10:01:57 AM	Helium MFC set to  20.000000
7/18/2012	10:01:57 AM	H2 MFC set to  0.000000
7/18/2012	10:01:57 AM	BCl3 MFC set to  0.000000
7/18/2012	10:01:57 AM	PH3 MFC set to  0.000000
7/18/2012	10:01:57 AM	SiCl4 MFC set to  0.000000
7/18/2012	10:01:57 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	10:01:57 AM	Tube furnace set to 0
7/18/2012	10:02:27 AM	Helium valve closed
7/18/2012	10:02:27 AM	H2 valve closed
7/18/2012	10:02:27 AM	BCl3 valve closed
7/18/2012	10:02:27 AM	PH3 valve closed
7/18/2012	10:02:27 AM	SiCl4 pre valve closed
7/18/2012	10:02:27 AM	SiCl4 post valve closed
7/18/2012	10:02:27 AM	Bypass valve closed
7/18/2012	10:02:27 AM	Bubbler valve closed
7/18/2012	10:02:27 AM	Main Vac valve opened
7/18/2012	10:02:27 AM	Helium MFC set to  0.000000
7/18/2012	10:02:27 AM	H2 MFC set to  0.000000
7/18/2012	10:02:27 AM	BCl3 MFC set to  0.000000
7/18/2012	10:02:27 AM	PH3 MFC set to  0.000000
7/18/2012	10:02:27 AM	SiCl4 MFC set to  0.000000
7/18/2012	10:02:27 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	10:02:28 AM	Tube furnace set to 0
7/18/2012	10:02:29 AM	Run finished at 10:02 AM
7/18/2012	10:02:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/18/2012	10:11:37 AM	Main Vac valve closed
7/18/2012	10:11:49 AM	Main Vac valve opened
7/18/2012	10:14:45 AM	Recipe started at 10:14 AM
7/18/2012	10:14:45 AM	Helium valve closed
7/18/2012	10:14:45 AM	H2 valve closed
7/18/2012	10:14:45 AM	BCl3 valve closed
7/18/2012	10:14:45 AM	PH3 valve closed
7/18/2012	10:14:45 AM	SiCl4 pre valve closed
7/18/2012	10:14:45 AM	SiCl4 post valve closed
7/18/2012	10:14:45 AM	Main Vac valve closed
7/18/2012	10:14:45 AM	Bypass valve closed
7/18/2012	10:14:45 AM	Bubbler valve closed
7/18/2012	10:14:45 AM	Helium MFC set to  0.000000
7/18/2012	10:14:45 AM	H2 MFC set to  0.000000
7/18/2012	10:14:45 AM	BCl3 MFC set to  0.000000
7/18/2012	10:14:45 AM	PH3 MFC set to  0.000000
7/18/2012	10:14:45 AM	SiCl4 MFC set to  0.000000
7/18/2012	10:14:45 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	10:14:45 AM	Tube furnace set to 0
7/18/2012	10:14:48 AM	Helium valve closed
7/18/2012	10:14:48 AM	BCl3 valve closed
7/18/2012	10:14:48 AM	PH3 valve closed
7/18/2012	10:14:48 AM	SiCl4 pre valve closed
7/18/2012	10:14:48 AM	SiCl4 post valve closed
7/18/2012	10:14:48 AM	Main Vac valve closed
7/18/2012	10:14:48 AM	Bypass valve closed
7/18/2012	10:14:48 AM	Bubbler valve closed
7/18/2012	10:14:48 AM	H2 valve opened
7/18/2012	10:14:48 AM	Helium MFC set to  0.000000
7/18/2012	10:14:48 AM	H2 MFC set to  500.000000
7/18/2012	10:14:48 AM	BCl3 MFC set to  0.000000
7/18/2012	10:14:48 AM	PH3 MFC set to  0.000000
7/18/2012	10:14:48 AM	SiCl4 MFC set to  0.000000
7/18/2012	10:14:48 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	10:14:48 AM	Tube furnace set to 50
7/18/2012	10:16:02 AM	Helium valve closed
7/18/2012	10:16:02 AM	BCl3 valve closed
7/18/2012	10:16:02 AM	PH3 valve closed
7/18/2012	10:16:02 AM	SiCl4 pre valve closed
7/18/2012	10:16:02 AM	SiCl4 post valve closed
7/18/2012	10:16:02 AM	Main Vac valve closed
7/18/2012	10:16:02 AM	Bypass valve closed
7/18/2012	10:16:02 AM	H2 valve opened
7/18/2012	10:16:02 AM	Bubbler valve opened
7/18/2012	10:16:02 AM	Helium MFC set to  0.000000
7/18/2012	10:16:02 AM	H2 MFC set to  500.000000
7/18/2012	10:16:02 AM	BCl3 MFC set to  0.000000
7/18/2012	10:16:02 AM	PH3 MFC set to  0.000000
7/18/2012	10:16:02 AM	SiCl4 MFC set to  0.000000
7/18/2012	10:16:02 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	10:16:02 AM	Tube furnace set to 50
7/18/2012	10:16:03 AM	Helium valve closed
7/18/2012	10:16:03 AM	BCl3 valve closed
7/18/2012	10:16:03 AM	PH3 valve closed
7/18/2012	10:16:03 AM	SiCl4 pre valve closed
7/18/2012	10:16:03 AM	SiCl4 post valve closed
7/18/2012	10:16:03 AM	Main Vac valve closed
7/18/2012	10:16:03 AM	Bypass valve closed
7/18/2012	10:16:03 AM	H2 valve opened
7/18/2012	10:16:03 AM	Bubbler valve opened
7/18/2012	10:16:03 AM	Helium MFC set to  0.000000
7/18/2012	10:16:03 AM	H2 MFC set to  500.000000
7/18/2012	10:16:03 AM	BCl3 MFC set to  0.000000
7/18/2012	10:16:03 AM	PH3 MFC set to  0.000000
7/18/2012	10:16:03 AM	SiCl4 MFC set to  0.000000
7/18/2012	10:16:03 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	10:16:03 AM	Tube furnace set to 1000
7/18/2012	10:36:03 AM	Helium valve closed
7/18/2012	10:36:03 AM	BCl3 valve closed
7/18/2012	10:36:03 AM	PH3 valve closed
7/18/2012	10:36:03 AM	Main Vac valve closed
7/18/2012	10:36:03 AM	Bypass valve closed
7/18/2012	10:36:03 AM	H2 valve opened
7/18/2012	10:36:03 AM	SiCl4 pre valve opened
7/18/2012	10:36:03 AM	SiCl4 post valve opened
7/18/2012	10:36:03 AM	Bubbler valve opened
7/18/2012	10:36:03 AM	Helium MFC set to  0.000000
7/18/2012	10:36:03 AM	H2 MFC set to  500.000000
7/18/2012	10:36:03 AM	BCl3 MFC set to  0.000000
7/18/2012	10:36:03 AM	PH3 MFC set to  0.000000
7/18/2012	10:36:03 AM	SiCl4 MFC set to  50.000000
7/18/2012	10:36:03 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	10:36:04 AM	Tube furnace set to 1000
7/18/2012	11:06:04 AM	Helium valve closed
7/18/2012	11:06:04 AM	BCl3 valve closed
7/18/2012	11:06:04 AM	PH3 valve closed
7/18/2012	11:06:04 AM	SiCl4 pre valve closed
7/18/2012	11:06:04 AM	SiCl4 post valve closed
7/18/2012	11:06:04 AM	Main Vac valve closed
7/18/2012	11:06:04 AM	Bypass valve closed
7/18/2012	11:06:04 AM	H2 valve opened
7/18/2012	11:06:04 AM	Bubbler valve opened
7/18/2012	11:06:04 AM	Helium MFC set to  0.000000
7/18/2012	11:06:04 AM	H2 MFC set to  480.000000
7/18/2012	11:06:04 AM	BCl3 MFC set to  0.000000
7/18/2012	11:06:04 AM	PH3 MFC set to  0.000000
7/18/2012	11:06:04 AM	SiCl4 MFC set to  0.000000
7/18/2012	11:06:04 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	11:06:04 AM	Tube furnace set to 750
7/18/2012	11:16:04 AM	H2 valve closed
7/18/2012	11:16:04 AM	BCl3 valve closed
7/18/2012	11:16:04 AM	PH3 valve closed
7/18/2012	11:16:04 AM	SiCl4 pre valve closed
7/18/2012	11:16:04 AM	SiCl4 post valve closed
7/18/2012	11:16:04 AM	Main Vac valve closed
7/18/2012	11:16:04 AM	Bypass valve closed
7/18/2012	11:16:04 AM	Helium valve opened
7/18/2012	11:16:04 AM	Bubbler valve opened
7/18/2012	11:16:04 AM	Helium MFC set to  400.000000
7/18/2012	11:16:04 AM	H2 MFC set to  0.000000
7/18/2012	11:16:04 AM	BCl3 MFC set to  0.000000
7/18/2012	11:16:04 AM	PH3 MFC set to  0.000000
7/18/2012	11:16:04 AM	SiCl4 MFC set to  0.000000
7/18/2012	11:16:04 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	11:16:04 AM	Tube furnace set to 0
7/18/2012	11:23:11 AM	Run aborted at 11:23 AM
7/18/2012	11:23:11 AM	Helium valve closed
7/18/2012	11:23:11 AM	H2 valve closed
7/18/2012	11:23:11 AM	BCl3 valve closed
7/18/2012	11:23:11 AM	PH3 valve closed
7/18/2012	11:23:11 AM	SiCl4 pre valve closed
7/18/2012	11:23:11 AM	SiCl4 post valve closed
7/18/2012	11:23:11 AM	Bypass valve closed
7/18/2012	11:23:11 AM	Main Vac valve closed
7/18/2012	11:23:11 AM	Bubbler valve closed
7/18/2012	11:23:11 AM	Helium MFC set to  0.000000
7/18/2012	11:23:11 AM	H2 MFC set to  0.000000
7/18/2012	11:23:11 AM	BCl3 MFC set to  0.000000
7/18/2012	11:23:11 AM	PH3 MFC set to  0.000000
7/18/2012	11:23:11 AM	SiCl4 MFC set to  0.000000
7/18/2012	11:23:11 AM	Tube furnace set to 0
7/18/2012	11:23:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/18/2012	11:23:22 AM	Recipe started at 11:23 AM
7/18/2012	11:23:22 AM	Helium valve closed
7/18/2012	11:23:22 AM	H2 valve closed
7/18/2012	11:23:22 AM	BCl3 valve closed
7/18/2012	11:23:22 AM	PH3 valve closed
7/18/2012	11:23:22 AM	SiCl4 pre valve closed
7/18/2012	11:23:22 AM	SiCl4 post valve closed
7/18/2012	11:23:22 AM	Main Vac valve closed
7/18/2012	11:23:22 AM	Bypass valve closed
7/18/2012	11:23:22 AM	Bubbler valve closed
7/18/2012	11:23:22 AM	Helium MFC set to  0.000000
7/18/2012	11:23:22 AM	H2 MFC set to  0.000000
7/18/2012	11:23:22 AM	BCl3 MFC set to  0.000000
7/18/2012	11:23:22 AM	PH3 MFC set to  0.000000
7/18/2012	11:23:22 AM	SiCl4 MFC set to  0.000000
7/18/2012	11:23:22 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	11:23:22 AM	Tube furnace set to 0
7/18/2012	11:23:25 AM	H2 valve closed
7/18/2012	11:23:25 AM	BCl3 valve closed
7/18/2012	11:23:25 AM	PH3 valve closed
7/18/2012	11:23:25 AM	SiCl4 pre valve closed
7/18/2012	11:23:25 AM	SiCl4 post valve closed
7/18/2012	11:23:25 AM	Main Vac valve closed
7/18/2012	11:23:25 AM	Bypass valve closed
7/18/2012	11:23:25 AM	Bubbler valve closed
7/18/2012	11:23:25 AM	Helium valve opened
7/18/2012	11:23:25 AM	Helium MFC set to  500.000000
7/18/2012	11:23:25 AM	H2 MFC set to  0.000000
7/18/2012	11:23:25 AM	BCl3 MFC set to  0.000000
7/18/2012	11:23:25 AM	PH3 MFC set to  0.000000
7/18/2012	11:23:25 AM	SiCl4 MFC set to  0.000000
7/18/2012	11:23:25 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	11:23:25 AM	Tube furnace set to 0
7/18/2012	11:23:26 AM	Helium valve closed
7/18/2012	11:23:26 AM	H2 valve closed
7/18/2012	11:23:26 AM	BCl3 valve closed
7/18/2012	11:23:26 AM	PH3 valve closed
7/18/2012	11:23:26 AM	SiCl4 pre valve closed
7/18/2012	11:23:26 AM	SiCl4 post valve closed
7/18/2012	11:23:26 AM	Main Vac valve closed
7/18/2012	11:23:26 AM	Bypass valve closed
7/18/2012	11:23:26 AM	Bubbler valve closed
7/18/2012	11:23:26 AM	Helium MFC set to  0.000000
7/18/2012	11:23:26 AM	H2 MFC set to  0.000000
7/18/2012	11:23:26 AM	BCl3 MFC set to  0.000000
7/18/2012	11:23:26 AM	PH3 MFC set to  0.000000
7/18/2012	11:23:26 AM	SiCl4 MFC set to  0.000000
7/18/2012	11:23:26 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	11:23:26 AM	Tube furnace set to 0
7/18/2012	11:23:27 AM	Run finished at 11:23 AM
7/18/2012	11:23:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/18/2012	11:28:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/18/2012	11:28:49 AM	Recipe started at 11:28 AM
7/18/2012	11:28:49 AM	Helium valve closed
7/18/2012	11:28:49 AM	H2 valve closed
7/18/2012	11:28:49 AM	BCl3 valve closed
7/18/2012	11:28:49 AM	PH3 valve closed
7/18/2012	11:28:49 AM	SiCl4 pre valve closed
7/18/2012	11:28:49 AM	SiCl4 post valve closed
7/18/2012	11:28:49 AM	Main Vac valve closed
7/18/2012	11:28:49 AM	Bubbler valve closed
7/18/2012	11:28:49 AM	Bypass valve opened
7/18/2012	11:28:49 AM	Helium MFC set to  0.000000
7/18/2012	11:28:49 AM	H2 MFC set to  0.000000
7/18/2012	11:28:49 AM	BCl3 MFC set to  0.000000
7/18/2012	11:28:49 AM	PH3 MFC set to  0.000000
7/18/2012	11:28:49 AM	SiCl4 MFC set to  0.000000
7/18/2012	11:28:49 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	11:28:49 AM	Tube furnace set to 0
7/18/2012	11:29:59 AM	Helium valve closed
7/18/2012	11:29:59 AM	H2 valve closed
7/18/2012	11:29:59 AM	BCl3 valve closed
7/18/2012	11:29:59 AM	PH3 valve closed
7/18/2012	11:29:59 AM	SiCl4 pre valve closed
7/18/2012	11:29:59 AM	SiCl4 post valve closed
7/18/2012	11:29:59 AM	Main Vac valve closed
7/18/2012	11:29:59 AM	Bubbler valve closed
7/18/2012	11:29:59 AM	Bypass valve opened
7/18/2012	11:29:59 AM	Helium MFC set to  0.000000
7/18/2012	11:29:59 AM	H2 MFC set to  0.000000
7/18/2012	11:29:59 AM	BCl3 MFC set to  0.000000
7/18/2012	11:29:59 AM	PH3 MFC set to  0.000000
7/18/2012	11:29:59 AM	SiCl4 MFC set to  0.000000
7/18/2012	11:29:59 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	11:29:59 AM	Tube furnace set to 0
7/18/2012	11:30:59 AM	Helium valve closed
7/18/2012	11:30:59 AM	H2 valve closed
7/18/2012	11:30:59 AM	BCl3 valve closed
7/18/2012	11:30:59 AM	PH3 valve closed
7/18/2012	11:30:59 AM	SiCl4 pre valve closed
7/18/2012	11:30:59 AM	SiCl4 post valve closed
7/18/2012	11:30:59 AM	Bypass valve closed
7/18/2012	11:30:59 AM	Bubbler valve closed
7/18/2012	11:30:59 AM	Main Vac valve opened
7/18/2012	11:30:59 AM	Helium MFC set to  0.000000
7/18/2012	11:30:59 AM	H2 MFC set to  0.000000
7/18/2012	11:30:59 AM	BCl3 MFC set to  0.000000
7/18/2012	11:30:59 AM	PH3 MFC set to  0.000000
7/18/2012	11:30:59 AM	SiCl4 MFC set to  0.000000
7/18/2012	11:30:59 AM	Bypass solenoid MFC set to  0.000000
7/18/2012	11:30:59 AM	Tube furnace set to 0
7/18/2012	11:31:00 AM	Run finished at 11:31 AM
7/18/2012	11:31:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/18/2012	12:03:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/18/2012	12:03:51 PM	Recipe started at 12:03 PM
7/18/2012	12:03:51 PM	Helium valve closed
7/18/2012	12:03:51 PM	H2 valve closed
7/18/2012	12:03:51 PM	BCl3 valve closed
7/18/2012	12:03:51 PM	PH3 valve closed
7/18/2012	12:03:51 PM	SiCl4 pre valve closed
7/18/2012	12:03:51 PM	SiCl4 post valve closed
7/18/2012	12:03:51 PM	Main Vac valve closed
7/18/2012	12:03:51 PM	Bubbler valve closed
7/18/2012	12:03:51 PM	Bypass valve opened
7/18/2012	12:03:51 PM	Helium MFC set to  0.000000
7/18/2012	12:03:51 PM	H2 MFC set to  0.000000
7/18/2012	12:03:51 PM	BCl3 MFC set to  0.000000
7/18/2012	12:03:51 PM	PH3 MFC set to  0.000000
7/18/2012	12:03:51 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:03:51 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:03:51 PM	Tube furnace set to 0
7/18/2012	12:03:52 PM	Helium valve closed
7/18/2012	12:03:52 PM	H2 valve closed
7/18/2012	12:03:52 PM	BCl3 valve closed
7/18/2012	12:03:52 PM	PH3 valve closed
7/18/2012	12:03:52 PM	SiCl4 pre valve closed
7/18/2012	12:03:52 PM	SiCl4 post valve closed
7/18/2012	12:03:52 PM	Main Vac valve closed
7/18/2012	12:03:52 PM	Bubbler valve closed
7/18/2012	12:03:52 PM	Bypass valve opened
7/18/2012	12:03:52 PM	Helium MFC set to  0.000000
7/18/2012	12:03:52 PM	H2 MFC set to  0.000000
7/18/2012	12:03:52 PM	BCl3 MFC set to  0.000000
7/18/2012	12:03:52 PM	PH3 MFC set to  0.000000
7/18/2012	12:03:52 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:03:52 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:03:52 PM	Tube furnace set to 0
7/18/2012	12:04:22 PM	Helium valve closed
7/18/2012	12:04:22 PM	H2 valve closed
7/18/2012	12:04:22 PM	BCl3 valve closed
7/18/2012	12:04:22 PM	PH3 valve closed
7/18/2012	12:04:22 PM	SiCl4 pre valve closed
7/18/2012	12:04:22 PM	SiCl4 post valve closed
7/18/2012	12:04:22 PM	Bypass valve closed
7/18/2012	12:04:22 PM	Bubbler valve closed
7/18/2012	12:04:22 PM	Main Vac valve opened
7/18/2012	12:04:22 PM	Helium MFC set to  0.000000
7/18/2012	12:04:22 PM	H2 MFC set to  0.000000
7/18/2012	12:04:22 PM	BCl3 MFC set to  0.000000
7/18/2012	12:04:22 PM	PH3 MFC set to  0.000000
7/18/2012	12:04:22 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:04:22 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:04:22 PM	Tube furnace set to 0
7/18/2012	12:04:52 PM	H2 valve closed
7/18/2012	12:04:52 PM	BCl3 valve closed
7/18/2012	12:04:52 PM	PH3 valve closed
7/18/2012	12:04:52 PM	SiCl4 pre valve closed
7/18/2012	12:04:52 PM	SiCl4 post valve closed
7/18/2012	12:04:52 PM	Bypass valve closed
7/18/2012	12:04:52 PM	Bubbler valve closed
7/18/2012	12:04:52 PM	Helium valve opened
7/18/2012	12:04:52 PM	Main Vac valve opened
7/18/2012	12:04:52 PM	Helium MFC set to  20.000000
7/18/2012	12:04:52 PM	H2 MFC set to  0.000000
7/18/2012	12:04:52 PM	BCl3 MFC set to  0.000000
7/18/2012	12:04:52 PM	PH3 MFC set to  0.000000
7/18/2012	12:04:52 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:04:52 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:04:52 PM	Tube furnace set to 0
7/18/2012	12:05:22 PM	Helium valve closed
7/18/2012	12:05:22 PM	H2 valve closed
7/18/2012	12:05:22 PM	BCl3 valve closed
7/18/2012	12:05:22 PM	PH3 valve closed
7/18/2012	12:05:22 PM	SiCl4 pre valve closed
7/18/2012	12:05:22 PM	SiCl4 post valve closed
7/18/2012	12:05:22 PM	Bypass valve closed
7/18/2012	12:05:22 PM	Bubbler valve closed
7/18/2012	12:05:22 PM	Main Vac valve opened
7/18/2012	12:05:22 PM	Helium MFC set to  0.000000
7/18/2012	12:05:23 PM	H2 MFC set to  0.000000
7/18/2012	12:05:23 PM	BCl3 MFC set to  0.000000
7/18/2012	12:05:23 PM	PH3 MFC set to  0.000000
7/18/2012	12:05:23 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:05:23 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:05:23 PM	Tube furnace set to 0
7/18/2012	12:05:53 PM	H2 valve closed
7/18/2012	12:05:53 PM	BCl3 valve closed
7/18/2012	12:05:53 PM	PH3 valve closed
7/18/2012	12:05:53 PM	SiCl4 pre valve closed
7/18/2012	12:05:53 PM	SiCl4 post valve closed
7/18/2012	12:05:53 PM	Bypass valve closed
7/18/2012	12:05:53 PM	Bubbler valve closed
7/18/2012	12:05:53 PM	Helium valve opened
7/18/2012	12:05:53 PM	Main Vac valve opened
7/18/2012	12:05:53 PM	Helium MFC set to  20.000000
7/18/2012	12:05:53 PM	H2 MFC set to  0.000000
7/18/2012	12:05:53 PM	BCl3 MFC set to  0.000000
7/18/2012	12:05:53 PM	PH3 MFC set to  0.000000
7/18/2012	12:05:53 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:05:53 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:05:53 PM	Tube furnace set to 0
7/18/2012	12:06:23 PM	Helium valve closed
7/18/2012	12:06:23 PM	H2 valve closed
7/18/2012	12:06:23 PM	BCl3 valve closed
7/18/2012	12:06:23 PM	PH3 valve closed
7/18/2012	12:06:23 PM	SiCl4 pre valve closed
7/18/2012	12:06:23 PM	SiCl4 post valve closed
7/18/2012	12:06:23 PM	Bypass valve closed
7/18/2012	12:06:23 PM	Bubbler valve closed
7/18/2012	12:06:23 PM	Main Vac valve opened
7/18/2012	12:06:23 PM	Helium MFC set to  0.000000
7/18/2012	12:06:23 PM	H2 MFC set to  0.000000
7/18/2012	12:06:23 PM	BCl3 MFC set to  0.000000
7/18/2012	12:06:23 PM	PH3 MFC set to  0.000000
7/18/2012	12:06:23 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:06:23 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:06:23 PM	Tube furnace set to 0
7/18/2012	12:06:53 PM	H2 valve closed
7/18/2012	12:06:53 PM	BCl3 valve closed
7/18/2012	12:06:53 PM	PH3 valve closed
7/18/2012	12:06:53 PM	SiCl4 pre valve closed
7/18/2012	12:06:53 PM	SiCl4 post valve closed
7/18/2012	12:06:53 PM	Bypass valve closed
7/18/2012	12:06:53 PM	Bubbler valve closed
7/18/2012	12:06:53 PM	Helium valve opened
7/18/2012	12:06:53 PM	Main Vac valve opened
7/18/2012	12:06:53 PM	Helium MFC set to  20.000000
7/18/2012	12:06:53 PM	H2 MFC set to  0.000000
7/18/2012	12:06:53 PM	BCl3 MFC set to  0.000000
7/18/2012	12:06:53 PM	PH3 MFC set to  0.000000
7/18/2012	12:06:53 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:06:53 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:06:53 PM	Tube furnace set to 0
7/18/2012	12:07:23 PM	Helium valve closed
7/18/2012	12:07:23 PM	H2 valve closed
7/18/2012	12:07:23 PM	BCl3 valve closed
7/18/2012	12:07:23 PM	PH3 valve closed
7/18/2012	12:07:23 PM	SiCl4 pre valve closed
7/18/2012	12:07:23 PM	SiCl4 post valve closed
7/18/2012	12:07:23 PM	Bypass valve closed
7/18/2012	12:07:23 PM	Bubbler valve closed
7/18/2012	12:07:23 PM	Main Vac valve opened
7/18/2012	12:07:23 PM	Helium MFC set to  0.000000
7/18/2012	12:07:23 PM	H2 MFC set to  0.000000
7/18/2012	12:07:23 PM	BCl3 MFC set to  0.000000
7/18/2012	12:07:23 PM	PH3 MFC set to  0.000000
7/18/2012	12:07:23 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:07:23 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:07:24 PM	Tube furnace set to 0
7/18/2012	12:07:54 PM	H2 valve closed
7/18/2012	12:07:54 PM	BCl3 valve closed
7/18/2012	12:07:54 PM	PH3 valve closed
7/18/2012	12:07:54 PM	SiCl4 pre valve closed
7/18/2012	12:07:54 PM	SiCl4 post valve closed
7/18/2012	12:07:54 PM	Bypass valve closed
7/18/2012	12:07:54 PM	Bubbler valve closed
7/18/2012	12:07:54 PM	Helium valve opened
7/18/2012	12:07:54 PM	Main Vac valve opened
7/18/2012	12:07:54 PM	Helium MFC set to  20.000000
7/18/2012	12:07:54 PM	H2 MFC set to  0.000000
7/18/2012	12:07:54 PM	BCl3 MFC set to  0.000000
7/18/2012	12:07:54 PM	PH3 MFC set to  0.000000
7/18/2012	12:07:54 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:07:54 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:07:54 PM	Tube furnace set to 0
7/18/2012	12:08:24 PM	Helium valve closed
7/18/2012	12:08:24 PM	H2 valve closed
7/18/2012	12:08:24 PM	BCl3 valve closed
7/18/2012	12:08:24 PM	PH3 valve closed
7/18/2012	12:08:24 PM	SiCl4 pre valve closed
7/18/2012	12:08:24 PM	SiCl4 post valve closed
7/18/2012	12:08:24 PM	Bypass valve closed
7/18/2012	12:08:24 PM	Bubbler valve closed
7/18/2012	12:08:24 PM	Main Vac valve opened
7/18/2012	12:08:24 PM	Helium MFC set to  0.000000
7/18/2012	12:08:24 PM	H2 MFC set to  0.000000
7/18/2012	12:08:24 PM	BCl3 MFC set to  0.000000
7/18/2012	12:08:24 PM	PH3 MFC set to  0.000000
7/18/2012	12:08:24 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:08:24 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:08:24 PM	Tube furnace set to 0
7/18/2012	12:08:54 PM	H2 valve closed
7/18/2012	12:08:54 PM	BCl3 valve closed
7/18/2012	12:08:54 PM	PH3 valve closed
7/18/2012	12:08:54 PM	SiCl4 pre valve closed
7/18/2012	12:08:54 PM	SiCl4 post valve closed
7/18/2012	12:08:54 PM	Bypass valve closed
7/18/2012	12:08:54 PM	Bubbler valve closed
7/18/2012	12:08:54 PM	Helium valve opened
7/18/2012	12:08:54 PM	Main Vac valve opened
7/18/2012	12:08:54 PM	Helium MFC set to  20.000000
7/18/2012	12:08:54 PM	H2 MFC set to  0.000000
7/18/2012	12:08:54 PM	BCl3 MFC set to  0.000000
7/18/2012	12:08:54 PM	PH3 MFC set to  0.000000
7/18/2012	12:08:54 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:08:54 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:08:54 PM	Tube furnace set to 0
7/18/2012	12:09:24 PM	Helium valve closed
7/18/2012	12:09:24 PM	H2 valve closed
7/18/2012	12:09:24 PM	BCl3 valve closed
7/18/2012	12:09:24 PM	PH3 valve closed
7/18/2012	12:09:24 PM	SiCl4 pre valve closed
7/18/2012	12:09:24 PM	SiCl4 post valve closed
7/18/2012	12:09:24 PM	Bypass valve closed
7/18/2012	12:09:24 PM	Bubbler valve closed
7/18/2012	12:09:24 PM	Main Vac valve opened
7/18/2012	12:09:24 PM	Helium MFC set to  0.000000
7/18/2012	12:09:24 PM	H2 MFC set to  0.000000
7/18/2012	12:09:24 PM	BCl3 MFC set to  0.000000
7/18/2012	12:09:24 PM	PH3 MFC set to  0.000000
7/18/2012	12:09:24 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:09:24 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:09:25 PM	Tube furnace set to 0
7/18/2012	12:09:55 PM	H2 valve closed
7/18/2012	12:09:55 PM	BCl3 valve closed
7/18/2012	12:09:55 PM	PH3 valve closed
7/18/2012	12:09:55 PM	SiCl4 pre valve closed
7/18/2012	12:09:55 PM	SiCl4 post valve closed
7/18/2012	12:09:55 PM	Bypass valve closed
7/18/2012	12:09:55 PM	Bubbler valve closed
7/18/2012	12:09:55 PM	Helium valve opened
7/18/2012	12:09:55 PM	Main Vac valve opened
7/18/2012	12:09:55 PM	Helium MFC set to  20.000000
7/18/2012	12:09:55 PM	H2 MFC set to  0.000000
7/18/2012	12:09:55 PM	BCl3 MFC set to  0.000000
7/18/2012	12:09:55 PM	PH3 MFC set to  0.000000
7/18/2012	12:09:55 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:09:55 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:09:55 PM	Tube furnace set to 0
7/18/2012	12:10:25 PM	Helium valve closed
7/18/2012	12:10:25 PM	H2 valve closed
7/18/2012	12:10:25 PM	BCl3 valve closed
7/18/2012	12:10:25 PM	PH3 valve closed
7/18/2012	12:10:25 PM	SiCl4 pre valve closed
7/18/2012	12:10:25 PM	SiCl4 post valve closed
7/18/2012	12:10:25 PM	Bypass valve closed
7/18/2012	12:10:25 PM	Bubbler valve closed
7/18/2012	12:10:25 PM	Main Vac valve opened
7/18/2012	12:10:25 PM	Helium MFC set to  0.000000
7/18/2012	12:10:25 PM	H2 MFC set to  0.000000
7/18/2012	12:10:25 PM	BCl3 MFC set to  0.000000
7/18/2012	12:10:25 PM	PH3 MFC set to  0.000000
7/18/2012	12:10:25 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:10:25 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:10:25 PM	Tube furnace set to 0
7/18/2012	12:10:55 PM	H2 valve closed
7/18/2012	12:10:55 PM	BCl3 valve closed
7/18/2012	12:10:55 PM	PH3 valve closed
7/18/2012	12:10:55 PM	SiCl4 pre valve closed
7/18/2012	12:10:55 PM	SiCl4 post valve closed
7/18/2012	12:10:55 PM	Bypass valve closed
7/18/2012	12:10:55 PM	Bubbler valve closed
7/18/2012	12:10:55 PM	Helium valve opened
7/18/2012	12:10:55 PM	Main Vac valve opened
7/18/2012	12:10:55 PM	Helium MFC set to  20.000000
7/18/2012	12:10:55 PM	H2 MFC set to  0.000000
7/18/2012	12:10:55 PM	BCl3 MFC set to  0.000000
7/18/2012	12:10:55 PM	PH3 MFC set to  0.000000
7/18/2012	12:10:55 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:10:55 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:10:55 PM	Tube furnace set to 0
7/18/2012	12:11:25 PM	Helium valve closed
7/18/2012	12:11:25 PM	H2 valve closed
7/18/2012	12:11:25 PM	BCl3 valve closed
7/18/2012	12:11:25 PM	PH3 valve closed
7/18/2012	12:11:25 PM	SiCl4 pre valve closed
7/18/2012	12:11:25 PM	SiCl4 post valve closed
7/18/2012	12:11:25 PM	Bypass valve closed
7/18/2012	12:11:25 PM	Bubbler valve closed
7/18/2012	12:11:25 PM	Main Vac valve opened
7/18/2012	12:11:25 PM	Helium MFC set to  0.000000
7/18/2012	12:11:25 PM	H2 MFC set to  0.000000
7/18/2012	12:11:25 PM	BCl3 MFC set to  0.000000
7/18/2012	12:11:25 PM	PH3 MFC set to  0.000000
7/18/2012	12:11:25 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:11:25 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:11:26 PM	Tube furnace set to 0
7/18/2012	12:11:56 PM	H2 valve closed
7/18/2012	12:11:56 PM	BCl3 valve closed
7/18/2012	12:11:56 PM	PH3 valve closed
7/18/2012	12:11:56 PM	SiCl4 pre valve closed
7/18/2012	12:11:56 PM	SiCl4 post valve closed
7/18/2012	12:11:56 PM	Bypass valve closed
7/18/2012	12:11:56 PM	Bubbler valve closed
7/18/2012	12:11:56 PM	Helium valve opened
7/18/2012	12:11:56 PM	Main Vac valve opened
7/18/2012	12:11:56 PM	Helium MFC set to  20.000000
7/18/2012	12:11:56 PM	H2 MFC set to  0.000000
7/18/2012	12:11:56 PM	BCl3 MFC set to  0.000000
7/18/2012	12:11:56 PM	PH3 MFC set to  0.000000
7/18/2012	12:11:56 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:11:56 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:11:56 PM	Tube furnace set to 0
7/18/2012	12:12:26 PM	Helium valve closed
7/18/2012	12:12:26 PM	H2 valve closed
7/18/2012	12:12:26 PM	BCl3 valve closed
7/18/2012	12:12:26 PM	PH3 valve closed
7/18/2012	12:12:26 PM	SiCl4 pre valve closed
7/18/2012	12:12:26 PM	SiCl4 post valve closed
7/18/2012	12:12:26 PM	Bypass valve closed
7/18/2012	12:12:26 PM	Bubbler valve closed
7/18/2012	12:12:26 PM	Main Vac valve opened
7/18/2012	12:12:26 PM	Helium MFC set to  0.000000
7/18/2012	12:12:26 PM	H2 MFC set to  0.000000
7/18/2012	12:12:26 PM	BCl3 MFC set to  0.000000
7/18/2012	12:12:26 PM	PH3 MFC set to  0.000000
7/18/2012	12:12:26 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:12:26 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:12:26 PM	Tube furnace set to 0
7/18/2012	12:12:56 PM	H2 valve closed
7/18/2012	12:12:56 PM	BCl3 valve closed
7/18/2012	12:12:56 PM	PH3 valve closed
7/18/2012	12:12:56 PM	SiCl4 pre valve closed
7/18/2012	12:12:56 PM	SiCl4 post valve closed
7/18/2012	12:12:56 PM	Bypass valve closed
7/18/2012	12:12:56 PM	Bubbler valve closed
7/18/2012	12:12:56 PM	Helium valve opened
7/18/2012	12:12:56 PM	Main Vac valve opened
7/18/2012	12:12:56 PM	Helium MFC set to  20.000000
7/18/2012	12:12:56 PM	H2 MFC set to  0.000000
7/18/2012	12:12:56 PM	BCl3 MFC set to  0.000000
7/18/2012	12:12:56 PM	PH3 MFC set to  0.000000
7/18/2012	12:12:56 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:12:56 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:12:56 PM	Tube furnace set to 0
7/18/2012	12:13:26 PM	Helium valve closed
7/18/2012	12:13:26 PM	H2 valve closed
7/18/2012	12:13:26 PM	BCl3 valve closed
7/18/2012	12:13:26 PM	PH3 valve closed
7/18/2012	12:13:26 PM	SiCl4 pre valve closed
7/18/2012	12:13:26 PM	SiCl4 post valve closed
7/18/2012	12:13:26 PM	Bypass valve closed
7/18/2012	12:13:26 PM	Bubbler valve closed
7/18/2012	12:13:26 PM	Main Vac valve opened
7/18/2012	12:13:26 PM	Helium MFC set to  0.000000
7/18/2012	12:13:26 PM	H2 MFC set to  0.000000
7/18/2012	12:13:26 PM	BCl3 MFC set to  0.000000
7/18/2012	12:13:26 PM	PH3 MFC set to  0.000000
7/18/2012	12:13:26 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:13:26 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:13:26 PM	Tube furnace set to 0
7/18/2012	12:13:56 PM	H2 valve closed
7/18/2012	12:13:56 PM	BCl3 valve closed
7/18/2012	12:13:56 PM	PH3 valve closed
7/18/2012	12:13:56 PM	SiCl4 pre valve closed
7/18/2012	12:13:56 PM	SiCl4 post valve closed
7/18/2012	12:13:56 PM	Bypass valve closed
7/18/2012	12:13:56 PM	Bubbler valve closed
7/18/2012	12:13:57 PM	Helium valve opened
7/18/2012	12:13:57 PM	Main Vac valve opened
7/18/2012	12:13:57 PM	Helium MFC set to  20.000000
7/18/2012	12:13:57 PM	H2 MFC set to  0.000000
7/18/2012	12:13:57 PM	BCl3 MFC set to  0.000000
7/18/2012	12:13:57 PM	PH3 MFC set to  0.000000
7/18/2012	12:13:57 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:13:57 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:13:57 PM	Tube furnace set to 0
7/18/2012	12:14:27 PM	Helium valve closed
7/18/2012	12:14:27 PM	H2 valve closed
7/18/2012	12:14:27 PM	BCl3 valve closed
7/18/2012	12:14:27 PM	PH3 valve closed
7/18/2012	12:14:27 PM	SiCl4 pre valve closed
7/18/2012	12:14:27 PM	SiCl4 post valve closed
7/18/2012	12:14:27 PM	Bypass valve closed
7/18/2012	12:14:27 PM	Bubbler valve closed
7/18/2012	12:14:27 PM	Main Vac valve opened
7/18/2012	12:14:27 PM	Helium MFC set to  0.000000
7/18/2012	12:14:27 PM	H2 MFC set to  0.000000
7/18/2012	12:14:27 PM	BCl3 MFC set to  0.000000
7/18/2012	12:14:27 PM	PH3 MFC set to  0.000000
7/18/2012	12:14:27 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:14:27 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:14:27 PM	Tube furnace set to 0
7/18/2012	12:14:28 PM	Run finished at 12:14 PM
7/18/2012	12:14:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/18/2012	12:22:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/18/2012	12:22:22 PM	Recipe started at 12:22 PM
7/18/2012	12:22:22 PM	Helium valve closed
7/18/2012	12:22:22 PM	H2 valve closed
7/18/2012	12:22:22 PM	BCl3 valve closed
7/18/2012	12:22:22 PM	PH3 valve closed
7/18/2012	12:22:22 PM	SiCl4 pre valve closed
7/18/2012	12:22:22 PM	SiCl4 post valve closed
7/18/2012	12:22:22 PM	Main Vac valve closed
7/18/2012	12:22:22 PM	Bubbler valve closed
7/18/2012	12:22:22 PM	Bypass valve opened
7/18/2012	12:22:22 PM	Helium MFC set to  0.000000
7/18/2012	12:22:22 PM	H2 MFC set to  0.000000
7/18/2012	12:22:22 PM	BCl3 MFC set to  0.000000
7/18/2012	12:22:22 PM	PH3 MFC set to  0.000000
7/18/2012	12:22:22 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:22:22 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:22:22 PM	Tube furnace set to 0
7/18/2012	12:22:22 PM	Helium valve closed
7/18/2012	12:22:22 PM	H2 valve closed
7/18/2012	12:22:22 PM	BCl3 valve closed
7/18/2012	12:22:22 PM	PH3 valve closed
7/18/2012	12:22:22 PM	SiCl4 pre valve closed
7/18/2012	12:22:22 PM	SiCl4 post valve closed
7/18/2012	12:22:23 PM	Main Vac valve closed
7/18/2012	12:22:23 PM	Bubbler valve closed
7/18/2012	12:22:23 PM	Bypass valve opened
7/18/2012	12:22:23 PM	Helium MFC set to  0.000000
7/18/2012	12:22:23 PM	H2 MFC set to  0.000000
7/18/2012	12:22:23 PM	BCl3 MFC set to  0.000000
7/18/2012	12:22:23 PM	PH3 MFC set to  0.000000
7/18/2012	12:22:23 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:22:23 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:22:23 PM	Tube furnace set to 0
7/18/2012	12:22:53 PM	Helium valve closed
7/18/2012	12:22:53 PM	H2 valve closed
7/18/2012	12:22:53 PM	BCl3 valve closed
7/18/2012	12:22:53 PM	PH3 valve closed
7/18/2012	12:22:53 PM	SiCl4 pre valve closed
7/18/2012	12:22:53 PM	SiCl4 post valve closed
7/18/2012	12:22:53 PM	Bypass valve closed
7/18/2012	12:22:53 PM	Bubbler valve closed
7/18/2012	12:22:53 PM	Main Vac valve opened
7/18/2012	12:22:53 PM	Helium MFC set to  0.000000
7/18/2012	12:22:53 PM	H2 MFC set to  0.000000
7/18/2012	12:22:53 PM	BCl3 MFC set to  0.000000
7/18/2012	12:22:53 PM	PH3 MFC set to  0.000000
7/18/2012	12:22:53 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:22:53 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:22:53 PM	Tube furnace set to 0
7/18/2012	12:23:23 PM	H2 valve closed
7/18/2012	12:23:23 PM	BCl3 valve closed
7/18/2012	12:23:23 PM	PH3 valve closed
7/18/2012	12:23:23 PM	SiCl4 pre valve closed
7/18/2012	12:23:23 PM	SiCl4 post valve closed
7/18/2012	12:23:23 PM	Bypass valve closed
7/18/2012	12:23:23 PM	Bubbler valve closed
7/18/2012	12:23:23 PM	Helium valve opened
7/18/2012	12:23:23 PM	Main Vac valve opened
7/18/2012	12:23:23 PM	Helium MFC set to  20.000000
7/18/2012	12:23:23 PM	H2 MFC set to  0.000000
7/18/2012	12:23:23 PM	BCl3 MFC set to  0.000000
7/18/2012	12:23:23 PM	PH3 MFC set to  0.000000
7/18/2012	12:23:23 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:23:23 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:23:23 PM	Tube furnace set to 0
7/18/2012	12:23:53 PM	Helium valve closed
7/18/2012	12:23:53 PM	H2 valve closed
7/18/2012	12:23:53 PM	BCl3 valve closed
7/18/2012	12:23:53 PM	PH3 valve closed
7/18/2012	12:23:53 PM	SiCl4 pre valve closed
7/18/2012	12:23:53 PM	SiCl4 post valve closed
7/18/2012	12:23:53 PM	Bypass valve closed
7/18/2012	12:23:53 PM	Bubbler valve closed
7/18/2012	12:23:53 PM	Main Vac valve opened
7/18/2012	12:23:53 PM	Helium MFC set to  0.000000
7/18/2012	12:23:53 PM	H2 MFC set to  0.000000
7/18/2012	12:23:53 PM	BCl3 MFC set to  0.000000
7/18/2012	12:23:53 PM	PH3 MFC set to  0.000000
7/18/2012	12:23:53 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:23:53 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:23:53 PM	Tube furnace set to 0
7/18/2012	12:24:23 PM	H2 valve closed
7/18/2012	12:24:23 PM	BCl3 valve closed
7/18/2012	12:24:23 PM	PH3 valve closed
7/18/2012	12:24:23 PM	SiCl4 pre valve closed
7/18/2012	12:24:23 PM	SiCl4 post valve closed
7/18/2012	12:24:23 PM	Bypass valve closed
7/18/2012	12:24:23 PM	Bubbler valve closed
7/18/2012	12:24:23 PM	Helium valve opened
7/18/2012	12:24:23 PM	Main Vac valve opened
7/18/2012	12:24:23 PM	Helium MFC set to  20.000000
7/18/2012	12:24:23 PM	H2 MFC set to  0.000000
7/18/2012	12:24:23 PM	BCl3 MFC set to  0.000000
7/18/2012	12:24:23 PM	PH3 MFC set to  0.000000
7/18/2012	12:24:23 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:24:23 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:24:24 PM	Tube furnace set to 0
7/18/2012	12:24:54 PM	Helium valve closed
7/18/2012	12:24:54 PM	H2 valve closed
7/18/2012	12:24:54 PM	BCl3 valve closed
7/18/2012	12:24:54 PM	PH3 valve closed
7/18/2012	12:24:54 PM	SiCl4 pre valve closed
7/18/2012	12:24:54 PM	SiCl4 post valve closed
7/18/2012	12:24:54 PM	Bypass valve closed
7/18/2012	12:24:54 PM	Bubbler valve closed
7/18/2012	12:24:54 PM	Main Vac valve opened
7/18/2012	12:24:54 PM	Helium MFC set to  0.000000
7/18/2012	12:24:54 PM	H2 MFC set to  0.000000
7/18/2012	12:24:54 PM	BCl3 MFC set to  0.000000
7/18/2012	12:24:54 PM	PH3 MFC set to  0.000000
7/18/2012	12:24:54 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:24:54 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:24:54 PM	Tube furnace set to 0
7/18/2012	12:25:24 PM	H2 valve closed
7/18/2012	12:25:24 PM	BCl3 valve closed
7/18/2012	12:25:24 PM	PH3 valve closed
7/18/2012	12:25:24 PM	SiCl4 pre valve closed
7/18/2012	12:25:24 PM	SiCl4 post valve closed
7/18/2012	12:25:24 PM	Bypass valve closed
7/18/2012	12:25:24 PM	Bubbler valve closed
7/18/2012	12:25:24 PM	Helium valve opened
7/18/2012	12:25:24 PM	Main Vac valve opened
7/18/2012	12:25:24 PM	Helium MFC set to  20.000000
7/18/2012	12:25:24 PM	H2 MFC set to  0.000000
7/18/2012	12:25:24 PM	BCl3 MFC set to  0.000000
7/18/2012	12:25:24 PM	PH3 MFC set to  0.000000
7/18/2012	12:25:24 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:25:24 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:25:24 PM	Tube furnace set to 0
7/18/2012	12:25:54 PM	Helium valve closed
7/18/2012	12:25:54 PM	H2 valve closed
7/18/2012	12:25:54 PM	BCl3 valve closed
7/18/2012	12:25:54 PM	PH3 valve closed
7/18/2012	12:25:54 PM	SiCl4 pre valve closed
7/18/2012	12:25:54 PM	SiCl4 post valve closed
7/18/2012	12:25:54 PM	Bypass valve closed
7/18/2012	12:25:54 PM	Bubbler valve closed
7/18/2012	12:25:54 PM	Main Vac valve opened
7/18/2012	12:25:54 PM	Helium MFC set to  0.000000
7/18/2012	12:25:54 PM	H2 MFC set to  0.000000
7/18/2012	12:25:54 PM	BCl3 MFC set to  0.000000
7/18/2012	12:25:54 PM	PH3 MFC set to  0.000000
7/18/2012	12:25:54 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:25:54 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:25:54 PM	Tube furnace set to 0
7/18/2012	12:26:24 PM	H2 valve closed
7/18/2012	12:26:24 PM	BCl3 valve closed
7/18/2012	12:26:24 PM	PH3 valve closed
7/18/2012	12:26:24 PM	SiCl4 pre valve closed
7/18/2012	12:26:24 PM	SiCl4 post valve closed
7/18/2012	12:26:24 PM	Bypass valve closed
7/18/2012	12:26:24 PM	Bubbler valve closed
7/18/2012	12:26:24 PM	Helium valve opened
7/18/2012	12:26:24 PM	Main Vac valve opened
7/18/2012	12:26:24 PM	Helium MFC set to  20.000000
7/18/2012	12:26:24 PM	H2 MFC set to  0.000000
7/18/2012	12:26:24 PM	BCl3 MFC set to  0.000000
7/18/2012	12:26:24 PM	PH3 MFC set to  0.000000
7/18/2012	12:26:24 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:26:24 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:26:25 PM	Tube furnace set to 0
7/18/2012	12:26:55 PM	Helium valve closed
7/18/2012	12:26:55 PM	H2 valve closed
7/18/2012	12:26:55 PM	BCl3 valve closed
7/18/2012	12:26:55 PM	PH3 valve closed
7/18/2012	12:26:55 PM	SiCl4 pre valve closed
7/18/2012	12:26:55 PM	SiCl4 post valve closed
7/18/2012	12:26:55 PM	Bypass valve closed
7/18/2012	12:26:55 PM	Bubbler valve closed
7/18/2012	12:26:55 PM	Main Vac valve opened
7/18/2012	12:26:55 PM	Helium MFC set to  0.000000
7/18/2012	12:26:55 PM	H2 MFC set to  0.000000
7/18/2012	12:26:55 PM	BCl3 MFC set to  0.000000
7/18/2012	12:26:55 PM	PH3 MFC set to  0.000000
7/18/2012	12:26:55 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:26:55 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:26:55 PM	Tube furnace set to 0
7/18/2012	12:27:25 PM	H2 valve closed
7/18/2012	12:27:25 PM	BCl3 valve closed
7/18/2012	12:27:25 PM	PH3 valve closed
7/18/2012	12:27:25 PM	SiCl4 pre valve closed
7/18/2012	12:27:25 PM	SiCl4 post valve closed
7/18/2012	12:27:25 PM	Bypass valve closed
7/18/2012	12:27:25 PM	Bubbler valve closed
7/18/2012	12:27:25 PM	Helium valve opened
7/18/2012	12:27:25 PM	Main Vac valve opened
7/18/2012	12:27:25 PM	Helium MFC set to  20.000000
7/18/2012	12:27:25 PM	H2 MFC set to  0.000000
7/18/2012	12:27:25 PM	BCl3 MFC set to  0.000000
7/18/2012	12:27:25 PM	PH3 MFC set to  0.000000
7/18/2012	12:27:25 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:27:25 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:27:25 PM	Tube furnace set to 0
7/18/2012	12:27:55 PM	Helium valve closed
7/18/2012	12:27:55 PM	H2 valve closed
7/18/2012	12:27:55 PM	BCl3 valve closed
7/18/2012	12:27:55 PM	PH3 valve closed
7/18/2012	12:27:55 PM	SiCl4 pre valve closed
7/18/2012	12:27:55 PM	SiCl4 post valve closed
7/18/2012	12:27:55 PM	Bypass valve closed
7/18/2012	12:27:55 PM	Bubbler valve closed
7/18/2012	12:27:55 PM	Main Vac valve opened
7/18/2012	12:27:55 PM	Helium MFC set to  0.000000
7/18/2012	12:27:55 PM	H2 MFC set to  0.000000
7/18/2012	12:27:55 PM	BCl3 MFC set to  0.000000
7/18/2012	12:27:55 PM	PH3 MFC set to  0.000000
7/18/2012	12:27:55 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:27:55 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:27:55 PM	Tube furnace set to 0
7/18/2012	12:28:25 PM	H2 valve closed
7/18/2012	12:28:25 PM	BCl3 valve closed
7/18/2012	12:28:25 PM	PH3 valve closed
7/18/2012	12:28:25 PM	SiCl4 pre valve closed
7/18/2012	12:28:25 PM	SiCl4 post valve closed
7/18/2012	12:28:25 PM	Bypass valve closed
7/18/2012	12:28:25 PM	Bubbler valve closed
7/18/2012	12:28:25 PM	Helium valve opened
7/18/2012	12:28:25 PM	Main Vac valve opened
7/18/2012	12:28:25 PM	Helium MFC set to  20.000000
7/18/2012	12:28:25 PM	H2 MFC set to  0.000000
7/18/2012	12:28:25 PM	BCl3 MFC set to  0.000000
7/18/2012	12:28:25 PM	PH3 MFC set to  0.000000
7/18/2012	12:28:25 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:28:25 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:28:26 PM	Tube furnace set to 0
7/18/2012	12:28:56 PM	Helium valve closed
7/18/2012	12:28:56 PM	H2 valve closed
7/18/2012	12:28:56 PM	BCl3 valve closed
7/18/2012	12:28:56 PM	PH3 valve closed
7/18/2012	12:28:56 PM	SiCl4 pre valve closed
7/18/2012	12:28:56 PM	SiCl4 post valve closed
7/18/2012	12:28:56 PM	Bypass valve closed
7/18/2012	12:28:56 PM	Bubbler valve closed
7/18/2012	12:28:56 PM	Main Vac valve opened
7/18/2012	12:28:56 PM	Helium MFC set to  0.000000
7/18/2012	12:28:56 PM	H2 MFC set to  0.000000
7/18/2012	12:28:56 PM	BCl3 MFC set to  0.000000
7/18/2012	12:28:56 PM	PH3 MFC set to  0.000000
7/18/2012	12:28:56 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:28:56 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:28:56 PM	Tube furnace set to 0
7/18/2012	12:29:26 PM	H2 valve closed
7/18/2012	12:29:26 PM	BCl3 valve closed
7/18/2012	12:29:26 PM	PH3 valve closed
7/18/2012	12:29:26 PM	SiCl4 pre valve closed
7/18/2012	12:29:26 PM	SiCl4 post valve closed
7/18/2012	12:29:26 PM	Bypass valve closed
7/18/2012	12:29:26 PM	Bubbler valve closed
7/18/2012	12:29:26 PM	Helium valve opened
7/18/2012	12:29:26 PM	Main Vac valve opened
7/18/2012	12:29:26 PM	Helium MFC set to  20.000000
7/18/2012	12:29:26 PM	H2 MFC set to  0.000000
7/18/2012	12:29:26 PM	BCl3 MFC set to  0.000000
7/18/2012	12:29:26 PM	PH3 MFC set to  0.000000
7/18/2012	12:29:26 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:29:26 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:29:26 PM	Tube furnace set to 0
7/18/2012	12:29:56 PM	Helium valve closed
7/18/2012	12:29:56 PM	H2 valve closed
7/18/2012	12:29:56 PM	BCl3 valve closed
7/18/2012	12:29:56 PM	PH3 valve closed
7/18/2012	12:29:56 PM	SiCl4 pre valve closed
7/18/2012	12:29:56 PM	SiCl4 post valve closed
7/18/2012	12:29:56 PM	Bypass valve closed
7/18/2012	12:29:56 PM	Bubbler valve closed
7/18/2012	12:29:56 PM	Main Vac valve opened
7/18/2012	12:29:56 PM	Helium MFC set to  0.000000
7/18/2012	12:29:56 PM	H2 MFC set to  0.000000
7/18/2012	12:29:56 PM	BCl3 MFC set to  0.000000
7/18/2012	12:29:56 PM	PH3 MFC set to  0.000000
7/18/2012	12:29:56 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:29:56 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:29:56 PM	Tube furnace set to 0
7/18/2012	12:30:26 PM	H2 valve closed
7/18/2012	12:30:26 PM	BCl3 valve closed
7/18/2012	12:30:26 PM	PH3 valve closed
7/18/2012	12:30:26 PM	SiCl4 pre valve closed
7/18/2012	12:30:26 PM	SiCl4 post valve closed
7/18/2012	12:30:26 PM	Bypass valve closed
7/18/2012	12:30:26 PM	Bubbler valve closed
7/18/2012	12:30:26 PM	Helium valve opened
7/18/2012	12:30:26 PM	Main Vac valve opened
7/18/2012	12:30:26 PM	Helium MFC set to  20.000000
7/18/2012	12:30:26 PM	H2 MFC set to  0.000000
7/18/2012	12:30:26 PM	BCl3 MFC set to  0.000000
7/18/2012	12:30:26 PM	PH3 MFC set to  0.000000
7/18/2012	12:30:26 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:30:26 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:30:26 PM	Tube furnace set to 0
7/18/2012	12:30:56 PM	Helium valve closed
7/18/2012	12:30:56 PM	H2 valve closed
7/18/2012	12:30:56 PM	BCl3 valve closed
7/18/2012	12:30:57 PM	PH3 valve closed
7/18/2012	12:30:57 PM	SiCl4 pre valve closed
7/18/2012	12:30:57 PM	SiCl4 post valve closed
7/18/2012	12:30:57 PM	Bypass valve closed
7/18/2012	12:30:57 PM	Bubbler valve closed
7/18/2012	12:30:57 PM	Main Vac valve opened
7/18/2012	12:30:57 PM	Helium MFC set to  0.000000
7/18/2012	12:30:57 PM	H2 MFC set to  0.000000
7/18/2012	12:30:57 PM	BCl3 MFC set to  0.000000
7/18/2012	12:30:57 PM	PH3 MFC set to  0.000000
7/18/2012	12:30:57 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:30:57 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:30:57 PM	Tube furnace set to 0
7/18/2012	12:31:27 PM	H2 valve closed
7/18/2012	12:31:27 PM	BCl3 valve closed
7/18/2012	12:31:27 PM	PH3 valve closed
7/18/2012	12:31:27 PM	SiCl4 pre valve closed
7/18/2012	12:31:27 PM	SiCl4 post valve closed
7/18/2012	12:31:27 PM	Bypass valve closed
7/18/2012	12:31:27 PM	Bubbler valve closed
7/18/2012	12:31:27 PM	Helium valve opened
7/18/2012	12:31:27 PM	Main Vac valve opened
7/18/2012	12:31:27 PM	Helium MFC set to  20.000000
7/18/2012	12:31:27 PM	H2 MFC set to  0.000000
7/18/2012	12:31:27 PM	BCl3 MFC set to  0.000000
7/18/2012	12:31:27 PM	PH3 MFC set to  0.000000
7/18/2012	12:31:27 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:31:27 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:31:27 PM	Tube furnace set to 0
7/18/2012	12:31:57 PM	Helium valve closed
7/18/2012	12:31:57 PM	H2 valve closed
7/18/2012	12:31:57 PM	BCl3 valve closed
7/18/2012	12:31:57 PM	PH3 valve closed
7/18/2012	12:31:57 PM	SiCl4 pre valve closed
7/18/2012	12:31:57 PM	SiCl4 post valve closed
7/18/2012	12:31:57 PM	Bypass valve closed
7/18/2012	12:31:57 PM	Bubbler valve closed
7/18/2012	12:31:57 PM	Main Vac valve opened
7/18/2012	12:31:57 PM	Helium MFC set to  0.000000
7/18/2012	12:31:57 PM	H2 MFC set to  0.000000
7/18/2012	12:31:57 PM	BCl3 MFC set to  0.000000
7/18/2012	12:31:57 PM	PH3 MFC set to  0.000000
7/18/2012	12:31:57 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:31:57 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:31:57 PM	Tube furnace set to 0
7/18/2012	12:32:27 PM	H2 valve closed
7/18/2012	12:32:27 PM	BCl3 valve closed
7/18/2012	12:32:27 PM	PH3 valve closed
7/18/2012	12:32:27 PM	SiCl4 pre valve closed
7/18/2012	12:32:27 PM	SiCl4 post valve closed
7/18/2012	12:32:27 PM	Bypass valve closed
7/18/2012	12:32:27 PM	Bubbler valve closed
7/18/2012	12:32:27 PM	Helium valve opened
7/18/2012	12:32:27 PM	Main Vac valve opened
7/18/2012	12:32:27 PM	Helium MFC set to  20.000000
7/18/2012	12:32:27 PM	H2 MFC set to  0.000000
7/18/2012	12:32:27 PM	BCl3 MFC set to  0.000000
7/18/2012	12:32:27 PM	PH3 MFC set to  0.000000
7/18/2012	12:32:27 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:32:27 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:32:27 PM	Tube furnace set to 0
7/18/2012	12:32:57 PM	Helium valve closed
7/18/2012	12:32:57 PM	H2 valve closed
7/18/2012	12:32:57 PM	BCl3 valve closed
7/18/2012	12:32:57 PM	PH3 valve closed
7/18/2012	12:32:57 PM	SiCl4 pre valve closed
7/18/2012	12:32:57 PM	SiCl4 post valve closed
7/18/2012	12:32:57 PM	Bypass valve closed
7/18/2012	12:32:57 PM	Bubbler valve closed
7/18/2012	12:32:57 PM	Main Vac valve opened
7/18/2012	12:32:57 PM	Helium MFC set to  0.000000
7/18/2012	12:32:57 PM	H2 MFC set to  0.000000
7/18/2012	12:32:57 PM	BCl3 MFC set to  0.000000
7/18/2012	12:32:57 PM	PH3 MFC set to  0.000000
7/18/2012	12:32:57 PM	SiCl4 MFC set to  0.000000
7/18/2012	12:32:57 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	12:32:58 PM	Tube furnace set to 0
7/18/2012	12:32:59 PM	Run finished at 12:32 PM
7/18/2012	12:32:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/18/2012	1:41:15 PM	Main Vac valve closed
7/18/2012	1:41:28 PM	Main Vac valve opened
7/18/2012	1:42:51 PM	Recipe started at 1:42 PM
7/18/2012	1:42:51 PM	Helium valve closed
7/18/2012	1:42:51 PM	H2 valve closed
7/18/2012	1:42:51 PM	BCl3 valve closed
7/18/2012	1:42:51 PM	PH3 valve closed
7/18/2012	1:42:51 PM	SiCl4 pre valve closed
7/18/2012	1:42:51 PM	SiCl4 post valve closed
7/18/2012	1:42:51 PM	Main Vac valve closed
7/18/2012	1:42:51 PM	Bypass valve closed
7/18/2012	1:42:51 PM	Bubbler valve closed
7/18/2012	1:42:51 PM	Helium MFC set to  0.000000
7/18/2012	1:42:51 PM	H2 MFC set to  0.000000
7/18/2012	1:42:51 PM	BCl3 MFC set to  0.000000
7/18/2012	1:42:51 PM	PH3 MFC set to  0.000000
7/18/2012	1:42:51 PM	SiCl4 MFC set to  0.000000
7/18/2012	1:42:51 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	1:42:52 PM	Tube furnace set to 0
7/18/2012	1:42:55 PM	Helium valve closed
7/18/2012	1:42:55 PM	BCl3 valve closed
7/18/2012	1:42:55 PM	PH3 valve closed
7/18/2012	1:42:55 PM	SiCl4 pre valve closed
7/18/2012	1:42:55 PM	SiCl4 post valve closed
7/18/2012	1:42:55 PM	Main Vac valve closed
7/18/2012	1:42:55 PM	Bypass valve closed
7/18/2012	1:42:55 PM	Bubbler valve closed
7/18/2012	1:42:55 PM	H2 valve opened
7/18/2012	1:42:55 PM	Helium MFC set to  0.000000
7/18/2012	1:42:55 PM	H2 MFC set to  500.000000
7/18/2012	1:42:55 PM	BCl3 MFC set to  0.000000
7/18/2012	1:42:55 PM	PH3 MFC set to  0.000000
7/18/2012	1:42:55 PM	SiCl4 MFC set to  0.000000
7/18/2012	1:42:55 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	1:42:55 PM	Tube furnace set to 50
7/18/2012	1:44:09 PM	Helium valve closed
7/18/2012	1:44:09 PM	BCl3 valve closed
7/18/2012	1:44:09 PM	PH3 valve closed
7/18/2012	1:44:09 PM	SiCl4 pre valve closed
7/18/2012	1:44:09 PM	SiCl4 post valve closed
7/18/2012	1:44:09 PM	Main Vac valve closed
7/18/2012	1:44:09 PM	Bypass valve closed
7/18/2012	1:44:09 PM	H2 valve opened
7/18/2012	1:44:09 PM	Bubbler valve opened
7/18/2012	1:44:09 PM	Helium MFC set to  0.000000
7/18/2012	1:44:09 PM	H2 MFC set to  500.000000
7/18/2012	1:44:09 PM	BCl3 MFC set to  0.000000
7/18/2012	1:44:09 PM	PH3 MFC set to  0.000000
7/18/2012	1:44:09 PM	SiCl4 MFC set to  0.000000
7/18/2012	1:44:09 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	1:44:09 PM	Tube furnace set to 50
7/18/2012	1:44:10 PM	Helium valve closed
7/18/2012	1:44:10 PM	BCl3 valve closed
7/18/2012	1:44:10 PM	PH3 valve closed
7/18/2012	1:44:10 PM	SiCl4 pre valve closed
7/18/2012	1:44:10 PM	SiCl4 post valve closed
7/18/2012	1:44:10 PM	Main Vac valve closed
7/18/2012	1:44:10 PM	Bypass valve closed
7/18/2012	1:44:10 PM	H2 valve opened
7/18/2012	1:44:10 PM	Bubbler valve opened
7/18/2012	1:44:10 PM	Helium MFC set to  0.000000
7/18/2012	1:44:10 PM	H2 MFC set to  500.000000
7/18/2012	1:44:10 PM	BCl3 MFC set to  0.000000
7/18/2012	1:44:10 PM	PH3 MFC set to  0.000000
7/18/2012	1:44:10 PM	SiCl4 MFC set to  0.000000
7/18/2012	1:44:10 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	1:44:10 PM	Tube furnace set to 1000
7/18/2012	2:04:10 PM	Helium valve closed
7/18/2012	2:04:10 PM	BCl3 valve closed
7/18/2012	2:04:10 PM	PH3 valve closed
7/18/2012	2:04:10 PM	Main Vac valve closed
7/18/2012	2:04:10 PM	Bypass valve closed
7/18/2012	2:04:10 PM	H2 valve opened
7/18/2012	2:04:10 PM	SiCl4 pre valve opened
7/18/2012	2:04:10 PM	SiCl4 post valve opened
7/18/2012	2:04:10 PM	Bubbler valve opened
7/18/2012	2:04:10 PM	Helium MFC set to  0.000000
7/18/2012	2:04:10 PM	H2 MFC set to  500.000000
7/18/2012	2:04:10 PM	BCl3 MFC set to  0.000000
7/18/2012	2:04:10 PM	PH3 MFC set to  0.000000
7/18/2012	2:04:10 PM	SiCl4 MFC set to  50.000000
7/18/2012	2:04:10 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	2:04:11 PM	Tube furnace set to 1000
7/18/2012	2:34:11 PM	Helium valve closed
7/18/2012	2:34:11 PM	BCl3 valve closed
7/18/2012	2:34:11 PM	PH3 valve closed
7/18/2012	2:34:11 PM	SiCl4 pre valve closed
7/18/2012	2:34:11 PM	SiCl4 post valve closed
7/18/2012	2:34:11 PM	Main Vac valve closed
7/18/2012	2:34:11 PM	Bypass valve closed
7/18/2012	2:34:11 PM	H2 valve opened
7/18/2012	2:34:11 PM	Bubbler valve opened
7/18/2012	2:34:11 PM	Helium MFC set to  0.000000
7/18/2012	2:34:11 PM	H2 MFC set to  500.000000
7/18/2012	2:34:11 PM	BCl3 MFC set to  0.000000
7/18/2012	2:34:11 PM	PH3 MFC set to  0.000000
7/18/2012	2:34:11 PM	SiCl4 MFC set to  0.000000
7/18/2012	2:34:11 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	2:34:11 PM	Tube furnace set to 750
7/18/2012	2:44:11 PM	H2 valve closed
7/18/2012	2:44:11 PM	BCl3 valve closed
7/18/2012	2:44:11 PM	PH3 valve closed
7/18/2012	2:44:11 PM	SiCl4 pre valve closed
7/18/2012	2:44:11 PM	SiCl4 post valve closed
7/18/2012	2:44:11 PM	Main Vac valve closed
7/18/2012	2:44:11 PM	Bypass valve closed
7/18/2012	2:44:11 PM	Helium valve opened
7/18/2012	2:44:11 PM	Bubbler valve opened
7/18/2012	2:44:11 PM	Helium MFC set to  400.000000
7/18/2012	2:44:11 PM	H2 MFC set to  0.000000
7/18/2012	2:44:11 PM	BCl3 MFC set to  0.000000
7/18/2012	2:44:11 PM	PH3 MFC set to  0.000000
7/18/2012	2:44:11 PM	SiCl4 MFC set to  0.000000
7/18/2012	2:44:11 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	2:44:11 PM	Tube furnace set to 0
7/18/2012	3:09:11 PM	Helium valve closed
7/18/2012	3:09:11 PM	H2 valve closed
7/18/2012	3:09:11 PM	BCl3 valve closed
7/18/2012	3:09:11 PM	PH3 valve closed
7/18/2012	3:09:11 PM	SiCl4 pre valve closed
7/18/2012	3:09:11 PM	SiCl4 post valve closed
7/18/2012	3:09:11 PM	Main Vac valve closed
7/18/2012	3:09:11 PM	Bypass valve closed
7/18/2012	3:09:11 PM	Bubbler valve closed
7/18/2012	3:09:11 PM	Helium MFC set to  0.000000
7/18/2012	3:09:11 PM	H2 MFC set to  0.000000
7/18/2012	3:09:11 PM	BCl3 MFC set to  0.000000
7/18/2012	3:09:11 PM	PH3 MFC set to  0.000000
7/18/2012	3:09:11 PM	SiCl4 MFC set to  0.000000
7/18/2012	3:09:11 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	3:09:11 PM	Tube furnace set to 50
7/18/2012	3:14:11 PM	Helium valve closed
7/18/2012	3:14:11 PM	H2 valve closed
7/18/2012	3:14:11 PM	BCl3 valve closed
7/18/2012	3:14:11 PM	PH3 valve closed
7/18/2012	3:14:11 PM	SiCl4 pre valve closed
7/18/2012	3:14:11 PM	SiCl4 post valve closed
7/18/2012	3:14:11 PM	Main Vac valve closed
7/18/2012	3:14:11 PM	Bubbler valve closed
7/18/2012	3:14:11 PM	Bypass valve opened
7/18/2012	3:14:11 PM	Helium MFC set to  0.000000
7/18/2012	3:14:11 PM	H2 MFC set to  0.000000
7/18/2012	3:14:11 PM	BCl3 MFC set to  0.000000
7/18/2012	3:14:11 PM	PH3 MFC set to  0.000000
7/18/2012	3:14:11 PM	SiCl4 MFC set to  0.000000
7/18/2012	3:14:11 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	3:14:11 PM	Tube furnace set to 0
7/18/2012	3:19:12 PM	Helium valve closed
7/18/2012	3:19:12 PM	H2 valve closed
7/18/2012	3:19:12 PM	BCl3 valve closed
7/18/2012	3:19:12 PM	PH3 valve closed
7/18/2012	3:19:12 PM	SiCl4 pre valve closed
7/18/2012	3:19:12 PM	SiCl4 post valve closed
7/18/2012	3:19:12 PM	Bypass valve closed
7/18/2012	3:19:12 PM	Bubbler valve closed
7/18/2012	3:19:12 PM	Main Vac valve opened
7/18/2012	3:19:12 PM	Helium MFC set to  0.000000
7/18/2012	3:19:12 PM	H2 MFC set to  0.000000
7/18/2012	3:19:12 PM	BCl3 MFC set to  0.000000
7/18/2012	3:19:12 PM	PH3 MFC set to  0.000000
7/18/2012	3:19:12 PM	SiCl4 MFC set to  0.000000
7/18/2012	3:19:12 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	3:19:12 PM	Tube furnace set to 0
7/18/2012	3:19:13 PM	Run finished at 3:19 PM
7/18/2012	3:21:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/18/2012	3:21:06 PM	Recipe started at 3:21 PM
7/18/2012	3:21:06 PM	Helium valve closed
7/18/2012	3:21:06 PM	H2 valve closed
7/18/2012	3:21:06 PM	BCl3 valve closed
7/18/2012	3:21:06 PM	PH3 valve closed
7/18/2012	3:21:06 PM	SiCl4 pre valve closed
7/18/2012	3:21:06 PM	SiCl4 post valve closed
7/18/2012	3:21:06 PM	Main Vac valve closed
7/18/2012	3:21:06 PM	Bypass valve closed
7/18/2012	3:21:06 PM	Bubbler valve closed
7/18/2012	3:21:06 PM	Helium MFC set to  0.000000
7/18/2012	3:21:06 PM	H2 MFC set to  0.000000
7/18/2012	3:21:06 PM	BCl3 MFC set to  0.000000
7/18/2012	3:21:06 PM	PH3 MFC set to  0.000000
7/18/2012	3:21:06 PM	SiCl4 MFC set to  0.000000
7/18/2012	3:21:06 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	3:21:07 PM	Tube furnace set to 0
7/18/2012	3:21:10 PM	H2 valve closed
7/18/2012	3:21:10 PM	BCl3 valve closed
7/18/2012	3:21:10 PM	PH3 valve closed
7/18/2012	3:21:10 PM	SiCl4 pre valve closed
7/18/2012	3:21:10 PM	SiCl4 post valve closed
7/18/2012	3:21:10 PM	Main Vac valve closed
7/18/2012	3:21:10 PM	Bypass valve closed
7/18/2012	3:21:10 PM	Bubbler valve closed
7/18/2012	3:21:10 PM	Helium valve opened
7/18/2012	3:21:10 PM	Helium MFC set to  500.000000
7/18/2012	3:21:10 PM	H2 MFC set to  0.000000
7/18/2012	3:21:10 PM	BCl3 MFC set to  0.000000
7/18/2012	3:21:10 PM	PH3 MFC set to  0.000000
7/18/2012	3:21:10 PM	SiCl4 MFC set to  0.000000
7/18/2012	3:21:10 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	3:21:10 PM	Tube furnace set to 0
7/18/2012	3:22:22 PM	Helium valve closed
7/18/2012	3:22:22 PM	H2 valve closed
7/18/2012	3:22:22 PM	BCl3 valve closed
7/18/2012	3:22:22 PM	PH3 valve closed
7/18/2012	3:22:22 PM	SiCl4 pre valve closed
7/18/2012	3:22:22 PM	SiCl4 post valve closed
7/18/2012	3:22:22 PM	Main Vac valve closed
7/18/2012	3:22:22 PM	Bypass valve closed
7/18/2012	3:22:22 PM	Bubbler valve closed
7/18/2012	3:22:22 PM	Helium MFC set to  0.000000
7/18/2012	3:22:22 PM	H2 MFC set to  0.000000
7/18/2012	3:22:22 PM	BCl3 MFC set to  0.000000
7/18/2012	3:22:22 PM	PH3 MFC set to  0.000000
7/18/2012	3:22:22 PM	SiCl4 MFC set to  0.000000
7/18/2012	3:22:22 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	3:22:22 PM	Tube furnace set to 0
7/18/2012	3:22:23 PM	Run finished at 3:22 PM
7/18/2012	3:22:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/18/2012	3:28:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/18/2012	3:28:08 PM	Recipe started at 3:28 PM
7/18/2012	3:28:08 PM	Helium valve closed
7/18/2012	3:28:08 PM	H2 valve closed
7/18/2012	3:28:08 PM	BCl3 valve closed
7/18/2012	3:28:08 PM	PH3 valve closed
7/18/2012	3:28:08 PM	SiCl4 pre valve closed
7/18/2012	3:28:08 PM	SiCl4 post valve closed
7/18/2012	3:28:08 PM	Main Vac valve closed
7/18/2012	3:28:08 PM	Bubbler valve closed
7/18/2012	3:28:08 PM	Bypass valve opened
7/18/2012	3:28:08 PM	Helium MFC set to  0.000000
7/18/2012	3:28:08 PM	H2 MFC set to  0.000000
7/18/2012	3:28:08 PM	BCl3 MFC set to  0.000000
7/18/2012	3:28:08 PM	PH3 MFC set to  0.000000
7/18/2012	3:28:08 PM	SiCl4 MFC set to  0.000000
7/18/2012	3:28:08 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	3:28:08 PM	Tube furnace set to 0
7/18/2012	3:29:23 PM	Helium valve closed
7/18/2012	3:29:23 PM	H2 valve closed
7/18/2012	3:29:23 PM	BCl3 valve closed
7/18/2012	3:29:23 PM	PH3 valve closed
7/18/2012	3:29:23 PM	SiCl4 pre valve closed
7/18/2012	3:29:23 PM	SiCl4 post valve closed
7/18/2012	3:29:23 PM	Main Vac valve closed
7/18/2012	3:29:23 PM	Bubbler valve closed
7/18/2012	3:29:23 PM	Bypass valve opened
7/18/2012	3:29:23 PM	Helium MFC set to  0.000000
7/18/2012	3:29:23 PM	H2 MFC set to  0.000000
7/18/2012	3:29:23 PM	BCl3 MFC set to  0.000000
7/18/2012	3:29:23 PM	PH3 MFC set to  0.000000
7/18/2012	3:29:23 PM	SiCl4 MFC set to  0.000000
7/18/2012	3:29:23 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	3:29:24 PM	Tube furnace set to 0
7/18/2012	3:30:24 PM	Helium valve closed
7/18/2012	3:30:24 PM	H2 valve closed
7/18/2012	3:30:24 PM	BCl3 valve closed
7/18/2012	3:30:24 PM	PH3 valve closed
7/18/2012	3:30:24 PM	SiCl4 pre valve closed
7/18/2012	3:30:24 PM	SiCl4 post valve closed
7/18/2012	3:30:24 PM	Bypass valve closed
7/18/2012	3:30:24 PM	Bubbler valve closed
7/18/2012	3:30:24 PM	Main Vac valve opened
7/18/2012	3:30:24 PM	Helium MFC set to  0.000000
7/18/2012	3:30:24 PM	H2 MFC set to  0.000000
7/18/2012	3:30:24 PM	BCl3 MFC set to  0.000000
7/18/2012	3:30:24 PM	PH3 MFC set to  0.000000
7/18/2012	3:30:24 PM	SiCl4 MFC set to  0.000000
7/18/2012	3:30:24 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	3:30:24 PM	Tube furnace set to 0
7/18/2012	3:30:25 PM	Run finished at 3:30 PM
7/18/2012	3:30:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/18/2012	4:01:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/18/2012	4:01:23 PM	Recipe started at 4:01 PM
7/18/2012	4:01:23 PM	Helium valve closed
7/18/2012	4:01:23 PM	H2 valve closed
7/18/2012	4:01:23 PM	BCl3 valve closed
7/18/2012	4:01:23 PM	PH3 valve closed
7/18/2012	4:01:23 PM	SiCl4 pre valve closed
7/18/2012	4:01:23 PM	SiCl4 post valve closed
7/18/2012	4:01:23 PM	Main Vac valve closed
7/18/2012	4:01:23 PM	Bubbler valve closed
7/18/2012	4:01:23 PM	Bypass valve opened
7/18/2012	4:01:23 PM	Helium MFC set to  0.000000
7/18/2012	4:01:23 PM	H2 MFC set to  0.000000
7/18/2012	4:01:23 PM	BCl3 MFC set to  0.000000
7/18/2012	4:01:23 PM	PH3 MFC set to  0.000000
7/18/2012	4:01:23 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:01:23 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:01:23 PM	Tube furnace set to 0
7/18/2012	4:01:23 PM	Helium valve closed
7/18/2012	4:01:23 PM	H2 valve closed
7/18/2012	4:01:23 PM	BCl3 valve closed
7/18/2012	4:01:23 PM	PH3 valve closed
7/18/2012	4:01:23 PM	SiCl4 pre valve closed
7/18/2012	4:01:23 PM	SiCl4 post valve closed
7/18/2012	4:01:23 PM	Main Vac valve closed
7/18/2012	4:01:23 PM	Bubbler valve closed
7/18/2012	4:01:23 PM	Bypass valve opened
7/18/2012	4:01:23 PM	Helium MFC set to  0.000000
7/18/2012	4:01:23 PM	H2 MFC set to  0.000000
7/18/2012	4:01:23 PM	BCl3 MFC set to  0.000000
7/18/2012	4:01:23 PM	PH3 MFC set to  0.000000
7/18/2012	4:01:23 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:01:23 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:01:23 PM	Tube furnace set to 0
7/18/2012	4:01:53 PM	Helium valve closed
7/18/2012	4:01:53 PM	H2 valve closed
7/18/2012	4:01:53 PM	BCl3 valve closed
7/18/2012	4:01:53 PM	PH3 valve closed
7/18/2012	4:01:53 PM	SiCl4 pre valve closed
7/18/2012	4:01:53 PM	SiCl4 post valve closed
7/18/2012	4:01:53 PM	Bypass valve closed
7/18/2012	4:01:53 PM	Bubbler valve closed
7/18/2012	4:01:53 PM	Main Vac valve opened
7/18/2012	4:01:53 PM	Helium MFC set to  0.000000
7/18/2012	4:01:53 PM	H2 MFC set to  0.000000
7/18/2012	4:01:53 PM	BCl3 MFC set to  0.000000
7/18/2012	4:01:53 PM	PH3 MFC set to  0.000000
7/18/2012	4:01:53 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:01:53 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:01:54 PM	Tube furnace set to 0
7/18/2012	4:02:24 PM	H2 valve closed
7/18/2012	4:02:24 PM	BCl3 valve closed
7/18/2012	4:02:24 PM	PH3 valve closed
7/18/2012	4:02:24 PM	SiCl4 pre valve closed
7/18/2012	4:02:24 PM	SiCl4 post valve closed
7/18/2012	4:02:24 PM	Bypass valve closed
7/18/2012	4:02:24 PM	Bubbler valve closed
7/18/2012	4:02:24 PM	Helium valve opened
7/18/2012	4:02:24 PM	Main Vac valve opened
7/18/2012	4:02:24 PM	Helium MFC set to  20.000000
7/18/2012	4:02:24 PM	H2 MFC set to  0.000000
7/18/2012	4:02:24 PM	BCl3 MFC set to  0.000000
7/18/2012	4:02:24 PM	PH3 MFC set to  0.000000
7/18/2012	4:02:24 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:02:24 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:02:24 PM	Tube furnace set to 0
7/18/2012	4:02:54 PM	Helium valve closed
7/18/2012	4:02:54 PM	H2 valve closed
7/18/2012	4:02:54 PM	BCl3 valve closed
7/18/2012	4:02:54 PM	PH3 valve closed
7/18/2012	4:02:54 PM	SiCl4 pre valve closed
7/18/2012	4:02:54 PM	SiCl4 post valve closed
7/18/2012	4:02:54 PM	Bypass valve closed
7/18/2012	4:02:54 PM	Bubbler valve closed
7/18/2012	4:02:54 PM	Main Vac valve opened
7/18/2012	4:02:54 PM	Helium MFC set to  0.000000
7/18/2012	4:02:54 PM	H2 MFC set to  0.000000
7/18/2012	4:02:54 PM	BCl3 MFC set to  0.000000
7/18/2012	4:02:54 PM	PH3 MFC set to  0.000000
7/18/2012	4:02:54 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:02:54 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:02:54 PM	Tube furnace set to 0
7/18/2012	4:03:24 PM	H2 valve closed
7/18/2012	4:03:24 PM	BCl3 valve closed
7/18/2012	4:03:24 PM	PH3 valve closed
7/18/2012	4:03:24 PM	SiCl4 pre valve closed
7/18/2012	4:03:24 PM	SiCl4 post valve closed
7/18/2012	4:03:24 PM	Bypass valve closed
7/18/2012	4:03:24 PM	Bubbler valve closed
7/18/2012	4:03:24 PM	Helium valve opened
7/18/2012	4:03:24 PM	Main Vac valve opened
7/18/2012	4:03:24 PM	Helium MFC set to  20.000000
7/18/2012	4:03:24 PM	H2 MFC set to  0.000000
7/18/2012	4:03:24 PM	BCl3 MFC set to  0.000000
7/18/2012	4:03:24 PM	PH3 MFC set to  0.000000
7/18/2012	4:03:24 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:03:24 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:03:24 PM	Tube furnace set to 0
7/18/2012	4:03:54 PM	Helium valve closed
7/18/2012	4:03:54 PM	H2 valve closed
7/18/2012	4:03:54 PM	BCl3 valve closed
7/18/2012	4:03:54 PM	PH3 valve closed
7/18/2012	4:03:54 PM	SiCl4 pre valve closed
7/18/2012	4:03:54 PM	SiCl4 post valve closed
7/18/2012	4:03:54 PM	Bypass valve closed
7/18/2012	4:03:54 PM	Bubbler valve closed
7/18/2012	4:03:54 PM	Main Vac valve opened
7/18/2012	4:03:54 PM	Helium MFC set to  0.000000
7/18/2012	4:03:54 PM	H2 MFC set to  0.000000
7/18/2012	4:03:54 PM	BCl3 MFC set to  0.000000
7/18/2012	4:03:54 PM	PH3 MFC set to  0.000000
7/18/2012	4:03:54 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:03:54 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:03:55 PM	Tube furnace set to 0
7/18/2012	4:04:25 PM	H2 valve closed
7/18/2012	4:04:25 PM	BCl3 valve closed
7/18/2012	4:04:25 PM	PH3 valve closed
7/18/2012	4:04:25 PM	SiCl4 pre valve closed
7/18/2012	4:04:25 PM	SiCl4 post valve closed
7/18/2012	4:04:25 PM	Bypass valve closed
7/18/2012	4:04:25 PM	Bubbler valve closed
7/18/2012	4:04:25 PM	Helium valve opened
7/18/2012	4:04:25 PM	Main Vac valve opened
7/18/2012	4:04:25 PM	Helium MFC set to  20.000000
7/18/2012	4:04:25 PM	H2 MFC set to  0.000000
7/18/2012	4:04:25 PM	BCl3 MFC set to  0.000000
7/18/2012	4:04:25 PM	PH3 MFC set to  0.000000
7/18/2012	4:04:25 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:04:25 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:04:25 PM	Tube furnace set to 0
7/18/2012	4:04:55 PM	Helium valve closed
7/18/2012	4:04:55 PM	H2 valve closed
7/18/2012	4:04:55 PM	BCl3 valve closed
7/18/2012	4:04:55 PM	PH3 valve closed
7/18/2012	4:04:55 PM	SiCl4 pre valve closed
7/18/2012	4:04:55 PM	SiCl4 post valve closed
7/18/2012	4:04:55 PM	Bypass valve closed
7/18/2012	4:04:55 PM	Bubbler valve closed
7/18/2012	4:04:55 PM	Main Vac valve opened
7/18/2012	4:04:55 PM	Helium MFC set to  0.000000
7/18/2012	4:04:55 PM	H2 MFC set to  0.000000
7/18/2012	4:04:55 PM	BCl3 MFC set to  0.000000
7/18/2012	4:04:55 PM	PH3 MFC set to  0.000000
7/18/2012	4:04:55 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:04:55 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:04:55 PM	Tube furnace set to 0
7/18/2012	4:05:25 PM	H2 valve closed
7/18/2012	4:05:25 PM	BCl3 valve closed
7/18/2012	4:05:25 PM	PH3 valve closed
7/18/2012	4:05:25 PM	SiCl4 pre valve closed
7/18/2012	4:05:25 PM	SiCl4 post valve closed
7/18/2012	4:05:25 PM	Bypass valve closed
7/18/2012	4:05:25 PM	Bubbler valve closed
7/18/2012	4:05:25 PM	Helium valve opened
7/18/2012	4:05:25 PM	Main Vac valve opened
7/18/2012	4:05:25 PM	Helium MFC set to  20.000000
7/18/2012	4:05:25 PM	H2 MFC set to  0.000000
7/18/2012	4:05:25 PM	BCl3 MFC set to  0.000000
7/18/2012	4:05:25 PM	PH3 MFC set to  0.000000
7/18/2012	4:05:25 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:05:25 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:05:25 PM	Tube furnace set to 0
7/18/2012	4:05:55 PM	Helium valve closed
7/18/2012	4:05:55 PM	H2 valve closed
7/18/2012	4:05:55 PM	BCl3 valve closed
7/18/2012	4:05:55 PM	PH3 valve closed
7/18/2012	4:05:55 PM	SiCl4 pre valve closed
7/18/2012	4:05:55 PM	SiCl4 post valve closed
7/18/2012	4:05:55 PM	Bypass valve closed
7/18/2012	4:05:55 PM	Bubbler valve closed
7/18/2012	4:05:55 PM	Main Vac valve opened
7/18/2012	4:05:55 PM	Helium MFC set to  0.000000
7/18/2012	4:05:55 PM	H2 MFC set to  0.000000
7/18/2012	4:05:55 PM	BCl3 MFC set to  0.000000
7/18/2012	4:05:55 PM	PH3 MFC set to  0.000000
7/18/2012	4:05:55 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:05:55 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:05:55 PM	Tube furnace set to 0
7/18/2012	4:06:25 PM	H2 valve closed
7/18/2012	4:06:25 PM	BCl3 valve closed
7/18/2012	4:06:25 PM	PH3 valve closed
7/18/2012	4:06:25 PM	SiCl4 pre valve closed
7/18/2012	4:06:25 PM	SiCl4 post valve closed
7/18/2012	4:06:26 PM	Bypass valve closed
7/18/2012	4:06:26 PM	Bubbler valve closed
7/18/2012	4:06:26 PM	Helium valve opened
7/18/2012	4:06:26 PM	Main Vac valve opened
7/18/2012	4:06:26 PM	Helium MFC set to  20.000000
7/18/2012	4:06:26 PM	H2 MFC set to  0.000000
7/18/2012	4:06:26 PM	BCl3 MFC set to  0.000000
7/18/2012	4:06:26 PM	PH3 MFC set to  0.000000
7/18/2012	4:06:26 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:06:26 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:06:26 PM	Tube furnace set to 0
7/18/2012	4:06:56 PM	Helium valve closed
7/18/2012	4:06:56 PM	H2 valve closed
7/18/2012	4:06:56 PM	BCl3 valve closed
7/18/2012	4:06:56 PM	PH3 valve closed
7/18/2012	4:06:56 PM	SiCl4 pre valve closed
7/18/2012	4:06:56 PM	SiCl4 post valve closed
7/18/2012	4:06:56 PM	Bypass valve closed
7/18/2012	4:06:56 PM	Bubbler valve closed
7/18/2012	4:06:56 PM	Main Vac valve opened
7/18/2012	4:06:56 PM	Helium MFC set to  0.000000
7/18/2012	4:06:56 PM	H2 MFC set to  0.000000
7/18/2012	4:06:56 PM	BCl3 MFC set to  0.000000
7/18/2012	4:06:56 PM	PH3 MFC set to  0.000000
7/18/2012	4:06:56 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:06:56 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:06:56 PM	Tube furnace set to 0
7/18/2012	4:07:26 PM	H2 valve closed
7/18/2012	4:07:26 PM	BCl3 valve closed
7/18/2012	4:07:26 PM	PH3 valve closed
7/18/2012	4:07:26 PM	SiCl4 pre valve closed
7/18/2012	4:07:26 PM	SiCl4 post valve closed
7/18/2012	4:07:26 PM	Bypass valve closed
7/18/2012	4:07:26 PM	Bubbler valve closed
7/18/2012	4:07:26 PM	Helium valve opened
7/18/2012	4:07:26 PM	Main Vac valve opened
7/18/2012	4:07:26 PM	Helium MFC set to  20.000000
7/18/2012	4:07:26 PM	H2 MFC set to  0.000000
7/18/2012	4:07:26 PM	BCl3 MFC set to  0.000000
7/18/2012	4:07:26 PM	PH3 MFC set to  0.000000
7/18/2012	4:07:26 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:07:26 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:07:26 PM	Tube furnace set to 0
7/18/2012	4:07:56 PM	Helium valve closed
7/18/2012	4:07:56 PM	H2 valve closed
7/18/2012	4:07:56 PM	BCl3 valve closed
7/18/2012	4:07:56 PM	PH3 valve closed
7/18/2012	4:07:56 PM	SiCl4 pre valve closed
7/18/2012	4:07:56 PM	SiCl4 post valve closed
7/18/2012	4:07:56 PM	Bypass valve closed
7/18/2012	4:07:56 PM	Bubbler valve closed
7/18/2012	4:07:56 PM	Main Vac valve opened
7/18/2012	4:07:56 PM	Helium MFC set to  0.000000
7/18/2012	4:07:56 PM	H2 MFC set to  0.000000
7/18/2012	4:07:56 PM	BCl3 MFC set to  0.000000
7/18/2012	4:07:56 PM	PH3 MFC set to  0.000000
7/18/2012	4:07:56 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:07:56 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:07:56 PM	Tube furnace set to 0
7/18/2012	4:08:26 PM	H2 valve closed
7/18/2012	4:08:26 PM	BCl3 valve closed
7/18/2012	4:08:26 PM	PH3 valve closed
7/18/2012	4:08:26 PM	SiCl4 pre valve closed
7/18/2012	4:08:26 PM	SiCl4 post valve closed
7/18/2012	4:08:26 PM	Bypass valve closed
7/18/2012	4:08:26 PM	Bubbler valve closed
7/18/2012	4:08:26 PM	Helium valve opened
7/18/2012	4:08:26 PM	Main Vac valve opened
7/18/2012	4:08:26 PM	Helium MFC set to  20.000000
7/18/2012	4:08:26 PM	H2 MFC set to  0.000000
7/18/2012	4:08:26 PM	BCl3 MFC set to  0.000000
7/18/2012	4:08:26 PM	PH3 MFC set to  0.000000
7/18/2012	4:08:27 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:08:27 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:08:27 PM	Tube furnace set to 0
7/18/2012	4:08:57 PM	Helium valve closed
7/18/2012	4:08:57 PM	H2 valve closed
7/18/2012	4:08:57 PM	BCl3 valve closed
7/18/2012	4:08:57 PM	PH3 valve closed
7/18/2012	4:08:57 PM	SiCl4 pre valve closed
7/18/2012	4:08:57 PM	SiCl4 post valve closed
7/18/2012	4:08:57 PM	Bypass valve closed
7/18/2012	4:08:57 PM	Bubbler valve closed
7/18/2012	4:08:57 PM	Main Vac valve opened
7/18/2012	4:08:57 PM	Helium MFC set to  0.000000
7/18/2012	4:08:57 PM	H2 MFC set to  0.000000
7/18/2012	4:08:57 PM	BCl3 MFC set to  0.000000
7/18/2012	4:08:57 PM	PH3 MFC set to  0.000000
7/18/2012	4:08:57 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:08:57 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:08:57 PM	Tube furnace set to 0
7/18/2012	4:09:27 PM	H2 valve closed
7/18/2012	4:09:27 PM	BCl3 valve closed
7/18/2012	4:09:27 PM	PH3 valve closed
7/18/2012	4:09:27 PM	SiCl4 pre valve closed
7/18/2012	4:09:27 PM	SiCl4 post valve closed
7/18/2012	4:09:27 PM	Bypass valve closed
7/18/2012	4:09:27 PM	Bubbler valve closed
7/18/2012	4:09:27 PM	Helium valve opened
7/18/2012	4:09:27 PM	Main Vac valve opened
7/18/2012	4:09:27 PM	Helium MFC set to  20.000000
7/18/2012	4:09:27 PM	H2 MFC set to  0.000000
7/18/2012	4:09:27 PM	BCl3 MFC set to  0.000000
7/18/2012	4:09:27 PM	PH3 MFC set to  0.000000
7/18/2012	4:09:27 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:09:27 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:09:27 PM	Tube furnace set to 0
7/18/2012	4:09:57 PM	Helium valve closed
7/18/2012	4:09:57 PM	H2 valve closed
7/18/2012	4:09:57 PM	BCl3 valve closed
7/18/2012	4:09:57 PM	PH3 valve closed
7/18/2012	4:09:57 PM	SiCl4 pre valve closed
7/18/2012	4:09:57 PM	SiCl4 post valve closed
7/18/2012	4:09:57 PM	Bypass valve closed
7/18/2012	4:09:57 PM	Bubbler valve closed
7/18/2012	4:09:57 PM	Main Vac valve opened
7/18/2012	4:09:57 PM	Helium MFC set to  0.000000
7/18/2012	4:09:57 PM	H2 MFC set to  0.000000
7/18/2012	4:09:57 PM	BCl3 MFC set to  0.000000
7/18/2012	4:09:57 PM	PH3 MFC set to  0.000000
7/18/2012	4:09:57 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:09:57 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:09:57 PM	Tube furnace set to 0
7/18/2012	4:10:27 PM	H2 valve closed
7/18/2012	4:10:27 PM	BCl3 valve closed
7/18/2012	4:10:27 PM	PH3 valve closed
7/18/2012	4:10:27 PM	SiCl4 pre valve closed
7/18/2012	4:10:27 PM	SiCl4 post valve closed
7/18/2012	4:10:27 PM	Bypass valve closed
7/18/2012	4:10:27 PM	Bubbler valve closed
7/18/2012	4:10:27 PM	Helium valve opened
7/18/2012	4:10:27 PM	Main Vac valve opened
7/18/2012	4:10:27 PM	Helium MFC set to  20.000000
7/18/2012	4:10:27 PM	H2 MFC set to  0.000000
7/18/2012	4:10:27 PM	BCl3 MFC set to  0.000000
7/18/2012	4:10:27 PM	PH3 MFC set to  0.000000
7/18/2012	4:10:27 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:10:27 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:10:28 PM	Tube furnace set to 0
7/18/2012	4:10:58 PM	Helium valve closed
7/18/2012	4:10:58 PM	H2 valve closed
7/18/2012	4:10:58 PM	BCl3 valve closed
7/18/2012	4:10:58 PM	PH3 valve closed
7/18/2012	4:10:58 PM	SiCl4 pre valve closed
7/18/2012	4:10:58 PM	SiCl4 post valve closed
7/18/2012	4:10:58 PM	Bypass valve closed
7/18/2012	4:10:58 PM	Bubbler valve closed
7/18/2012	4:10:58 PM	Main Vac valve opened
7/18/2012	4:10:58 PM	Helium MFC set to  0.000000
7/18/2012	4:10:58 PM	H2 MFC set to  0.000000
7/18/2012	4:10:58 PM	BCl3 MFC set to  0.000000
7/18/2012	4:10:58 PM	PH3 MFC set to  0.000000
7/18/2012	4:10:58 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:10:58 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:10:58 PM	Tube furnace set to 0
7/18/2012	4:11:28 PM	H2 valve closed
7/18/2012	4:11:28 PM	BCl3 valve closed
7/18/2012	4:11:28 PM	PH3 valve closed
7/18/2012	4:11:28 PM	SiCl4 pre valve closed
7/18/2012	4:11:28 PM	SiCl4 post valve closed
7/18/2012	4:11:28 PM	Bypass valve closed
7/18/2012	4:11:28 PM	Bubbler valve closed
7/18/2012	4:11:28 PM	Helium valve opened
7/18/2012	4:11:28 PM	Main Vac valve opened
7/18/2012	4:11:28 PM	Helium MFC set to  20.000000
7/18/2012	4:11:28 PM	H2 MFC set to  0.000000
7/18/2012	4:11:28 PM	BCl3 MFC set to  0.000000
7/18/2012	4:11:28 PM	PH3 MFC set to  0.000000
7/18/2012	4:11:28 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:11:28 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:11:28 PM	Tube furnace set to 0
7/18/2012	4:11:58 PM	Helium valve closed
7/18/2012	4:11:58 PM	H2 valve closed
7/18/2012	4:11:58 PM	BCl3 valve closed
7/18/2012	4:11:58 PM	PH3 valve closed
7/18/2012	4:11:58 PM	SiCl4 pre valve closed
7/18/2012	4:11:58 PM	SiCl4 post valve closed
7/18/2012	4:11:58 PM	Bypass valve closed
7/18/2012	4:11:58 PM	Bubbler valve closed
7/18/2012	4:11:58 PM	Main Vac valve opened
7/18/2012	4:11:58 PM	Helium MFC set to  0.000000
7/18/2012	4:11:58 PM	H2 MFC set to  0.000000
7/18/2012	4:11:58 PM	BCl3 MFC set to  0.000000
7/18/2012	4:11:58 PM	PH3 MFC set to  0.000000
7/18/2012	4:11:58 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:11:58 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:11:58 PM	Tube furnace set to 0
7/18/2012	4:11:59 PM	Run finished at 4:11 PM
7/18/2012	4:11:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/18/2012	4:40:07 PM	Main Vac valve closed
7/18/2012	4:40:17 PM	Main Vac valve opened
7/18/2012	4:40:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/18/2012	4:40:42 PM	Recipe started at 4:40 PM
7/18/2012	4:40:42 PM	Helium valve closed
7/18/2012	4:40:42 PM	H2 valve closed
7/18/2012	4:40:42 PM	BCl3 valve closed
7/18/2012	4:40:42 PM	PH3 valve closed
7/18/2012	4:40:42 PM	SiCl4 pre valve closed
7/18/2012	4:40:42 PM	SiCl4 post valve closed
7/18/2012	4:40:42 PM	Main Vac valve closed
7/18/2012	4:40:42 PM	Bubbler valve closed
7/18/2012	4:40:42 PM	Bypass valve opened
7/18/2012	4:40:42 PM	Helium MFC set to  0.000000
7/18/2012	4:40:42 PM	H2 MFC set to  0.000000
7/18/2012	4:40:42 PM	BCl3 MFC set to  0.000000
7/18/2012	4:40:42 PM	PH3 MFC set to  0.000000
7/18/2012	4:40:42 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:40:42 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:40:42 PM	Tube furnace set to 0
7/18/2012	4:40:42 PM	Helium valve closed
7/18/2012	4:40:42 PM	H2 valve closed
7/18/2012	4:40:42 PM	BCl3 valve closed
7/18/2012	4:40:42 PM	PH3 valve closed
7/18/2012	4:40:43 PM	SiCl4 pre valve closed
7/18/2012	4:40:43 PM	SiCl4 post valve closed
7/18/2012	4:40:43 PM	Main Vac valve closed
7/18/2012	4:40:43 PM	Bubbler valve closed
7/18/2012	4:40:43 PM	Bypass valve opened
7/18/2012	4:40:43 PM	Helium MFC set to  0.000000
7/18/2012	4:40:43 PM	H2 MFC set to  0.000000
7/18/2012	4:40:43 PM	BCl3 MFC set to  0.000000
7/18/2012	4:40:43 PM	PH3 MFC set to  0.000000
7/18/2012	4:40:43 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:40:43 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:40:43 PM	Tube furnace set to 0
7/18/2012	4:41:13 PM	Helium valve closed
7/18/2012	4:41:13 PM	H2 valve closed
7/18/2012	4:41:13 PM	BCl3 valve closed
7/18/2012	4:41:13 PM	PH3 valve closed
7/18/2012	4:41:13 PM	SiCl4 pre valve closed
7/18/2012	4:41:13 PM	SiCl4 post valve closed
7/18/2012	4:41:13 PM	Bypass valve closed
7/18/2012	4:41:13 PM	Bubbler valve closed
7/18/2012	4:41:13 PM	Main Vac valve opened
7/18/2012	4:41:13 PM	Helium MFC set to  0.000000
7/18/2012	4:41:13 PM	H2 MFC set to  0.000000
7/18/2012	4:41:13 PM	BCl3 MFC set to  0.000000
7/18/2012	4:41:13 PM	PH3 MFC set to  0.000000
7/18/2012	4:41:13 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:41:13 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:41:13 PM	Tube furnace set to 0
7/18/2012	4:41:43 PM	H2 valve closed
7/18/2012	4:41:43 PM	BCl3 valve closed
7/18/2012	4:41:43 PM	PH3 valve closed
7/18/2012	4:41:43 PM	SiCl4 pre valve closed
7/18/2012	4:41:43 PM	SiCl4 post valve closed
7/18/2012	4:41:43 PM	Bypass valve closed
7/18/2012	4:41:43 PM	Bubbler valve closed
7/18/2012	4:41:43 PM	Helium valve opened
7/18/2012	4:41:43 PM	Main Vac valve opened
7/18/2012	4:41:43 PM	Helium MFC set to  20.000000
7/18/2012	4:41:43 PM	H2 MFC set to  0.000000
7/18/2012	4:41:43 PM	BCl3 MFC set to  0.000000
7/18/2012	4:41:43 PM	PH3 MFC set to  0.000000
7/18/2012	4:41:43 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:41:43 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:41:43 PM	Tube furnace set to 0
7/18/2012	4:42:13 PM	Helium valve closed
7/18/2012	4:42:13 PM	H2 valve closed
7/18/2012	4:42:13 PM	BCl3 valve closed
7/18/2012	4:42:13 PM	PH3 valve closed
7/18/2012	4:42:13 PM	SiCl4 pre valve closed
7/18/2012	4:42:13 PM	SiCl4 post valve closed
7/18/2012	4:42:13 PM	Bypass valve closed
7/18/2012	4:42:13 PM	Bubbler valve closed
7/18/2012	4:42:13 PM	Main Vac valve opened
7/18/2012	4:42:13 PM	Helium MFC set to  0.000000
7/18/2012	4:42:13 PM	H2 MFC set to  0.000000
7/18/2012	4:42:13 PM	BCl3 MFC set to  0.000000
7/18/2012	4:42:13 PM	PH3 MFC set to  0.000000
7/18/2012	4:42:13 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:42:13 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:42:13 PM	Tube furnace set to 0
7/18/2012	4:42:43 PM	H2 valve closed
7/18/2012	4:42:43 PM	BCl3 valve closed
7/18/2012	4:42:43 PM	PH3 valve closed
7/18/2012	4:42:43 PM	SiCl4 pre valve closed
7/18/2012	4:42:43 PM	SiCl4 post valve closed
7/18/2012	4:42:43 PM	Bypass valve closed
7/18/2012	4:42:43 PM	Bubbler valve closed
7/18/2012	4:42:43 PM	Helium valve opened
7/18/2012	4:42:43 PM	Main Vac valve opened
7/18/2012	4:42:43 PM	Helium MFC set to  20.000000
7/18/2012	4:42:43 PM	H2 MFC set to  0.000000
7/18/2012	4:42:43 PM	BCl3 MFC set to  0.000000
7/18/2012	4:42:43 PM	PH3 MFC set to  0.000000
7/18/2012	4:42:43 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:42:43 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:42:44 PM	Tube furnace set to 0
7/18/2012	4:43:14 PM	Helium valve closed
7/18/2012	4:43:14 PM	H2 valve closed
7/18/2012	4:43:14 PM	BCl3 valve closed
7/18/2012	4:43:14 PM	PH3 valve closed
7/18/2012	4:43:14 PM	SiCl4 pre valve closed
7/18/2012	4:43:14 PM	SiCl4 post valve closed
7/18/2012	4:43:14 PM	Bypass valve closed
7/18/2012	4:43:14 PM	Bubbler valve closed
7/18/2012	4:43:14 PM	Main Vac valve opened
7/18/2012	4:43:14 PM	Helium MFC set to  0.000000
7/18/2012	4:43:14 PM	H2 MFC set to  0.000000
7/18/2012	4:43:14 PM	BCl3 MFC set to  0.000000
7/18/2012	4:43:14 PM	PH3 MFC set to  0.000000
7/18/2012	4:43:14 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:43:14 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:43:14 PM	Tube furnace set to 0
7/18/2012	4:43:44 PM	H2 valve closed
7/18/2012	4:43:44 PM	BCl3 valve closed
7/18/2012	4:43:44 PM	PH3 valve closed
7/18/2012	4:43:44 PM	SiCl4 pre valve closed
7/18/2012	4:43:44 PM	SiCl4 post valve closed
7/18/2012	4:43:44 PM	Bypass valve closed
7/18/2012	4:43:44 PM	Bubbler valve closed
7/18/2012	4:43:44 PM	Helium valve opened
7/18/2012	4:43:44 PM	Main Vac valve opened
7/18/2012	4:43:44 PM	Helium MFC set to  20.000000
7/18/2012	4:43:44 PM	H2 MFC set to  0.000000
7/18/2012	4:43:44 PM	BCl3 MFC set to  0.000000
7/18/2012	4:43:44 PM	PH3 MFC set to  0.000000
7/18/2012	4:43:44 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:43:44 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:43:44 PM	Tube furnace set to 0
7/18/2012	4:44:14 PM	Helium valve closed
7/18/2012	4:44:14 PM	H2 valve closed
7/18/2012	4:44:14 PM	BCl3 valve closed
7/18/2012	4:44:14 PM	PH3 valve closed
7/18/2012	4:44:14 PM	SiCl4 pre valve closed
7/18/2012	4:44:14 PM	SiCl4 post valve closed
7/18/2012	4:44:14 PM	Bypass valve closed
7/18/2012	4:44:14 PM	Bubbler valve closed
7/18/2012	4:44:14 PM	Main Vac valve opened
7/18/2012	4:44:14 PM	Helium MFC set to  0.000000
7/18/2012	4:44:14 PM	H2 MFC set to  0.000000
7/18/2012	4:44:14 PM	BCl3 MFC set to  0.000000
7/18/2012	4:44:14 PM	PH3 MFC set to  0.000000
7/18/2012	4:44:14 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:44:14 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:44:14 PM	Tube furnace set to 0
7/18/2012	4:44:44 PM	H2 valve closed
7/18/2012	4:44:44 PM	BCl3 valve closed
7/18/2012	4:44:44 PM	PH3 valve closed
7/18/2012	4:44:44 PM	SiCl4 pre valve closed
7/18/2012	4:44:44 PM	SiCl4 post valve closed
7/18/2012	4:44:44 PM	Bypass valve closed
7/18/2012	4:44:44 PM	Bubbler valve closed
7/18/2012	4:44:44 PM	Helium valve opened
7/18/2012	4:44:44 PM	Main Vac valve opened
7/18/2012	4:44:44 PM	Helium MFC set to  20.000000
7/18/2012	4:44:44 PM	H2 MFC set to  0.000000
7/18/2012	4:44:44 PM	BCl3 MFC set to  0.000000
7/18/2012	4:44:44 PM	PH3 MFC set to  0.000000
7/18/2012	4:44:44 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:44:44 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:44:45 PM	Tube furnace set to 0
7/18/2012	4:45:15 PM	Helium valve closed
7/18/2012	4:45:15 PM	H2 valve closed
7/18/2012	4:45:15 PM	BCl3 valve closed
7/18/2012	4:45:15 PM	PH3 valve closed
7/18/2012	4:45:15 PM	SiCl4 pre valve closed
7/18/2012	4:45:15 PM	SiCl4 post valve closed
7/18/2012	4:45:15 PM	Bypass valve closed
7/18/2012	4:45:15 PM	Bubbler valve closed
7/18/2012	4:45:15 PM	Main Vac valve opened
7/18/2012	4:45:15 PM	Helium MFC set to  0.000000
7/18/2012	4:45:15 PM	H2 MFC set to  0.000000
7/18/2012	4:45:15 PM	BCl3 MFC set to  0.000000
7/18/2012	4:45:15 PM	PH3 MFC set to  0.000000
7/18/2012	4:45:15 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:45:15 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:45:15 PM	Tube furnace set to 0
7/18/2012	4:45:45 PM	H2 valve closed
7/18/2012	4:45:45 PM	BCl3 valve closed
7/18/2012	4:45:45 PM	PH3 valve closed
7/18/2012	4:45:45 PM	SiCl4 pre valve closed
7/18/2012	4:45:45 PM	SiCl4 post valve closed
7/18/2012	4:45:45 PM	Bypass valve closed
7/18/2012	4:45:45 PM	Bubbler valve closed
7/18/2012	4:45:45 PM	Helium valve opened
7/18/2012	4:45:45 PM	Main Vac valve opened
7/18/2012	4:45:45 PM	Helium MFC set to  20.000000
7/18/2012	4:45:45 PM	H2 MFC set to  0.000000
7/18/2012	4:45:45 PM	BCl3 MFC set to  0.000000
7/18/2012	4:45:45 PM	PH3 MFC set to  0.000000
7/18/2012	4:45:45 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:45:45 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:45:45 PM	Tube furnace set to 0
7/18/2012	4:46:15 PM	Helium valve closed
7/18/2012	4:46:15 PM	H2 valve closed
7/18/2012	4:46:15 PM	BCl3 valve closed
7/18/2012	4:46:15 PM	PH3 valve closed
7/18/2012	4:46:15 PM	SiCl4 pre valve closed
7/18/2012	4:46:15 PM	SiCl4 post valve closed
7/18/2012	4:46:15 PM	Bypass valve closed
7/18/2012	4:46:15 PM	Bubbler valve closed
7/18/2012	4:46:15 PM	Main Vac valve opened
7/18/2012	4:46:15 PM	Helium MFC set to  0.000000
7/18/2012	4:46:15 PM	H2 MFC set to  0.000000
7/18/2012	4:46:15 PM	BCl3 MFC set to  0.000000
7/18/2012	4:46:15 PM	PH3 MFC set to  0.000000
7/18/2012	4:46:15 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:46:15 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:46:15 PM	Tube furnace set to 0
7/18/2012	4:46:45 PM	H2 valve closed
7/18/2012	4:46:45 PM	BCl3 valve closed
7/18/2012	4:46:45 PM	PH3 valve closed
7/18/2012	4:46:45 PM	SiCl4 pre valve closed
7/18/2012	4:46:45 PM	SiCl4 post valve closed
7/18/2012	4:46:45 PM	Bypass valve closed
7/18/2012	4:46:45 PM	Bubbler valve closed
7/18/2012	4:46:45 PM	Helium valve opened
7/18/2012	4:46:45 PM	Main Vac valve opened
7/18/2012	4:46:45 PM	Helium MFC set to  20.000000
7/18/2012	4:46:45 PM	H2 MFC set to  0.000000
7/18/2012	4:46:45 PM	BCl3 MFC set to  0.000000
7/18/2012	4:46:45 PM	PH3 MFC set to  0.000000
7/18/2012	4:46:45 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:46:45 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:46:46 PM	Tube furnace set to 0
7/18/2012	4:47:16 PM	Helium valve closed
7/18/2012	4:47:16 PM	H2 valve closed
7/18/2012	4:47:16 PM	BCl3 valve closed
7/18/2012	4:47:16 PM	PH3 valve closed
7/18/2012	4:47:16 PM	SiCl4 pre valve closed
7/18/2012	4:47:16 PM	SiCl4 post valve closed
7/18/2012	4:47:16 PM	Bypass valve closed
7/18/2012	4:47:16 PM	Bubbler valve closed
7/18/2012	4:47:16 PM	Main Vac valve opened
7/18/2012	4:47:16 PM	Helium MFC set to  0.000000
7/18/2012	4:47:16 PM	H2 MFC set to  0.000000
7/18/2012	4:47:16 PM	BCl3 MFC set to  0.000000
7/18/2012	4:47:16 PM	PH3 MFC set to  0.000000
7/18/2012	4:47:16 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:47:16 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:47:16 PM	Tube furnace set to 0
7/18/2012	4:47:46 PM	H2 valve closed
7/18/2012	4:47:46 PM	BCl3 valve closed
7/18/2012	4:47:46 PM	PH3 valve closed
7/18/2012	4:47:46 PM	SiCl4 pre valve closed
7/18/2012	4:47:46 PM	SiCl4 post valve closed
7/18/2012	4:47:46 PM	Bypass valve closed
7/18/2012	4:47:46 PM	Bubbler valve closed
7/18/2012	4:47:46 PM	Helium valve opened
7/18/2012	4:47:46 PM	Main Vac valve opened
7/18/2012	4:47:46 PM	Helium MFC set to  20.000000
7/18/2012	4:47:46 PM	H2 MFC set to  0.000000
7/18/2012	4:47:46 PM	BCl3 MFC set to  0.000000
7/18/2012	4:47:46 PM	PH3 MFC set to  0.000000
7/18/2012	4:47:46 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:47:46 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:47:46 PM	Tube furnace set to 0
7/18/2012	4:48:16 PM	Helium valve closed
7/18/2012	4:48:16 PM	H2 valve closed
7/18/2012	4:48:16 PM	BCl3 valve closed
7/18/2012	4:48:16 PM	PH3 valve closed
7/18/2012	4:48:16 PM	SiCl4 pre valve closed
7/18/2012	4:48:16 PM	SiCl4 post valve closed
7/18/2012	4:48:16 PM	Bypass valve closed
7/18/2012	4:48:16 PM	Bubbler valve closed
7/18/2012	4:48:16 PM	Main Vac valve opened
7/18/2012	4:48:16 PM	Helium MFC set to  0.000000
7/18/2012	4:48:16 PM	H2 MFC set to  0.000000
7/18/2012	4:48:16 PM	BCl3 MFC set to  0.000000
7/18/2012	4:48:16 PM	PH3 MFC set to  0.000000
7/18/2012	4:48:16 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:48:16 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:48:16 PM	Tube furnace set to 0
7/18/2012	4:48:46 PM	H2 valve closed
7/18/2012	4:48:46 PM	BCl3 valve closed
7/18/2012	4:48:46 PM	PH3 valve closed
7/18/2012	4:48:46 PM	SiCl4 pre valve closed
7/18/2012	4:48:46 PM	SiCl4 post valve closed
7/18/2012	4:48:46 PM	Bypass valve closed
7/18/2012	4:48:46 PM	Bubbler valve closed
7/18/2012	4:48:46 PM	Helium valve opened
7/18/2012	4:48:46 PM	Main Vac valve opened
7/18/2012	4:48:46 PM	Helium MFC set to  20.000000
7/18/2012	4:48:46 PM	H2 MFC set to  0.000000
7/18/2012	4:48:46 PM	BCl3 MFC set to  0.000000
7/18/2012	4:48:46 PM	PH3 MFC set to  0.000000
7/18/2012	4:48:46 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:48:46 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:48:46 PM	Tube furnace set to 0
7/18/2012	4:49:16 PM	Helium valve closed
7/18/2012	4:49:17 PM	H2 valve closed
7/18/2012	4:49:17 PM	BCl3 valve closed
7/18/2012	4:49:17 PM	PH3 valve closed
7/18/2012	4:49:17 PM	SiCl4 pre valve closed
7/18/2012	4:49:17 PM	SiCl4 post valve closed
7/18/2012	4:49:17 PM	Bypass valve closed
7/18/2012	4:49:17 PM	Bubbler valve closed
7/18/2012	4:49:17 PM	Main Vac valve opened
7/18/2012	4:49:17 PM	Helium MFC set to  0.000000
7/18/2012	4:49:17 PM	H2 MFC set to  0.000000
7/18/2012	4:49:17 PM	BCl3 MFC set to  0.000000
7/18/2012	4:49:17 PM	PH3 MFC set to  0.000000
7/18/2012	4:49:17 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:49:17 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:49:17 PM	Tube furnace set to 0
7/18/2012	4:49:47 PM	H2 valve closed
7/18/2012	4:49:47 PM	BCl3 valve closed
7/18/2012	4:49:47 PM	PH3 valve closed
7/18/2012	4:49:47 PM	SiCl4 pre valve closed
7/18/2012	4:49:47 PM	SiCl4 post valve closed
7/18/2012	4:49:47 PM	Bypass valve closed
7/18/2012	4:49:47 PM	Bubbler valve closed
7/18/2012	4:49:47 PM	Helium valve opened
7/18/2012	4:49:47 PM	Main Vac valve opened
7/18/2012	4:49:47 PM	Helium MFC set to  20.000000
7/18/2012	4:49:47 PM	H2 MFC set to  0.000000
7/18/2012	4:49:47 PM	BCl3 MFC set to  0.000000
7/18/2012	4:49:47 PM	PH3 MFC set to  0.000000
7/18/2012	4:49:47 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:49:47 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:49:47 PM	Tube furnace set to 0
7/18/2012	4:50:17 PM	Helium valve closed
7/18/2012	4:50:17 PM	H2 valve closed
7/18/2012	4:50:17 PM	BCl3 valve closed
7/18/2012	4:50:17 PM	PH3 valve closed
7/18/2012	4:50:17 PM	SiCl4 pre valve closed
7/18/2012	4:50:17 PM	SiCl4 post valve closed
7/18/2012	4:50:17 PM	Bypass valve closed
7/18/2012	4:50:17 PM	Bubbler valve closed
7/18/2012	4:50:17 PM	Main Vac valve opened
7/18/2012	4:50:17 PM	Helium MFC set to  0.000000
7/18/2012	4:50:17 PM	H2 MFC set to  0.000000
7/18/2012	4:50:17 PM	BCl3 MFC set to  0.000000
7/18/2012	4:50:17 PM	PH3 MFC set to  0.000000
7/18/2012	4:50:17 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:50:17 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:50:17 PM	Tube furnace set to 0
7/18/2012	4:50:47 PM	H2 valve closed
7/18/2012	4:50:47 PM	BCl3 valve closed
7/18/2012	4:50:47 PM	PH3 valve closed
7/18/2012	4:50:47 PM	SiCl4 pre valve closed
7/18/2012	4:50:47 PM	SiCl4 post valve closed
7/18/2012	4:50:47 PM	Bypass valve closed
7/18/2012	4:50:47 PM	Bubbler valve closed
7/18/2012	4:50:47 PM	Helium valve opened
7/18/2012	4:50:47 PM	Main Vac valve opened
7/18/2012	4:50:47 PM	Helium MFC set to  20.000000
7/18/2012	4:50:47 PM	H2 MFC set to  0.000000
7/18/2012	4:50:47 PM	BCl3 MFC set to  0.000000
7/18/2012	4:50:47 PM	PH3 MFC set to  0.000000
7/18/2012	4:50:47 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:50:47 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:50:47 PM	Tube furnace set to 0
7/18/2012	4:51:17 PM	Helium valve closed
7/18/2012	4:51:17 PM	H2 valve closed
7/18/2012	4:51:17 PM	BCl3 valve closed
7/18/2012	4:51:17 PM	PH3 valve closed
7/18/2012	4:51:17 PM	SiCl4 pre valve closed
7/18/2012	4:51:17 PM	SiCl4 post valve closed
7/18/2012	4:51:17 PM	Bypass valve closed
7/18/2012	4:51:17 PM	Bubbler valve closed
7/18/2012	4:51:17 PM	Main Vac valve opened
7/18/2012	4:51:17 PM	Helium MFC set to  0.000000
7/18/2012	4:51:17 PM	H2 MFC set to  0.000000
7/18/2012	4:51:17 PM	BCl3 MFC set to  0.000000
7/18/2012	4:51:17 PM	PH3 MFC set to  0.000000
7/18/2012	4:51:17 PM	SiCl4 MFC set to  0.000000
7/18/2012	4:51:18 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	4:51:18 PM	Tube furnace set to 0
7/18/2012	4:51:19 PM	Run finished at 4:51 PM
7/18/2012	4:51:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/18/2012	5:07:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/18/2012	5:07:23 PM	Recipe started at 5:07 PM
7/18/2012	5:07:23 PM	Helium valve closed
7/18/2012	5:07:23 PM	H2 valve closed
7/18/2012	5:07:23 PM	BCl3 valve closed
7/18/2012	5:07:23 PM	PH3 valve closed
7/18/2012	5:07:23 PM	SiCl4 pre valve closed
7/18/2012	5:07:23 PM	SiCl4 post valve closed
7/18/2012	5:07:23 PM	Main Vac valve closed
7/18/2012	5:07:23 PM	Bubbler valve closed
7/18/2012	5:07:23 PM	Bypass valve opened
7/18/2012	5:07:23 PM	Helium MFC set to  0.000000
7/18/2012	5:07:23 PM	H2 MFC set to  0.000000
7/18/2012	5:07:23 PM	BCl3 MFC set to  0.000000
7/18/2012	5:07:23 PM	PH3 MFC set to  0.000000
7/18/2012	5:07:23 PM	SiCl4 MFC set to  0.000000
7/18/2012	5:07:23 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	5:07:23 PM	Tube furnace set to 0
7/18/2012	5:07:23 PM	Helium valve closed
7/18/2012	5:07:23 PM	H2 valve closed
7/18/2012	5:07:23 PM	BCl3 valve closed
7/18/2012	5:07:23 PM	PH3 valve closed
7/18/2012	5:07:23 PM	SiCl4 pre valve closed
7/18/2012	5:07:23 PM	SiCl4 post valve closed
7/18/2012	5:07:23 PM	Main Vac valve closed
7/18/2012	5:07:23 PM	Bubbler valve closed
7/18/2012	5:07:23 PM	Bypass valve opened
7/18/2012	5:07:23 PM	Helium MFC set to  0.000000
7/18/2012	5:07:23 PM	H2 MFC set to  0.000000
7/18/2012	5:07:23 PM	BCl3 MFC set to  0.000000
7/18/2012	5:07:23 PM	PH3 MFC set to  0.000000
7/18/2012	5:07:23 PM	SiCl4 MFC set to  0.000000
7/18/2012	5:07:23 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	5:07:23 PM	Tube furnace set to 0
7/18/2012	5:07:39 PM	Helium valve closed
7/18/2012	5:07:39 PM	H2 valve closed
7/18/2012	5:07:39 PM	BCl3 valve closed
7/18/2012	5:07:39 PM	PH3 valve closed
7/18/2012	5:07:39 PM	SiCl4 pre valve closed
7/18/2012	5:07:39 PM	SiCl4 post valve closed
7/18/2012	5:07:39 PM	Bypass valve closed
7/18/2012	5:07:39 PM	Bubbler valve closed
7/18/2012	5:07:39 PM	Main Vac valve opened
7/18/2012	5:07:39 PM	Helium MFC set to  0.000000
7/18/2012	5:07:39 PM	H2 MFC set to  0.000000
7/18/2012	5:07:39 PM	BCl3 MFC set to  0.000000
7/18/2012	5:07:39 PM	PH3 MFC set to  0.000000
7/18/2012	5:07:39 PM	SiCl4 MFC set to  0.000000
7/18/2012	5:07:39 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	5:07:40 PM	Tube furnace set to 0
7/18/2012	5:08:10 PM	H2 valve closed
7/18/2012	5:08:10 PM	BCl3 valve closed
7/18/2012	5:08:10 PM	PH3 valve closed
7/18/2012	5:08:10 PM	SiCl4 pre valve closed
7/18/2012	5:08:10 PM	SiCl4 post valve closed
7/18/2012	5:08:10 PM	Bypass valve closed
7/18/2012	5:08:10 PM	Bubbler valve closed
7/18/2012	5:08:10 PM	Helium valve opened
7/18/2012	5:08:10 PM	Main Vac valve opened
7/18/2012	5:08:10 PM	Helium MFC set to  20.000000
7/18/2012	5:08:10 PM	H2 MFC set to  0.000000
7/18/2012	5:08:10 PM	BCl3 MFC set to  0.000000
7/18/2012	5:08:10 PM	PH3 MFC set to  0.000000
7/18/2012	5:08:10 PM	SiCl4 MFC set to  0.000000
7/18/2012	5:08:10 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	5:08:10 PM	Tube furnace set to 0
7/18/2012	5:08:40 PM	Helium valve closed
7/18/2012	5:08:40 PM	H2 valve closed
7/18/2012	5:08:40 PM	BCl3 valve closed
7/18/2012	5:08:40 PM	PH3 valve closed
7/18/2012	5:08:40 PM	SiCl4 pre valve closed
7/18/2012	5:08:40 PM	SiCl4 post valve closed
7/18/2012	5:08:40 PM	Bypass valve closed
7/18/2012	5:08:40 PM	Bubbler valve closed
7/18/2012	5:08:40 PM	Main Vac valve opened
7/18/2012	5:08:40 PM	Helium MFC set to  0.000000
7/18/2012	5:08:40 PM	H2 MFC set to  0.000000
7/18/2012	5:08:40 PM	BCl3 MFC set to  0.000000
7/18/2012	5:08:40 PM	PH3 MFC set to  0.000000
7/18/2012	5:08:40 PM	SiCl4 MFC set to  0.000000
7/18/2012	5:08:40 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	5:08:40 PM	Tube furnace set to 0
7/18/2012	5:09:10 PM	H2 valve closed
7/18/2012	5:09:10 PM	BCl3 valve closed
7/18/2012	5:09:10 PM	PH3 valve closed
7/18/2012	5:09:10 PM	SiCl4 pre valve closed
7/18/2012	5:09:10 PM	SiCl4 post valve closed
7/18/2012	5:09:10 PM	Bypass valve closed
7/18/2012	5:09:10 PM	Bubbler valve closed
7/18/2012	5:09:10 PM	Helium valve opened
7/18/2012	5:09:10 PM	Main Vac valve opened
7/18/2012	5:09:10 PM	Helium MFC set to  20.000000
7/18/2012	5:09:10 PM	H2 MFC set to  0.000000
7/18/2012	5:09:10 PM	BCl3 MFC set to  0.000000
7/18/2012	5:09:10 PM	PH3 MFC set to  0.000000
7/18/2012	5:09:10 PM	SiCl4 MFC set to  0.000000
7/18/2012	5:09:10 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	5:09:10 PM	Tube furnace set to 0
7/18/2012	5:09:40 PM	Helium valve closed
7/18/2012	5:09:40 PM	H2 valve closed
7/18/2012	5:09:40 PM	BCl3 valve closed
7/18/2012	5:09:40 PM	PH3 valve closed
7/18/2012	5:09:40 PM	SiCl4 pre valve closed
7/18/2012	5:09:40 PM	SiCl4 post valve closed
7/18/2012	5:09:40 PM	Bypass valve closed
7/18/2012	5:09:40 PM	Bubbler valve closed
7/18/2012	5:09:40 PM	Main Vac valve opened
7/18/2012	5:09:40 PM	Helium MFC set to  0.000000
7/18/2012	5:09:40 PM	H2 MFC set to  0.000000
7/18/2012	5:09:40 PM	BCl3 MFC set to  0.000000
7/18/2012	5:09:40 PM	PH3 MFC set to  0.000000
7/18/2012	5:09:40 PM	SiCl4 MFC set to  0.000000
7/18/2012	5:09:40 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	5:09:41 PM	Tube furnace set to 0
7/18/2012	5:10:11 PM	H2 valve closed
7/18/2012	5:10:11 PM	BCl3 valve closed
7/18/2012	5:10:11 PM	PH3 valve closed
7/18/2012	5:10:11 PM	SiCl4 pre valve closed
7/18/2012	5:10:11 PM	SiCl4 post valve closed
7/18/2012	5:10:11 PM	Bypass valve closed
7/18/2012	5:10:11 PM	Bubbler valve closed
7/18/2012	5:10:11 PM	Helium valve opened
7/18/2012	5:10:11 PM	Main Vac valve opened
7/18/2012	5:10:11 PM	Helium MFC set to  20.000000
7/18/2012	5:10:11 PM	H2 MFC set to  0.000000
7/18/2012	5:10:11 PM	BCl3 MFC set to  0.000000
7/18/2012	5:10:11 PM	PH3 MFC set to  0.000000
7/18/2012	5:10:11 PM	SiCl4 MFC set to  0.000000
7/18/2012	5:10:11 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	5:10:11 PM	Tube furnace set to 0
7/18/2012	5:10:41 PM	Helium valve closed
7/18/2012	5:10:41 PM	H2 valve closed
7/18/2012	5:10:41 PM	BCl3 valve closed
7/18/2012	5:10:41 PM	PH3 valve closed
7/18/2012	5:10:41 PM	SiCl4 pre valve closed
7/18/2012	5:10:41 PM	SiCl4 post valve closed
7/18/2012	5:10:41 PM	Bypass valve closed
7/18/2012	5:10:41 PM	Bubbler valve closed
7/18/2012	5:10:41 PM	Main Vac valve opened
7/18/2012	5:10:41 PM	Helium MFC set to  0.000000
7/18/2012	5:10:41 PM	H2 MFC set to  0.000000
7/18/2012	5:10:41 PM	BCl3 MFC set to  0.000000
7/18/2012	5:10:41 PM	PH3 MFC set to  0.000000
7/18/2012	5:10:41 PM	SiCl4 MFC set to  0.000000
7/18/2012	5:10:41 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	5:10:41 PM	Tube furnace set to 0
7/18/2012	5:11:11 PM	H2 valve closed
7/18/2012	5:11:11 PM	BCl3 valve closed
7/18/2012	5:11:11 PM	PH3 valve closed
7/18/2012	5:11:11 PM	SiCl4 pre valve closed
7/18/2012	5:11:11 PM	SiCl4 post valve closed
7/18/2012	5:11:11 PM	Bypass valve closed
7/18/2012	5:11:11 PM	Bubbler valve closed
7/18/2012	5:11:11 PM	Helium valve opened
7/18/2012	5:11:11 PM	Main Vac valve opened
7/18/2012	5:11:11 PM	Helium MFC set to  20.000000
7/18/2012	5:11:11 PM	H2 MFC set to  0.000000
7/18/2012	5:11:11 PM	BCl3 MFC set to  0.000000
7/18/2012	5:11:11 PM	PH3 MFC set to  0.000000
7/18/2012	5:11:11 PM	SiCl4 MFC set to  0.000000
7/18/2012	5:11:11 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	5:11:11 PM	Tube furnace set to 0
7/18/2012	5:11:41 PM	Helium valve closed
7/18/2012	5:11:41 PM	H2 valve closed
7/18/2012	5:11:41 PM	BCl3 valve closed
7/18/2012	5:11:41 PM	PH3 valve closed
7/18/2012	5:11:41 PM	SiCl4 pre valve closed
7/18/2012	5:11:41 PM	SiCl4 post valve closed
7/18/2012	5:11:41 PM	Bypass valve closed
7/18/2012	5:11:41 PM	Bubbler valve closed
7/18/2012	5:11:41 PM	Main Vac valve opened
7/18/2012	5:11:41 PM	Helium MFC set to  0.000000
7/18/2012	5:11:41 PM	H2 MFC set to  0.000000
7/18/2012	5:11:41 PM	BCl3 MFC set to  0.000000
7/18/2012	5:11:41 PM	PH3 MFC set to  0.000000
7/18/2012	5:11:41 PM	SiCl4 MFC set to  0.000000
7/18/2012	5:11:41 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	5:11:41 PM	Tube furnace set to 0
7/18/2012	5:12:11 PM	H2 valve closed
7/18/2012	5:12:11 PM	BCl3 valve closed
7/18/2012	5:12:11 PM	PH3 valve closed
7/18/2012	5:12:11 PM	SiCl4 pre valve closed
7/18/2012	5:12:11 PM	SiCl4 post valve closed
7/18/2012	5:12:12 PM	Bypass valve closed
7/18/2012	5:12:12 PM	Bubbler valve closed
7/18/2012	5:12:12 PM	Helium valve opened
7/18/2012	5:12:12 PM	Main Vac valve opened
7/18/2012	5:12:12 PM	Helium MFC set to  20.000000
7/18/2012	5:12:12 PM	H2 MFC set to  0.000000
7/18/2012	5:12:12 PM	BCl3 MFC set to  0.000000
7/18/2012	5:12:12 PM	PH3 MFC set to  0.000000
7/18/2012	5:12:12 PM	SiCl4 MFC set to  0.000000
7/18/2012	5:12:12 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	5:12:12 PM	Tube furnace set to 0
7/18/2012	5:12:42 PM	Helium valve closed
7/18/2012	5:12:42 PM	H2 valve closed
7/18/2012	5:12:42 PM	BCl3 valve closed
7/18/2012	5:12:42 PM	PH3 valve closed
7/18/2012	5:12:42 PM	SiCl4 pre valve closed
7/18/2012	5:12:42 PM	SiCl4 post valve closed
7/18/2012	5:12:42 PM	Bypass valve closed
7/18/2012	5:12:42 PM	Bubbler valve closed
7/18/2012	5:12:42 PM	Main Vac valve opened
7/18/2012	5:12:42 PM	Helium MFC set to  0.000000
7/18/2012	5:12:42 PM	H2 MFC set to  0.000000
7/18/2012	5:12:42 PM	BCl3 MFC set to  0.000000
7/18/2012	5:12:42 PM	PH3 MFC set to  0.000000
7/18/2012	5:12:42 PM	SiCl4 MFC set to  0.000000
7/18/2012	5:12:42 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	5:12:42 PM	Tube furnace set to 0
7/18/2012	5:13:12 PM	H2 valve closed
7/18/2012	5:13:12 PM	BCl3 valve closed
7/18/2012	5:13:12 PM	PH3 valve closed
7/18/2012	5:13:12 PM	SiCl4 pre valve closed
7/18/2012	5:13:12 PM	SiCl4 post valve closed
7/18/2012	5:13:12 PM	Bypass valve closed
7/18/2012	5:13:12 PM	Bubbler valve closed
7/18/2012	5:13:12 PM	Helium valve opened
7/18/2012	5:13:12 PM	Main Vac valve opened
7/18/2012	5:13:12 PM	Helium MFC set to  20.000000
7/18/2012	5:13:12 PM	H2 MFC set to  0.000000
7/18/2012	5:13:12 PM	BCl3 MFC set to  0.000000
7/18/2012	5:13:12 PM	PH3 MFC set to  0.000000
7/18/2012	5:13:12 PM	SiCl4 MFC set to  0.000000
7/18/2012	5:13:12 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	5:13:12 PM	Tube furnace set to 0
7/18/2012	5:13:42 PM	Helium valve closed
7/18/2012	5:13:42 PM	H2 valve closed
7/18/2012	5:13:42 PM	BCl3 valve closed
7/18/2012	5:13:42 PM	PH3 valve closed
7/18/2012	5:13:42 PM	SiCl4 pre valve closed
7/18/2012	5:13:42 PM	SiCl4 post valve closed
7/18/2012	5:13:42 PM	Bypass valve closed
7/18/2012	5:13:42 PM	Bubbler valve closed
7/18/2012	5:13:42 PM	Main Vac valve opened
7/18/2012	5:13:42 PM	Helium MFC set to  0.000000
7/18/2012	5:13:42 PM	H2 MFC set to  0.000000
7/18/2012	5:13:42 PM	BCl3 MFC set to  0.000000
7/18/2012	5:13:42 PM	PH3 MFC set to  0.000000
7/18/2012	5:13:42 PM	SiCl4 MFC set to  0.000000
7/18/2012	5:13:42 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	5:13:42 PM	Tube furnace set to 0
7/18/2012	5:14:12 PM	H2 valve closed
7/18/2012	5:14:12 PM	BCl3 valve closed
7/18/2012	5:14:12 PM	PH3 valve closed
7/18/2012	5:14:12 PM	SiCl4 pre valve closed
7/18/2012	5:14:12 PM	SiCl4 post valve closed
7/18/2012	5:14:12 PM	Bypass valve closed
7/18/2012	5:14:12 PM	Bubbler valve closed
7/18/2012	5:14:12 PM	Helium valve opened
7/18/2012	5:14:12 PM	Main Vac valve opened
7/18/2012	5:14:12 PM	Helium MFC set to  20.000000
7/18/2012	5:14:12 PM	H2 MFC set to  0.000000
7/18/2012	5:14:12 PM	BCl3 MFC set to  0.000000
7/18/2012	5:14:12 PM	PH3 MFC set to  0.000000
7/18/2012	5:14:13 PM	SiCl4 MFC set to  0.000000
7/18/2012	5:14:13 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	5:14:13 PM	Tube furnace set to 0
7/18/2012	5:14:43 PM	Helium valve closed
7/18/2012	5:14:43 PM	H2 valve closed
7/18/2012	5:14:43 PM	BCl3 valve closed
7/18/2012	5:14:43 PM	PH3 valve closed
7/18/2012	5:14:43 PM	SiCl4 pre valve closed
7/18/2012	5:14:43 PM	SiCl4 post valve closed
7/18/2012	5:14:43 PM	Bypass valve closed
7/18/2012	5:14:43 PM	Bubbler valve closed
7/18/2012	5:14:43 PM	Main Vac valve opened
7/18/2012	5:14:43 PM	Helium MFC set to  0.000000
7/18/2012	5:14:43 PM	H2 MFC set to  0.000000
7/18/2012	5:14:43 PM	BCl3 MFC set to  0.000000
7/18/2012	5:14:43 PM	PH3 MFC set to  0.000000
7/18/2012	5:14:43 PM	SiCl4 MFC set to  0.000000
7/18/2012	5:14:43 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	5:14:43 PM	Tube furnace set to 0
7/18/2012	5:15:13 PM	H2 valve closed
7/18/2012	5:15:13 PM	BCl3 valve closed
7/18/2012	5:15:13 PM	PH3 valve closed
7/18/2012	5:15:13 PM	SiCl4 pre valve closed
7/18/2012	5:15:13 PM	SiCl4 post valve closed
7/18/2012	5:15:13 PM	Bypass valve closed
7/18/2012	5:15:13 PM	Bubbler valve closed
7/18/2012	5:15:13 PM	Helium valve opened
7/18/2012	5:15:13 PM	Main Vac valve opened
7/18/2012	5:15:13 PM	Helium MFC set to  20.000000
7/18/2012	5:15:13 PM	H2 MFC set to  0.000000
7/18/2012	5:15:13 PM	BCl3 MFC set to  0.000000
7/18/2012	5:15:13 PM	PH3 MFC set to  0.000000
7/18/2012	5:15:13 PM	SiCl4 MFC set to  0.000000
7/18/2012	5:15:13 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	5:15:13 PM	Tube furnace set to 0
7/18/2012	5:15:20 PM	Run aborted at 5:15 PM
7/18/2012	5:15:20 PM	Helium valve closed
7/18/2012	5:15:20 PM	H2 valve closed
7/18/2012	5:15:20 PM	BCl3 valve closed
7/18/2012	5:15:20 PM	PH3 valve closed
7/18/2012	5:15:20 PM	SiCl4 pre valve closed
7/18/2012	5:15:20 PM	SiCl4 post valve closed
7/18/2012	5:15:20 PM	Bypass valve closed
7/18/2012	5:15:20 PM	Main Vac valve closed
7/18/2012	5:15:20 PM	Bubbler valve closed
7/18/2012	5:15:20 PM	Helium MFC set to  0.000000
7/18/2012	5:15:20 PM	H2 MFC set to  0.000000
7/18/2012	5:15:20 PM	BCl3 MFC set to  0.000000
7/18/2012	5:15:20 PM	PH3 MFC set to  0.000000
7/18/2012	5:15:20 PM	SiCl4 MFC set to  0.000000
7/18/2012	5:15:20 PM	Tube furnace set to 0
7/18/2012	5:15:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/18/2012	5:15:22 PM	Main Vac valve opened
7/18/2012	5:16:17 PM	Main Vac valve closed
7/18/2012	5:16:28 PM	Main Vac valve opened
7/18/2012	5:16:38 PM	Recipe started at 5:16 PM
7/18/2012	5:16:38 PM	Helium valve closed
7/18/2012	5:16:38 PM	H2 valve closed
7/18/2012	5:16:38 PM	BCl3 valve closed
7/18/2012	5:16:38 PM	PH3 valve closed
7/18/2012	5:16:38 PM	SiCl4 pre valve closed
7/18/2012	5:16:38 PM	SiCl4 post valve closed
7/18/2012	5:16:38 PM	Main Vac valve closed
7/18/2012	5:16:38 PM	Bypass valve closed
7/18/2012	5:16:38 PM	Bubbler valve closed
7/18/2012	5:16:38 PM	Helium MFC set to  0.000000
7/18/2012	5:16:38 PM	H2 MFC set to  0.000000
7/18/2012	5:16:38 PM	BCl3 MFC set to  0.000000
7/18/2012	5:16:38 PM	PH3 MFC set to  0.000000
7/18/2012	5:16:38 PM	SiCl4 MFC set to  0.000000
7/18/2012	5:16:38 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	5:16:38 PM	Tube furnace set to 0
7/18/2012	5:16:41 PM	Helium valve closed
7/18/2012	5:16:41 PM	BCl3 valve closed
7/18/2012	5:16:41 PM	PH3 valve closed
7/18/2012	5:16:41 PM	SiCl4 pre valve closed
7/18/2012	5:16:41 PM	SiCl4 post valve closed
7/18/2012	5:16:41 PM	Main Vac valve closed
7/18/2012	5:16:41 PM	Bypass valve closed
7/18/2012	5:16:41 PM	Bubbler valve closed
7/18/2012	5:16:41 PM	H2 valve opened
7/18/2012	5:16:41 PM	Helium MFC set to  0.000000
7/18/2012	5:16:41 PM	H2 MFC set to  500.000000
7/18/2012	5:16:41 PM	BCl3 MFC set to  0.000000
7/18/2012	5:16:41 PM	PH3 MFC set to  0.000000
7/18/2012	5:16:41 PM	SiCl4 MFC set to  0.000000
7/18/2012	5:16:41 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	5:16:41 PM	Tube furnace set to 50
7/18/2012	5:17:56 PM	Helium valve closed
7/18/2012	5:17:56 PM	BCl3 valve closed
7/18/2012	5:17:56 PM	PH3 valve closed
7/18/2012	5:17:56 PM	SiCl4 pre valve closed
7/18/2012	5:17:56 PM	SiCl4 post valve closed
7/18/2012	5:17:56 PM	Main Vac valve closed
7/18/2012	5:17:56 PM	Bypass valve closed
7/18/2012	5:17:56 PM	H2 valve opened
7/18/2012	5:17:56 PM	Bubbler valve opened
7/18/2012	5:17:56 PM	Helium MFC set to  0.000000
7/18/2012	5:17:56 PM	H2 MFC set to  500.000000
7/18/2012	5:17:56 PM	BCl3 MFC set to  0.000000
7/18/2012	5:17:56 PM	PH3 MFC set to  0.000000
7/18/2012	5:17:56 PM	SiCl4 MFC set to  0.000000
7/18/2012	5:17:56 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	5:17:56 PM	Tube furnace set to 50
7/18/2012	5:17:57 PM	Helium valve closed
7/18/2012	5:17:57 PM	BCl3 valve closed
7/18/2012	5:17:57 PM	PH3 valve closed
7/18/2012	5:17:57 PM	SiCl4 pre valve closed
7/18/2012	5:17:57 PM	SiCl4 post valve closed
7/18/2012	5:17:57 PM	Main Vac valve closed
7/18/2012	5:17:57 PM	Bypass valve closed
7/18/2012	5:17:57 PM	H2 valve opened
7/18/2012	5:17:57 PM	Bubbler valve opened
7/18/2012	5:17:57 PM	Helium MFC set to  0.000000
7/18/2012	5:17:57 PM	H2 MFC set to  500.000000
7/18/2012	5:17:57 PM	BCl3 MFC set to  0.000000
7/18/2012	5:17:57 PM	PH3 MFC set to  0.000000
7/18/2012	5:17:57 PM	SiCl4 MFC set to  0.000000
7/18/2012	5:17:57 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	5:17:58 PM	Tube furnace set to 1000
7/18/2012	5:37:58 PM	Helium valve closed
7/18/2012	5:37:58 PM	BCl3 valve closed
7/18/2012	5:37:58 PM	PH3 valve closed
7/18/2012	5:37:58 PM	Main Vac valve closed
7/18/2012	5:37:58 PM	Bypass valve closed
7/18/2012	5:37:58 PM	H2 valve opened
7/18/2012	5:37:58 PM	SiCl4 pre valve opened
7/18/2012	5:37:58 PM	SiCl4 post valve opened
7/18/2012	5:37:58 PM	Bubbler valve opened
7/18/2012	5:37:58 PM	Helium MFC set to  0.000000
7/18/2012	5:37:58 PM	H2 MFC set to  500.000000
7/18/2012	5:37:58 PM	BCl3 MFC set to  0.000000
7/18/2012	5:37:58 PM	PH3 MFC set to  0.000000
7/18/2012	5:37:58 PM	SiCl4 MFC set to  50.000000
7/18/2012	5:37:58 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	5:37:58 PM	Tube furnace set to 1000
7/18/2012	5:49:58 PM	Helium valve closed
7/18/2012	5:49:58 PM	BCl3 valve closed
7/18/2012	5:49:58 PM	PH3 valve closed
7/18/2012	5:49:58 PM	SiCl4 pre valve closed
7/18/2012	5:49:58 PM	SiCl4 post valve closed
7/18/2012	5:49:58 PM	Main Vac valve closed
7/18/2012	5:49:58 PM	Bypass valve closed
7/18/2012	5:49:59 PM	H2 valve opened
7/18/2012	5:49:59 PM	Bubbler valve opened
7/18/2012	5:49:59 PM	Helium MFC set to  0.000000
7/18/2012	5:49:59 PM	H2 MFC set to  500.000000
7/18/2012	5:49:59 PM	BCl3 MFC set to  0.000000
7/18/2012	5:49:59 PM	PH3 MFC set to  0.000000
7/18/2012	5:49:59 PM	SiCl4 MFC set to  0.000000
7/18/2012	5:49:59 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	5:49:59 PM	Tube furnace set to 750
7/18/2012	5:59:59 PM	H2 valve closed
7/18/2012	5:59:59 PM	BCl3 valve closed
7/18/2012	5:59:59 PM	PH3 valve closed
7/18/2012	5:59:59 PM	SiCl4 pre valve closed
7/18/2012	5:59:59 PM	SiCl4 post valve closed
7/18/2012	5:59:59 PM	Main Vac valve closed
7/18/2012	5:59:59 PM	Bypass valve closed
7/18/2012	5:59:59 PM	Helium valve opened
7/18/2012	5:59:59 PM	Bubbler valve opened
7/18/2012	5:59:59 PM	Helium MFC set to  400.000000
7/18/2012	5:59:59 PM	H2 MFC set to  0.000000
7/18/2012	5:59:59 PM	BCl3 MFC set to  0.000000
7/18/2012	5:59:59 PM	PH3 MFC set to  0.000000
7/18/2012	5:59:59 PM	SiCl4 MFC set to  0.000000
7/18/2012	5:59:59 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	5:59:59 PM	Tube furnace set to 0
7/18/2012	6:04:30 PM	Run aborted at 6:04 PM
7/18/2012	6:04:30 PM	Helium valve closed
7/18/2012	6:04:30 PM	H2 valve closed
7/18/2012	6:04:30 PM	BCl3 valve closed
7/18/2012	6:04:30 PM	PH3 valve closed
7/18/2012	6:04:30 PM	SiCl4 pre valve closed
7/18/2012	6:04:30 PM	SiCl4 post valve closed
7/18/2012	6:04:30 PM	Bypass valve closed
7/18/2012	6:04:30 PM	Main Vac valve closed
7/18/2012	6:04:30 PM	Bubbler valve closed
7/18/2012	6:04:30 PM	Helium MFC set to  0.000000
7/18/2012	6:04:30 PM	H2 MFC set to  0.000000
7/18/2012	6:04:30 PM	BCl3 MFC set to  0.000000
7/18/2012	6:04:30 PM	PH3 MFC set to  0.000000
7/18/2012	6:04:30 PM	SiCl4 MFC set to  0.000000
7/18/2012	6:04:30 PM	Tube furnace set to 0
7/18/2012	6:04:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/18/2012	6:04:43 PM	Recipe started at 6:04 PM
7/18/2012	6:04:43 PM	Helium valve closed
7/18/2012	6:04:43 PM	H2 valve closed
7/18/2012	6:04:43 PM	BCl3 valve closed
7/18/2012	6:04:43 PM	PH3 valve closed
7/18/2012	6:04:43 PM	SiCl4 pre valve closed
7/18/2012	6:04:43 PM	SiCl4 post valve closed
7/18/2012	6:04:43 PM	Main Vac valve closed
7/18/2012	6:04:43 PM	Bypass valve closed
7/18/2012	6:04:43 PM	Bubbler valve closed
7/18/2012	6:04:43 PM	Helium MFC set to  0.000000
7/18/2012	6:04:43 PM	H2 MFC set to  0.000000
7/18/2012	6:04:43 PM	BCl3 MFC set to  0.000000
7/18/2012	6:04:43 PM	PH3 MFC set to  0.000000
7/18/2012	6:04:43 PM	SiCl4 MFC set to  0.000000
7/18/2012	6:04:43 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	6:04:43 PM	Tube furnace set to 0
7/18/2012	6:04:46 PM	H2 valve closed
7/18/2012	6:04:46 PM	BCl3 valve closed
7/18/2012	6:04:46 PM	PH3 valve closed
7/18/2012	6:04:46 PM	SiCl4 pre valve closed
7/18/2012	6:04:46 PM	SiCl4 post valve closed
7/18/2012	6:04:46 PM	Main Vac valve closed
7/18/2012	6:04:46 PM	Bypass valve closed
7/18/2012	6:04:47 PM	Bubbler valve closed
7/18/2012	6:04:47 PM	Helium valve opened
7/18/2012	6:04:47 PM	Helium MFC set to  500.000000
7/18/2012	6:04:47 PM	H2 MFC set to  0.000000
7/18/2012	6:04:47 PM	BCl3 MFC set to  0.000000
7/18/2012	6:04:47 PM	PH3 MFC set to  0.000000
7/18/2012	6:04:47 PM	SiCl4 MFC set to  0.000000
7/18/2012	6:04:47 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	6:04:47 PM	Tube furnace set to 0
7/18/2012	6:04:47 PM	Helium valve closed
7/18/2012	6:04:47 PM	H2 valve closed
7/18/2012	6:04:47 PM	BCl3 valve closed
7/18/2012	6:04:47 PM	PH3 valve closed
7/18/2012	6:04:47 PM	SiCl4 pre valve closed
7/18/2012	6:04:47 PM	SiCl4 post valve closed
7/18/2012	6:04:47 PM	Main Vac valve closed
7/18/2012	6:04:47 PM	Bypass valve closed
7/18/2012	6:04:47 PM	Bubbler valve closed
7/18/2012	6:04:47 PM	Helium MFC set to  0.000000
7/18/2012	6:04:47 PM	H2 MFC set to  0.000000
7/18/2012	6:04:47 PM	BCl3 MFC set to  0.000000
7/18/2012	6:04:47 PM	PH3 MFC set to  0.000000
7/18/2012	6:04:47 PM	SiCl4 MFC set to  0.000000
7/18/2012	6:04:47 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	6:04:47 PM	Tube furnace set to 0
7/18/2012	6:04:48 PM	Run finished at 6:04 PM
7/18/2012	6:04:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/18/2012	6:11:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/18/2012	6:11:55 PM	Recipe started at 6:11 PM
7/18/2012	6:11:55 PM	Helium valve closed
7/18/2012	6:11:55 PM	H2 valve closed
7/18/2012	6:11:55 PM	BCl3 valve closed
7/18/2012	6:11:55 PM	PH3 valve closed
7/18/2012	6:11:55 PM	SiCl4 pre valve closed
7/18/2012	6:11:55 PM	SiCl4 post valve closed
7/18/2012	6:11:55 PM	Main Vac valve closed
7/18/2012	6:11:55 PM	Bubbler valve closed
7/18/2012	6:11:55 PM	Bypass valve opened
7/18/2012	6:11:55 PM	Helium MFC set to  0.000000
7/18/2012	6:11:55 PM	H2 MFC set to  0.000000
7/18/2012	6:11:55 PM	BCl3 MFC set to  0.000000
7/18/2012	6:11:55 PM	PH3 MFC set to  0.000000
7/18/2012	6:11:55 PM	SiCl4 MFC set to  0.000000
7/18/2012	6:11:55 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	6:11:55 PM	Tube furnace set to 0
7/18/2012	6:13:06 PM	Helium valve closed
7/18/2012	6:13:06 PM	H2 valve closed
7/18/2012	6:13:06 PM	BCl3 valve closed
7/18/2012	6:13:06 PM	PH3 valve closed
7/18/2012	6:13:06 PM	SiCl4 pre valve closed
7/18/2012	6:13:06 PM	SiCl4 post valve closed
7/18/2012	6:13:06 PM	Main Vac valve closed
7/18/2012	6:13:06 PM	Bubbler valve closed
7/18/2012	6:13:06 PM	Bypass valve opened
7/18/2012	6:13:06 PM	Helium MFC set to  0.000000
7/18/2012	6:13:06 PM	H2 MFC set to  0.000000
7/18/2012	6:13:06 PM	BCl3 MFC set to  0.000000
7/18/2012	6:13:06 PM	PH3 MFC set to  0.000000
7/18/2012	6:13:06 PM	SiCl4 MFC set to  0.000000
7/18/2012	6:13:06 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	6:13:06 PM	Tube furnace set to 0
7/18/2012	6:14:07 PM	Helium valve closed
7/18/2012	6:14:07 PM	H2 valve closed
7/18/2012	6:14:07 PM	BCl3 valve closed
7/18/2012	6:14:07 PM	PH3 valve closed
7/18/2012	6:14:07 PM	SiCl4 pre valve closed
7/18/2012	6:14:07 PM	SiCl4 post valve closed
7/18/2012	6:14:07 PM	Bypass valve closed
7/18/2012	6:14:07 PM	Bubbler valve closed
7/18/2012	6:14:07 PM	Main Vac valve opened
7/18/2012	6:14:07 PM	Helium MFC set to  0.000000
7/18/2012	6:14:07 PM	H2 MFC set to  0.000000
7/18/2012	6:14:07 PM	BCl3 MFC set to  0.000000
7/18/2012	6:14:07 PM	PH3 MFC set to  0.000000
7/18/2012	6:14:07 PM	SiCl4 MFC set to  0.000000
7/18/2012	6:14:07 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	6:14:07 PM	Tube furnace set to 0
7/18/2012	6:14:08 PM	Run finished at 6:14 PM
7/18/2012	6:14:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/18/2012	6:43:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/18/2012	6:43:37 PM	Recipe started at 6:43 PM
7/18/2012	6:43:37 PM	Helium valve closed
7/18/2012	6:43:37 PM	H2 valve closed
7/18/2012	6:43:37 PM	BCl3 valve closed
7/18/2012	6:43:37 PM	PH3 valve closed
7/18/2012	6:43:37 PM	SiCl4 pre valve closed
7/18/2012	6:43:37 PM	SiCl4 post valve closed
7/18/2012	6:43:37 PM	Main Vac valve closed
7/18/2012	6:43:37 PM	Bubbler valve closed
7/18/2012	6:43:37 PM	Bypass valve opened
7/18/2012	6:43:37 PM	Helium MFC set to  0.000000
7/18/2012	6:43:37 PM	H2 MFC set to  0.000000
7/18/2012	6:43:37 PM	BCl3 MFC set to  0.000000
7/18/2012	6:43:37 PM	PH3 MFC set to  0.000000
7/18/2012	6:43:37 PM	SiCl4 MFC set to  0.000000
7/18/2012	6:43:37 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	6:43:37 PM	Tube furnace set to 0
7/18/2012	6:43:37 PM	Helium valve closed
7/18/2012	6:43:37 PM	H2 valve closed
7/18/2012	6:43:37 PM	BCl3 valve closed
7/18/2012	6:43:37 PM	PH3 valve closed
7/18/2012	6:43:37 PM	SiCl4 pre valve closed
7/18/2012	6:43:37 PM	SiCl4 post valve closed
7/18/2012	6:43:37 PM	Main Vac valve closed
7/18/2012	6:43:37 PM	Bubbler valve closed
7/18/2012	6:43:37 PM	Bypass valve opened
7/18/2012	6:43:37 PM	Helium MFC set to  0.000000
7/18/2012	6:43:37 PM	H2 MFC set to  0.000000
7/18/2012	6:43:37 PM	BCl3 MFC set to  0.000000
7/18/2012	6:43:37 PM	PH3 MFC set to  0.000000
7/18/2012	6:43:37 PM	SiCl4 MFC set to  0.000000
7/18/2012	6:43:37 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	6:43:37 PM	Tube furnace set to 0
7/18/2012	6:44:08 PM	Helium valve closed
7/18/2012	6:44:08 PM	H2 valve closed
7/18/2012	6:44:08 PM	BCl3 valve closed
7/18/2012	6:44:08 PM	PH3 valve closed
7/18/2012	6:44:08 PM	SiCl4 pre valve closed
7/18/2012	6:44:08 PM	SiCl4 post valve closed
7/18/2012	6:44:08 PM	Bypass valve closed
7/18/2012	6:44:08 PM	Bubbler valve closed
7/18/2012	6:44:08 PM	Main Vac valve opened
7/18/2012	6:44:08 PM	Helium MFC set to  0.000000
7/18/2012	6:44:08 PM	H2 MFC set to  0.000000
7/18/2012	6:44:09 PM	BCl3 MFC set to  0.000000
7/18/2012	6:44:09 PM	PH3 MFC set to  0.000000
7/18/2012	6:44:09 PM	SiCl4 MFC set to  0.000000
7/18/2012	6:44:09 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	6:44:09 PM	Tube furnace set to 0
7/18/2012	6:44:38 PM	H2 valve closed
7/18/2012	6:44:38 PM	BCl3 valve closed
7/18/2012	6:44:38 PM	PH3 valve closed
7/18/2012	6:44:38 PM	SiCl4 pre valve closed
7/18/2012	6:44:38 PM	SiCl4 post valve closed
7/18/2012	6:44:38 PM	Bypass valve closed
7/18/2012	6:44:38 PM	Bubbler valve closed
7/18/2012	6:44:38 PM	Helium valve opened
7/18/2012	6:44:38 PM	Main Vac valve opened
7/18/2012	6:44:38 PM	Helium MFC set to  20.000000
7/18/2012	6:44:38 PM	H2 MFC set to  0.000000
7/18/2012	6:44:38 PM	BCl3 MFC set to  0.000000
7/18/2012	6:44:38 PM	PH3 MFC set to  0.000000
7/18/2012	6:44:38 PM	SiCl4 MFC set to  0.000000
7/18/2012	6:44:38 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	6:44:38 PM	Tube furnace set to 0
7/18/2012	6:45:08 PM	Helium valve closed
7/18/2012	6:45:08 PM	H2 valve closed
7/18/2012	6:45:08 PM	BCl3 valve closed
7/18/2012	6:45:08 PM	PH3 valve closed
7/18/2012	6:45:08 PM	SiCl4 pre valve closed
7/18/2012	6:45:08 PM	SiCl4 post valve closed
7/18/2012	6:45:08 PM	Bypass valve closed
7/18/2012	6:45:08 PM	Bubbler valve closed
7/18/2012	6:45:08 PM	Main Vac valve opened
7/18/2012	6:45:08 PM	Helium MFC set to  0.000000
7/18/2012	6:45:08 PM	H2 MFC set to  0.000000
7/18/2012	6:45:08 PM	BCl3 MFC set to  0.000000
7/18/2012	6:45:08 PM	PH3 MFC set to  0.000000
7/18/2012	6:45:08 PM	SiCl4 MFC set to  0.000000
7/18/2012	6:45:08 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	6:45:08 PM	Tube furnace set to 0
7/18/2012	6:45:38 PM	H2 valve closed
7/18/2012	6:45:38 PM	BCl3 valve closed
7/18/2012	6:45:38 PM	PH3 valve closed
7/18/2012	6:45:38 PM	SiCl4 pre valve closed
7/18/2012	6:45:38 PM	SiCl4 post valve closed
7/18/2012	6:45:38 PM	Bypass valve closed
7/18/2012	6:45:38 PM	Bubbler valve closed
7/18/2012	6:45:38 PM	Helium valve opened
7/18/2012	6:45:38 PM	Main Vac valve opened
7/18/2012	6:45:38 PM	Helium MFC set to  20.000000
7/18/2012	6:45:38 PM	H2 MFC set to  0.000000
7/18/2012	6:45:38 PM	BCl3 MFC set to  0.000000
7/18/2012	6:45:38 PM	PH3 MFC set to  0.000000
7/18/2012	6:45:38 PM	SiCl4 MFC set to  0.000000
7/18/2012	6:45:38 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	6:45:38 PM	Tube furnace set to 0
7/18/2012	6:46:09 PM	Helium valve closed
7/18/2012	6:46:09 PM	H2 valve closed
7/18/2012	6:46:09 PM	BCl3 valve closed
7/18/2012	6:46:09 PM	PH3 valve closed
7/18/2012	6:46:09 PM	SiCl4 pre valve closed
7/18/2012	6:46:09 PM	SiCl4 post valve closed
7/18/2012	6:46:09 PM	Bypass valve closed
7/18/2012	6:46:09 PM	Bubbler valve closed
7/18/2012	6:46:09 PM	Main Vac valve opened
7/18/2012	6:46:09 PM	Helium MFC set to  0.000000
7/18/2012	6:46:09 PM	H2 MFC set to  0.000000
7/18/2012	6:46:09 PM	BCl3 MFC set to  0.000000
7/18/2012	6:46:09 PM	PH3 MFC set to  0.000000
7/18/2012	6:46:09 PM	SiCl4 MFC set to  0.000000
7/18/2012	6:46:09 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	6:46:09 PM	Tube furnace set to 0
7/18/2012	6:46:39 PM	H2 valve closed
7/18/2012	6:46:39 PM	BCl3 valve closed
7/18/2012	6:46:39 PM	PH3 valve closed
7/18/2012	6:46:39 PM	SiCl4 pre valve closed
7/18/2012	6:46:39 PM	SiCl4 post valve closed
7/18/2012	6:46:39 PM	Bypass valve closed
7/18/2012	6:46:39 PM	Bubbler valve closed
7/18/2012	6:46:39 PM	Helium valve opened
7/18/2012	6:46:39 PM	Main Vac valve opened
7/18/2012	6:46:39 PM	Helium MFC set to  20.000000
7/18/2012	6:46:39 PM	H2 MFC set to  0.000000
7/18/2012	6:46:39 PM	BCl3 MFC set to  0.000000
7/18/2012	6:46:39 PM	PH3 MFC set to  0.000000
7/18/2012	6:46:39 PM	SiCl4 MFC set to  0.000000
7/18/2012	6:46:39 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	6:46:39 PM	Tube furnace set to 0
7/18/2012	6:47:09 PM	Helium valve closed
7/18/2012	6:47:09 PM	H2 valve closed
7/18/2012	6:47:09 PM	BCl3 valve closed
7/18/2012	6:47:09 PM	PH3 valve closed
7/18/2012	6:47:09 PM	SiCl4 pre valve closed
7/18/2012	6:47:09 PM	SiCl4 post valve closed
7/18/2012	6:47:09 PM	Bypass valve closed
7/18/2012	6:47:09 PM	Bubbler valve closed
7/18/2012	6:47:09 PM	Main Vac valve opened
7/18/2012	6:47:09 PM	Helium MFC set to  0.000000
7/18/2012	6:47:09 PM	H2 MFC set to  0.000000
7/18/2012	6:47:09 PM	BCl3 MFC set to  0.000000
7/18/2012	6:47:09 PM	PH3 MFC set to  0.000000
7/18/2012	6:47:09 PM	SiCl4 MFC set to  0.000000
7/18/2012	6:47:09 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	6:47:09 PM	Tube furnace set to 0
7/18/2012	6:47:39 PM	H2 valve closed
7/18/2012	6:47:39 PM	BCl3 valve closed
7/18/2012	6:47:39 PM	PH3 valve closed
7/18/2012	6:47:39 PM	SiCl4 pre valve closed
7/18/2012	6:47:39 PM	SiCl4 post valve closed
7/18/2012	6:47:39 PM	Bypass valve closed
7/18/2012	6:47:39 PM	Bubbler valve closed
7/18/2012	6:47:39 PM	Helium valve opened
7/18/2012	6:47:39 PM	Main Vac valve opened
7/18/2012	6:47:39 PM	Helium MFC set to  20.000000
7/18/2012	6:47:39 PM	H2 MFC set to  0.000000
7/18/2012	6:47:39 PM	BCl3 MFC set to  0.000000
7/18/2012	6:47:39 PM	PH3 MFC set to  0.000000
7/18/2012	6:47:39 PM	SiCl4 MFC set to  0.000000
7/18/2012	6:47:39 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	6:47:39 PM	Tube furnace set to 0
7/18/2012	6:48:09 PM	Helium valve closed
7/18/2012	6:48:09 PM	H2 valve closed
7/18/2012	6:48:09 PM	BCl3 valve closed
7/18/2012	6:48:09 PM	PH3 valve closed
7/18/2012	6:48:09 PM	SiCl4 pre valve closed
7/18/2012	6:48:09 PM	SiCl4 post valve closed
7/18/2012	6:48:10 PM	Bypass valve closed
7/18/2012	6:48:10 PM	Bubbler valve closed
7/18/2012	6:48:10 PM	Main Vac valve opened
7/18/2012	6:48:10 PM	Helium MFC set to  0.000000
7/18/2012	6:48:10 PM	H2 MFC set to  0.000000
7/18/2012	6:48:10 PM	BCl3 MFC set to  0.000000
7/18/2012	6:48:10 PM	PH3 MFC set to  0.000000
7/18/2012	6:48:10 PM	SiCl4 MFC set to  0.000000
7/18/2012	6:48:10 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	6:48:10 PM	Tube furnace set to 0
7/18/2012	6:48:40 PM	H2 valve closed
7/18/2012	6:48:40 PM	BCl3 valve closed
7/18/2012	6:48:40 PM	PH3 valve closed
7/18/2012	6:48:40 PM	SiCl4 pre valve closed
7/18/2012	6:48:40 PM	SiCl4 post valve closed
7/18/2012	6:48:40 PM	Bypass valve closed
7/18/2012	6:48:40 PM	Bubbler valve closed
7/18/2012	6:48:40 PM	Helium valve opened
7/18/2012	6:48:40 PM	Main Vac valve opened
7/18/2012	6:48:40 PM	Helium MFC set to  20.000000
7/18/2012	6:48:40 PM	H2 MFC set to  0.000000
7/18/2012	6:48:40 PM	BCl3 MFC set to  0.000000
7/18/2012	6:48:40 PM	PH3 MFC set to  0.000000
7/18/2012	6:48:40 PM	SiCl4 MFC set to  0.000000
7/18/2012	6:48:40 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	6:48:40 PM	Tube furnace set to 0
7/18/2012	6:49:10 PM	Helium valve closed
7/18/2012	6:49:10 PM	H2 valve closed
7/18/2012	6:49:10 PM	BCl3 valve closed
7/18/2012	6:49:10 PM	PH3 valve closed
7/18/2012	6:49:10 PM	SiCl4 pre valve closed
7/18/2012	6:49:10 PM	SiCl4 post valve closed
7/18/2012	6:49:10 PM	Bypass valve closed
7/18/2012	6:49:10 PM	Bubbler valve closed
7/18/2012	6:49:10 PM	Main Vac valve opened
7/18/2012	6:49:10 PM	Helium MFC set to  0.000000
7/18/2012	6:49:10 PM	H2 MFC set to  0.000000
7/18/2012	6:49:10 PM	BCl3 MFC set to  0.000000
7/18/2012	6:49:10 PM	PH3 MFC set to  0.000000
7/18/2012	6:49:10 PM	SiCl4 MFC set to  0.000000
7/18/2012	6:49:10 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	6:49:10 PM	Tube furnace set to 0
7/18/2012	6:49:40 PM	H2 valve closed
7/18/2012	6:49:40 PM	BCl3 valve closed
7/18/2012	6:49:40 PM	PH3 valve closed
7/18/2012	6:49:40 PM	SiCl4 pre valve closed
7/18/2012	6:49:40 PM	SiCl4 post valve closed
7/18/2012	6:49:40 PM	Bypass valve closed
7/18/2012	6:49:40 PM	Bubbler valve closed
7/18/2012	6:49:40 PM	Helium valve opened
7/18/2012	6:49:40 PM	Main Vac valve opened
7/18/2012	6:49:40 PM	Helium MFC set to  20.000000
7/18/2012	6:49:40 PM	H2 MFC set to  0.000000
7/18/2012	6:49:40 PM	BCl3 MFC set to  0.000000
7/18/2012	6:49:40 PM	PH3 MFC set to  0.000000
7/18/2012	6:49:40 PM	SiCl4 MFC set to  0.000000
7/18/2012	6:49:40 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	6:49:40 PM	Tube furnace set to 0
7/18/2012	6:50:10 PM	Helium valve closed
7/18/2012	6:50:10 PM	H2 valve closed
7/18/2012	6:50:10 PM	BCl3 valve closed
7/18/2012	6:50:10 PM	PH3 valve closed
7/18/2012	6:50:10 PM	SiCl4 pre valve closed
7/18/2012	6:50:10 PM	SiCl4 post valve closed
7/18/2012	6:50:10 PM	Bypass valve closed
7/18/2012	6:50:10 PM	Bubbler valve closed
7/18/2012	6:50:10 PM	Main Vac valve opened
7/18/2012	6:50:10 PM	Helium MFC set to  0.000000
7/18/2012	6:50:10 PM	H2 MFC set to  0.000000
7/18/2012	6:50:10 PM	BCl3 MFC set to  0.000000
7/18/2012	6:50:10 PM	PH3 MFC set to  0.000000
7/18/2012	6:50:10 PM	SiCl4 MFC set to  0.000000
7/18/2012	6:50:10 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	6:50:11 PM	Tube furnace set to 0
7/18/2012	6:50:41 PM	H2 valve closed
7/18/2012	6:50:41 PM	BCl3 valve closed
7/18/2012	6:50:41 PM	PH3 valve closed
7/18/2012	6:50:41 PM	SiCl4 pre valve closed
7/18/2012	6:50:41 PM	SiCl4 post valve closed
7/18/2012	6:50:41 PM	Bypass valve closed
7/18/2012	6:50:41 PM	Bubbler valve closed
7/18/2012	6:50:41 PM	Helium valve opened
7/18/2012	6:50:41 PM	Main Vac valve opened
7/18/2012	6:50:41 PM	Helium MFC set to  20.000000
7/18/2012	6:50:41 PM	H2 MFC set to  0.000000
7/18/2012	6:50:41 PM	BCl3 MFC set to  0.000000
7/18/2012	6:50:41 PM	PH3 MFC set to  0.000000
7/18/2012	6:50:41 PM	SiCl4 MFC set to  0.000000
7/18/2012	6:50:41 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	6:50:41 PM	Tube furnace set to 0
7/18/2012	6:51:11 PM	Helium valve closed
7/18/2012	6:51:11 PM	H2 valve closed
7/18/2012	6:51:11 PM	BCl3 valve closed
7/18/2012	6:51:11 PM	PH3 valve closed
7/18/2012	6:51:11 PM	SiCl4 pre valve closed
7/18/2012	6:51:11 PM	SiCl4 post valve closed
7/18/2012	6:51:11 PM	Bypass valve closed
7/18/2012	6:51:11 PM	Bubbler valve closed
7/18/2012	6:51:11 PM	Main Vac valve opened
7/18/2012	6:51:11 PM	Helium MFC set to  0.000000
7/18/2012	6:51:11 PM	H2 MFC set to  0.000000
7/18/2012	6:51:11 PM	BCl3 MFC set to  0.000000
7/18/2012	6:51:11 PM	PH3 MFC set to  0.000000
7/18/2012	6:51:11 PM	SiCl4 MFC set to  0.000000
7/18/2012	6:51:11 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	6:51:11 PM	Tube furnace set to 0
7/18/2012	6:51:41 PM	H2 valve closed
7/18/2012	6:51:41 PM	BCl3 valve closed
7/18/2012	6:51:41 PM	PH3 valve closed
7/18/2012	6:51:41 PM	SiCl4 pre valve closed
7/18/2012	6:51:41 PM	SiCl4 post valve closed
7/18/2012	6:51:41 PM	Bypass valve closed
7/18/2012	6:51:41 PM	Bubbler valve closed
7/18/2012	6:51:41 PM	Helium valve opened
7/18/2012	6:51:41 PM	Main Vac valve opened
7/18/2012	6:51:41 PM	Helium MFC set to  20.000000
7/18/2012	6:51:41 PM	H2 MFC set to  0.000000
7/18/2012	6:51:41 PM	BCl3 MFC set to  0.000000
7/18/2012	6:51:41 PM	PH3 MFC set to  0.000000
7/18/2012	6:51:41 PM	SiCl4 MFC set to  0.000000
7/18/2012	6:51:41 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	6:51:41 PM	Tube furnace set to 0
7/18/2012	6:52:11 PM	Helium valve closed
7/18/2012	6:52:11 PM	H2 valve closed
7/18/2012	6:52:11 PM	BCl3 valve closed
7/18/2012	6:52:11 PM	PH3 valve closed
7/18/2012	6:52:11 PM	SiCl4 pre valve closed
7/18/2012	6:52:11 PM	SiCl4 post valve closed
7/18/2012	6:52:11 PM	Bypass valve closed
7/18/2012	6:52:11 PM	Bubbler valve closed
7/18/2012	6:52:11 PM	Main Vac valve opened
7/18/2012	6:52:11 PM	Helium MFC set to  0.000000
7/18/2012	6:52:11 PM	H2 MFC set to  0.000000
7/18/2012	6:52:11 PM	BCl3 MFC set to  0.000000
7/18/2012	6:52:11 PM	PH3 MFC set to  0.000000
7/18/2012	6:52:11 PM	SiCl4 MFC set to  0.000000
7/18/2012	6:52:11 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	6:52:12 PM	Tube furnace set to 0
7/18/2012	6:52:42 PM	H2 valve closed
7/18/2012	6:52:42 PM	BCl3 valve closed
7/18/2012	6:52:42 PM	PH3 valve closed
7/18/2012	6:52:42 PM	SiCl4 pre valve closed
7/18/2012	6:52:42 PM	SiCl4 post valve closed
7/18/2012	6:52:42 PM	Bypass valve closed
7/18/2012	6:52:42 PM	Bubbler valve closed
7/18/2012	6:52:42 PM	Helium valve opened
7/18/2012	6:52:42 PM	Main Vac valve opened
7/18/2012	6:52:42 PM	Helium MFC set to  20.000000
7/18/2012	6:52:42 PM	H2 MFC set to  0.000000
7/18/2012	6:52:42 PM	BCl3 MFC set to  0.000000
7/18/2012	6:52:42 PM	PH3 MFC set to  0.000000
7/18/2012	6:52:42 PM	SiCl4 MFC set to  0.000000
7/18/2012	6:52:42 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	6:52:42 PM	Tube furnace set to 0
7/18/2012	6:53:12 PM	Helium valve closed
7/18/2012	6:53:12 PM	H2 valve closed
7/18/2012	6:53:12 PM	BCl3 valve closed
7/18/2012	6:53:12 PM	PH3 valve closed
7/18/2012	6:53:12 PM	SiCl4 pre valve closed
7/18/2012	6:53:12 PM	SiCl4 post valve closed
7/18/2012	6:53:12 PM	Bypass valve closed
7/18/2012	6:53:12 PM	Bubbler valve closed
7/18/2012	6:53:12 PM	Main Vac valve opened
7/18/2012	6:53:12 PM	Helium MFC set to  0.000000
7/18/2012	6:53:12 PM	H2 MFC set to  0.000000
7/18/2012	6:53:12 PM	BCl3 MFC set to  0.000000
7/18/2012	6:53:12 PM	PH3 MFC set to  0.000000
7/18/2012	6:53:12 PM	SiCl4 MFC set to  0.000000
7/18/2012	6:53:12 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	6:53:12 PM	Tube furnace set to 0
7/18/2012	6:53:42 PM	H2 valve closed
7/18/2012	6:53:42 PM	BCl3 valve closed
7/18/2012	6:53:42 PM	PH3 valve closed
7/18/2012	6:53:42 PM	SiCl4 pre valve closed
7/18/2012	6:53:42 PM	SiCl4 post valve closed
7/18/2012	6:53:42 PM	Bypass valve closed
7/18/2012	6:53:42 PM	Bubbler valve closed
7/18/2012	6:53:42 PM	Helium valve opened
7/18/2012	6:53:42 PM	Main Vac valve opened
7/18/2012	6:53:42 PM	Helium MFC set to  20.000000
7/18/2012	6:53:42 PM	H2 MFC set to  0.000000
7/18/2012	6:53:42 PM	BCl3 MFC set to  0.000000
7/18/2012	6:53:42 PM	PH3 MFC set to  0.000000
7/18/2012	6:53:42 PM	SiCl4 MFC set to  0.000000
7/18/2012	6:53:42 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	6:53:42 PM	Tube furnace set to 0
7/18/2012	6:54:12 PM	Helium valve closed
7/18/2012	6:54:12 PM	H2 valve closed
7/18/2012	6:54:12 PM	BCl3 valve closed
7/18/2012	6:54:12 PM	PH3 valve closed
7/18/2012	6:54:12 PM	SiCl4 pre valve closed
7/18/2012	6:54:12 PM	SiCl4 post valve closed
7/18/2012	6:54:12 PM	Bypass valve closed
7/18/2012	6:54:12 PM	Bubbler valve closed
7/18/2012	6:54:12 PM	Main Vac valve opened
7/18/2012	6:54:12 PM	Helium MFC set to  0.000000
7/18/2012	6:54:12 PM	H2 MFC set to  0.000000
7/18/2012	6:54:12 PM	BCl3 MFC set to  0.000000
7/18/2012	6:54:12 PM	PH3 MFC set to  0.000000
7/18/2012	6:54:12 PM	SiCl4 MFC set to  0.000000
7/18/2012	6:54:12 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	6:54:13 PM	Tube furnace set to 0
7/18/2012	6:54:14 PM	Run finished at 6:54 PM
7/18/2012	6:54:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/18/2012	9:24:23 PM	Main Vac valve closed
7/18/2012	9:24:34 PM	Main Vac valve opened
7/18/2012	9:27:18 PM	Recipe started at 9:27 PM
7/18/2012	9:27:18 PM	Helium valve closed
7/18/2012	9:27:18 PM	H2 valve closed
7/18/2012	9:27:18 PM	BCl3 valve closed
7/18/2012	9:27:18 PM	PH3 valve closed
7/18/2012	9:27:18 PM	SiCl4 pre valve closed
7/18/2012	9:27:18 PM	SiCl4 post valve closed
7/18/2012	9:27:18 PM	Main Vac valve closed
7/18/2012	9:27:18 PM	Bypass valve closed
7/18/2012	9:27:18 PM	Bubbler valve closed
7/18/2012	9:27:18 PM	Helium MFC set to  0.000000
7/18/2012	9:27:18 PM	H2 MFC set to  0.000000
7/18/2012	9:27:18 PM	BCl3 MFC set to  0.000000
7/18/2012	9:27:18 PM	PH3 MFC set to  0.000000
7/18/2012	9:27:18 PM	SiCl4 MFC set to  0.000000
7/18/2012	9:27:18 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	9:27:18 PM	Tube furnace set to 0
7/18/2012	9:27:21 PM	Helium valve closed
7/18/2012	9:27:21 PM	BCl3 valve closed
7/18/2012	9:27:21 PM	PH3 valve closed
7/18/2012	9:27:21 PM	SiCl4 pre valve closed
7/18/2012	9:27:21 PM	SiCl4 post valve closed
7/18/2012	9:27:21 PM	Main Vac valve closed
7/18/2012	9:27:21 PM	Bypass valve closed
7/18/2012	9:27:21 PM	Bubbler valve closed
7/18/2012	9:27:21 PM	H2 valve opened
7/18/2012	9:27:21 PM	Helium MFC set to  0.000000
7/18/2012	9:27:21 PM	H2 MFC set to  500.000000
7/18/2012	9:27:21 PM	BCl3 MFC set to  0.000000
7/18/2012	9:27:21 PM	PH3 MFC set to  0.000000
7/18/2012	9:27:21 PM	SiCl4 MFC set to  0.000000
7/18/2012	9:27:21 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	9:27:21 PM	Tube furnace set to 50
7/18/2012	9:28:36 PM	Helium valve closed
7/18/2012	9:28:36 PM	BCl3 valve closed
7/18/2012	9:28:36 PM	PH3 valve closed
7/18/2012	9:28:36 PM	SiCl4 pre valve closed
7/18/2012	9:28:36 PM	SiCl4 post valve closed
7/18/2012	9:28:36 PM	Main Vac valve closed
7/18/2012	9:28:36 PM	Bypass valve closed
7/18/2012	9:28:36 PM	H2 valve opened
7/18/2012	9:28:36 PM	Bubbler valve opened
7/18/2012	9:28:36 PM	Helium MFC set to  0.000000
7/18/2012	9:28:36 PM	H2 MFC set to  500.000000
7/18/2012	9:28:36 PM	BCl3 MFC set to  0.000000
7/18/2012	9:28:36 PM	PH3 MFC set to  0.000000
7/18/2012	9:28:36 PM	SiCl4 MFC set to  0.000000
7/18/2012	9:28:36 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	9:28:36 PM	Tube furnace set to 50
7/18/2012	9:28:37 PM	Helium valve closed
7/18/2012	9:28:37 PM	BCl3 valve closed
7/18/2012	9:28:37 PM	PH3 valve closed
7/18/2012	9:28:37 PM	SiCl4 pre valve closed
7/18/2012	9:28:37 PM	SiCl4 post valve closed
7/18/2012	9:28:37 PM	Main Vac valve closed
7/18/2012	9:28:37 PM	Bypass valve closed
7/18/2012	9:28:37 PM	H2 valve opened
7/18/2012	9:28:37 PM	Bubbler valve opened
7/18/2012	9:28:37 PM	Helium MFC set to  0.000000
7/18/2012	9:28:37 PM	H2 MFC set to  500.000000
7/18/2012	9:28:37 PM	BCl3 MFC set to  0.000000
7/18/2012	9:28:37 PM	PH3 MFC set to  0.000000
7/18/2012	9:28:37 PM	SiCl4 MFC set to  0.000000
7/18/2012	9:28:37 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	9:28:38 PM	Tube furnace set to 1000
7/18/2012	9:48:38 PM	Helium valve closed
7/18/2012	9:48:38 PM	BCl3 valve closed
7/18/2012	9:48:38 PM	PH3 valve closed
7/18/2012	9:48:38 PM	Main Vac valve closed
7/18/2012	9:48:38 PM	Bypass valve closed
7/18/2012	9:48:38 PM	H2 valve opened
7/18/2012	9:48:38 PM	SiCl4 pre valve opened
7/18/2012	9:48:38 PM	SiCl4 post valve opened
7/18/2012	9:48:38 PM	Bubbler valve opened
7/18/2012	9:48:38 PM	Helium MFC set to  0.000000
7/18/2012	9:48:38 PM	H2 MFC set to  500.000000
7/18/2012	9:48:38 PM	BCl3 MFC set to  0.000000
7/18/2012	9:48:38 PM	PH3 MFC set to  0.000000
7/18/2012	9:48:38 PM	SiCl4 MFC set to  50.000000
7/18/2012	9:48:38 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	9:48:38 PM	Tube furnace set to 1000
7/18/2012	9:56:38 PM	Helium valve closed
7/18/2012	9:56:38 PM	BCl3 valve closed
7/18/2012	9:56:38 PM	PH3 valve closed
7/18/2012	9:56:38 PM	SiCl4 pre valve closed
7/18/2012	9:56:38 PM	SiCl4 post valve closed
7/18/2012	9:56:38 PM	Main Vac valve closed
7/18/2012	9:56:38 PM	Bypass valve closed
7/18/2012	9:56:38 PM	H2 valve opened
7/18/2012	9:56:38 PM	Bubbler valve opened
7/18/2012	9:56:38 PM	Helium MFC set to  0.000000
7/18/2012	9:56:38 PM	H2 MFC set to  500.000000
7/18/2012	9:56:38 PM	BCl3 MFC set to  0.000000
7/18/2012	9:56:38 PM	PH3 MFC set to  0.000000
7/18/2012	9:56:38 PM	SiCl4 MFC set to  0.000000
7/18/2012	9:56:38 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	9:56:38 PM	Tube furnace set to 750
7/18/2012	10:06:38 PM	H2 valve closed
7/18/2012	10:06:38 PM	BCl3 valve closed
7/18/2012	10:06:38 PM	PH3 valve closed
7/18/2012	10:06:38 PM	SiCl4 pre valve closed
7/18/2012	10:06:38 PM	SiCl4 post valve closed
7/18/2012	10:06:38 PM	Main Vac valve closed
7/18/2012	10:06:38 PM	Bypass valve closed
7/18/2012	10:06:38 PM	Helium valve opened
7/18/2012	10:06:38 PM	Bubbler valve opened
7/18/2012	10:06:38 PM	Helium MFC set to  400.000000
7/18/2012	10:06:38 PM	H2 MFC set to  0.000000
7/18/2012	10:06:38 PM	BCl3 MFC set to  0.000000
7/18/2012	10:06:38 PM	PH3 MFC set to  0.000000
7/18/2012	10:06:38 PM	SiCl4 MFC set to  0.000000
7/18/2012	10:06:38 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	10:06:38 PM	Tube furnace set to 0
7/18/2012	10:11:23 PM	Run aborted at 10:11 PM
7/18/2012	10:11:23 PM	Helium valve closed
7/18/2012	10:11:23 PM	H2 valve closed
7/18/2012	10:11:23 PM	BCl3 valve closed
7/18/2012	10:11:23 PM	PH3 valve closed
7/18/2012	10:11:23 PM	SiCl4 pre valve closed
7/18/2012	10:11:23 PM	SiCl4 post valve closed
7/18/2012	10:11:23 PM	Bypass valve closed
7/18/2012	10:11:23 PM	Main Vac valve closed
7/18/2012	10:11:23 PM	Bubbler valve closed
7/18/2012	10:11:23 PM	Helium MFC set to  0.000000
7/18/2012	10:11:23 PM	H2 MFC set to  0.000000
7/18/2012	10:11:23 PM	BCl3 MFC set to  0.000000
7/18/2012	10:11:23 PM	PH3 MFC set to  0.000000
7/18/2012	10:11:23 PM	SiCl4 MFC set to  0.000000
7/18/2012	10:11:23 PM	Tube furnace set to 0
7/18/2012	10:11:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/18/2012	10:11:25 PM	Recipe started at 10:11 PM
7/18/2012	10:11:25 PM	Helium valve closed
7/18/2012	10:11:25 PM	H2 valve closed
7/18/2012	10:11:25 PM	BCl3 valve closed
7/18/2012	10:11:25 PM	PH3 valve closed
7/18/2012	10:11:25 PM	SiCl4 pre valve closed
7/18/2012	10:11:25 PM	SiCl4 post valve closed
7/18/2012	10:11:25 PM	Main Vac valve closed
7/18/2012	10:11:25 PM	Bypass valve closed
7/18/2012	10:11:25 PM	Bubbler valve closed
7/18/2012	10:11:25 PM	Helium MFC set to  0.000000
7/18/2012	10:11:25 PM	H2 MFC set to  0.000000
7/18/2012	10:11:25 PM	BCl3 MFC set to  0.000000
7/18/2012	10:11:25 PM	PH3 MFC set to  0.000000
7/18/2012	10:11:25 PM	SiCl4 MFC set to  0.000000
7/18/2012	10:11:25 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	10:11:25 PM	Tube furnace set to 0
7/18/2012	10:11:29 PM	H2 valve closed
7/18/2012	10:11:29 PM	BCl3 valve closed
7/18/2012	10:11:29 PM	PH3 valve closed
7/18/2012	10:11:29 PM	SiCl4 pre valve closed
7/18/2012	10:11:29 PM	SiCl4 post valve closed
7/18/2012	10:11:29 PM	Main Vac valve closed
7/18/2012	10:11:29 PM	Bypass valve closed
7/18/2012	10:11:29 PM	Bubbler valve closed
7/18/2012	10:11:29 PM	Helium valve opened
7/18/2012	10:11:29 PM	Helium MFC set to  500.000000
7/18/2012	10:11:29 PM	H2 MFC set to  0.000000
7/18/2012	10:11:29 PM	BCl3 MFC set to  0.000000
7/18/2012	10:11:29 PM	PH3 MFC set to  0.000000
7/18/2012	10:11:29 PM	SiCl4 MFC set to  0.000000
7/18/2012	10:11:29 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	10:11:29 PM	Tube furnace set to 0
7/18/2012	10:11:29 PM	Helium valve closed
7/18/2012	10:11:29 PM	H2 valve closed
7/18/2012	10:11:29 PM	BCl3 valve closed
7/18/2012	10:11:29 PM	PH3 valve closed
7/18/2012	10:11:29 PM	SiCl4 pre valve closed
7/18/2012	10:11:29 PM	SiCl4 post valve closed
7/18/2012	10:11:29 PM	Main Vac valve closed
7/18/2012	10:11:29 PM	Bypass valve closed
7/18/2012	10:11:29 PM	Bubbler valve closed
7/18/2012	10:11:29 PM	Helium MFC set to  0.000000
7/18/2012	10:11:29 PM	H2 MFC set to  0.000000
7/18/2012	10:11:29 PM	BCl3 MFC set to  0.000000
7/18/2012	10:11:29 PM	PH3 MFC set to  0.000000
7/18/2012	10:11:29 PM	SiCl4 MFC set to  0.000000
7/18/2012	10:11:29 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	10:11:29 PM	Tube furnace set to 0
7/18/2012	10:11:30 PM	Run finished at 10:11 PM
7/18/2012	10:11:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/18/2012	10:16:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/18/2012	10:16:43 PM	Recipe started at 10:16 PM
7/18/2012	10:16:43 PM	Helium valve closed
7/18/2012	10:16:43 PM	H2 valve closed
7/18/2012	10:16:43 PM	BCl3 valve closed
7/18/2012	10:16:43 PM	PH3 valve closed
7/18/2012	10:16:43 PM	SiCl4 pre valve closed
7/18/2012	10:16:43 PM	SiCl4 post valve closed
7/18/2012	10:16:43 PM	Main Vac valve closed
7/18/2012	10:16:43 PM	Bubbler valve closed
7/18/2012	10:16:43 PM	Bypass valve opened
7/18/2012	10:16:43 PM	Helium MFC set to  0.000000
7/18/2012	10:16:43 PM	H2 MFC set to  0.000000
7/18/2012	10:16:43 PM	BCl3 MFC set to  0.000000
7/18/2012	10:16:43 PM	PH3 MFC set to  0.000000
7/18/2012	10:16:43 PM	SiCl4 MFC set to  0.000000
7/18/2012	10:16:43 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	10:16:43 PM	Tube furnace set to 0
7/18/2012	10:17:52 PM	Helium valve closed
7/18/2012	10:17:52 PM	H2 valve closed
7/18/2012	10:17:52 PM	BCl3 valve closed
7/18/2012	10:17:52 PM	PH3 valve closed
7/18/2012	10:17:52 PM	SiCl4 pre valve closed
7/18/2012	10:17:52 PM	SiCl4 post valve closed
7/18/2012	10:17:52 PM	Main Vac valve closed
7/18/2012	10:17:52 PM	Bubbler valve closed
7/18/2012	10:17:52 PM	Bypass valve opened
7/18/2012	10:17:52 PM	Helium MFC set to  0.000000
7/18/2012	10:17:52 PM	H2 MFC set to  0.000000
7/18/2012	10:17:52 PM	BCl3 MFC set to  0.000000
7/18/2012	10:17:52 PM	PH3 MFC set to  0.000000
7/18/2012	10:17:52 PM	SiCl4 MFC set to  0.000000
7/18/2012	10:17:52 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	10:17:52 PM	Tube furnace set to 0
7/18/2012	10:18:52 PM	Helium valve closed
7/18/2012	10:18:52 PM	H2 valve closed
7/18/2012	10:18:52 PM	BCl3 valve closed
7/18/2012	10:18:52 PM	PH3 valve closed
7/18/2012	10:18:52 PM	SiCl4 pre valve closed
7/18/2012	10:18:52 PM	SiCl4 post valve closed
7/18/2012	10:18:52 PM	Bypass valve closed
7/18/2012	10:18:52 PM	Bubbler valve closed
7/18/2012	10:18:52 PM	Main Vac valve opened
7/18/2012	10:18:52 PM	Helium MFC set to  0.000000
7/18/2012	10:18:52 PM	H2 MFC set to  0.000000
7/18/2012	10:18:52 PM	BCl3 MFC set to  0.000000
7/18/2012	10:18:52 PM	PH3 MFC set to  0.000000
7/18/2012	10:18:52 PM	SiCl4 MFC set to  0.000000
7/18/2012	10:18:52 PM	Bypass solenoid MFC set to  0.000000
7/18/2012	10:18:52 PM	Tube furnace set to 0
7/18/2012	10:18:53 PM	Run finished at 10:18 PM
7/18/2012	10:18:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
